Hato; Toshiaki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hato; Toshiaki.The latest application filed is for "sulfonium salt and photo-acid generator".
- Hato; Toshiaki - Kawasaki JP
- Hato; Toshiaki - Kawasaki-shi JP
| Patent | Date |
|---|---|
| Method of forming pattern Grant 9,459,535 - Motoike , et al. October 4, 2 | 2016-10-04 |
| Resist composition, compound, polymeric compound and method of forming resist pattern Grant 9,244,347 - Komuro , et al. January 26, 2 | 2016-01-26 |
| Positive resist composition and method of forming resist pattern Grant 9,244,349 - Mori , et al. January 26, 2 | 2016-01-26 |
| Resist composition and method of forming resist pattern Grant 9,188,863 - Utsumi , et al. November 17, 2 | 2015-11-17 |
| Resist composition and method of forming resist pattern Grant 9,164,380 - Komuro , et al. October 20, 2 | 2015-10-20 |
| Resist composition, method of forming resist pattern and compound Grant 9,063,416 - Komuro , et al. June 23, 2 | 2015-06-23 |
| Sulfonium salt and photo-acid generator Grant 9,045,398 - Suzuki , et al. June 2, 2 | 2015-06-02 |
| Sulfonium Salt And Photo-acid Generator App 20140357896 - Suzuki; Issei ; et al. | 2014-12-04 |
| Resist Composition, Compound, Polymeric Compound And Method Of Forming Resist Pattern App 20140356787 - Komuro; Yoshitaka ; et al. | 2014-12-04 |
| Resist composition and method of forming resist pattern Grant 8,785,106 - Komuro , et al. July 22, 2 | 2014-07-22 |
| Resist Compposition And Method Of Forming Resist Pattern App 20130344435 - Utsumi; Yoshiyuki ; et al. | 2013-12-26 |
| Resist Composition And Method Of Forming Resist Pattern App 20130224658 - Komuro; Yoshitaka ; et al. | 2013-08-29 |
| Method Of Forming Pattern App 20130209941 - Motoike; Naoto ; et al. | 2013-08-15 |
| Resist Composition And Method Of Forming Resist Pattern App 20130189619 - Komuro; Yoshitaka ; et al. | 2013-07-25 |
| Resist Composition, Method Of Forming Resist Pattern And Compound App 20130157197 - Komuro; Yoshitaka ; et al. | 2013-06-20 |
| Resist composition and method of forming resist pattern Grant 8,354,218 - Hirano , et al. January 15, 2 | 2013-01-15 |
| Resist Composition And Method Of Forming Resist Pattern App 20110039207 - HIRANO; Isao ; et al. | 2011-02-17 |
| Positive Resist Composition And Method Of Forming Resist Pattern App 20100310985 - MORI; Takayoshi ; et al. | 2010-12-09 |
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