loadpatents
Patent applications and USPTO patent grants for Hatem; Christopher R..The latest application filed is for "system for controlling radicals using a radical filter".
Patent | Date |
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Enhanced substrate amorphization using intermittent ion exposure Grant 11,315,790 - Charnvanichborikarn , et al. April 26, 2 | 2022-04-26 |
System For Controlling Radicals Using A Radical Filter App 20210265139 - Hatem; Christopher R. | 2021-08-26 |
Enhanced Substrate Amorphization Using Intermittent Ion Exposure App 20210118681 - CHARNVANICHBORIKARN; SUPAKIT ;   et al. | 2021-04-22 |
Beamline Architecture With Integrated Plasma Processing App 20200411342 - Hatem; Christopher R. ;   et al. | 2020-12-31 |
Method And Apparatus For Non Line-of-sight Doping App 20200152466 - Hatem; Christopher R. ;   et al. | 2020-05-14 |
Method and apparatus for non line-of-sight doping Grant 10,541,137 - Hatem , et al. Ja | 2020-01-21 |
Method And Apparatus For Non Line-of-sight Doping App 20190371608 - Hatem; Christopher R. ;   et al. | 2019-12-05 |
Damage Free Enhancement Of Dopant Diffusion Into A Substrate App 20180240670 - Hatem; Christopher R. ;   et al. | 2018-08-23 |
Damage free enhancement of dopant diffusion into a substrate Grant 9,953,835 - Hatem , et al. April 24, 2 | 2018-04-24 |
Damage Free Enhancement Of Dopant Diffusion Into A Substrate App 20170178908 - Hatem; Christopher R. ;   et al. | 2017-06-22 |
Damage free enhancement of dopant diffusion into a substrate Grant 9,589,802 - Hatem , et al. March 7, 2 | 2017-03-07 |
Techniques for increased dopant activation in compound semiconductors Grant 9,576,819 - Hatem , et al. February 21, 2 | 2017-02-21 |
Techniques for forming 3D structures Grant 9,240,350 - Godet , et al. January 19, 2 | 2016-01-19 |
Techniques to mitigate straggle damage to sensitive structures Grant 9,236,257 - Hatem , et al. January 12, 2 | 2016-01-12 |
Techniques For Increased Dopant Activation In Compound Semiconductors App 20150364325 - Hatem; Christopher R. ;   et al. | 2015-12-17 |
Plasma processing of workpieces to form a coating Grant 9,062,367 - Hatem , et al. June 23, 2 | 2015-06-23 |
Method to generate molecular ions from ions with a smaller atomic mass Grant 9,024,273 - Godet , et al. May 5, 2 | 2015-05-05 |
Method for epitaxial layer overgrowth Grant 8,969,181 - Godet , et al. March 3, 2 | 2015-03-03 |
Techniques To Mitigate Straggle Damage To Sensitive Structures App 20140273502 - Hatem; Christopher R. ;   et al. | 2014-09-18 |
Method of ionization Grant 8,742,373 - Radovanov , et al. June 3, 2 | 2014-06-03 |
Self-aligned masking for solar cell manufacture Grant 8,465,909 - Bateman , et al. June 18, 2 | 2013-06-18 |
Method and system for post-etch treatment of patterned substrate features Grant 8,460,569 - Godet , et al. June 11, 2 | 2013-06-11 |
Plasma Processing Of Workpieces To Form A Coating App 20130064989 - Hatem; Christopher R. ;   et al. | 2013-03-14 |
Techniques For Forming 3d Structures App 20120295444 - Godet; Ludovic ;   et al. | 2012-11-22 |
Method And System For Post-etch Treatment Of Patterned Substrate Features App 20120258600 - Godet; Ludovic ;   et al. | 2012-10-11 |
Method For Epitaxial Layer Overgrowth App 20120258583 - GODET; Ludovic ;   et al. | 2012-10-11 |
Method Of Ionization App 20120145918 - RADOVANOV; Svetlana ;   et al. | 2012-06-14 |
USJ techniques with helium-treated substrates Grant 8,124,506 - Hatem , et al. February 28, 2 | 2012-02-28 |
Low temperature ion implantation Grant 8,101,528 - Hatem , et al. January 24, 2 | 2012-01-24 |
Method For Damage-free Junction Formation App 20110300696 - HATEM; Christopher R. ;   et al. | 2011-12-08 |
Molecular Ion Generation App 20110253902 - Godet; Ludovic ;   et al. | 2011-10-20 |
Optimized halo or pocket cold implants Grant 8,012,843 - Hatem , et al. September 6, 2 | 2011-09-06 |
Ethane implantation with a dilution gas Grant 8,003,957 - Chaney , et al. August 23, 2 | 2011-08-23 |
Self-aligned Masking For Solar Cell Manufacture App 20110104618 - Bateman; Nicholas P.T. ;   et al. | 2011-05-05 |
Low Temperature Ion Implantation App 20110034013 - Hatem; Christopher R. ;   et al. | 2011-02-10 |
Cold Implant For Optimized Silicide Formation App 20110034014 - Hatem; Christopher R. ;   et al. | 2011-02-10 |
Optimized Halo Or Pocket Cold Implants App 20110033998 - Hatem; Christopher R. ;   et al. | 2011-02-10 |
Formation Of Raised Source/Drain On A Strained Thin Film Implanted With Cold And/Or Molecular Carbon App 20100279479 - Hatem; Christopher R. ;   et al. | 2010-11-04 |
Techniques for ion implantation of molecular ions Grant 7,807,961 - Hatem , et al. October 5, 2 | 2010-10-05 |
Reduced Implant Voltage During Ion Implantation App 20100084583 - Hatem; Christopher R. ;   et al. | 2010-04-08 |
Techniques For Ion Implantation Of Molecular Ions App 20100084577 - Hatem; Christopher R. ;   et al. | 2010-04-08 |
Usj Techniques With Helium-treated Substrates App 20100041219 - HATEM; Christopher R. ;   et al. | 2010-02-18 |
Techniques for providing ion source feed materials Grant 7,655,932 - Hatem , et al. February 2, 2 | 2010-02-02 |
Techniques for forming shallow junctions Grant 7,642,150 - Arevalo , et al. January 5, 2 | 2010-01-05 |
Ion implantation device with a dual pumping mode and method thereof Grant 7,622,722 - England , et al. November 24, 2 | 2009-11-24 |
Ethane Implantation With A Dilution Gas App 20090200460 - Chaney; Craig R. ;   et al. | 2009-08-13 |
Techniques For Cold Implantation Of Carbon-containing Species App 20090200494 - Hatem; Christopher R. ;   et al. | 2009-08-13 |
Techniques For Providing Ion Source Feed Materials App 20080169427 - HATEM; Christopher R. ;   et al. | 2008-07-17 |
Techniques For Removing Molecular Fragments From An Ion Implanter App 20080105828 - HATEM; Christopher R. ;   et al. | 2008-05-08 |
Techniques For Forming Shallow Junctions App 20080108208 - Arevalo; Edwin A. ;   et al. | 2008-05-08 |
Ion Implantation Device With A Dual Pumping Mode And Method Thereof App 20080105833 - England; Jonathan Gerald ;   et al. | 2008-05-08 |
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