loadpatents
Patent applications and USPTO patent grants for Hatano; Michio.The latest application filed is for "charged particle beam device, autofocus processing method of charged particle beam device, and detector".
Patent | Date |
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Charged particle beam device Grant 11,348,757 - Yabu , et al. May 31, 2 | 2022-05-31 |
Charged particle beam device Grant 11,348,758 - Suga , et al. May 31, 2 | 2022-05-31 |
Charged Particle Beam Device, Autofocus Processing Method of Charged Particle Beam Device, and Detector App 20220044906 - NAKAMURA; Mitsuhiro ;   et al. | 2022-02-10 |
Charged Particle Beam Device App 20210391143 - SUGA; Anoru ;   et al. | 2021-12-16 |
Charged Particle Beam Device App 20210272768 - YABU; Shuhei ;   et al. | 2021-09-02 |
Image forming apparatus Grant 10,755,396 - Enyama , et al. A | 2020-08-25 |
Analyzing System App 20200225175 - KAGATSUME; Akiko ;   et al. | 2020-07-16 |
Measurement device, calibration method of measurement device, and calibration member Grant 10,438,771 - Hatano , et al. O | 2019-10-08 |
Scanning electron microscope and electron trajectory adjustment method therefor Grant 10,262,830 - Bizen , et al. | 2019-04-16 |
Image Forming Apparatus App 20180232869 - ENYAMA; Momoyo ;   et al. | 2018-08-16 |
Scanning Electron Microscope And Electron Trajectory Adjustment Method Therefor App 20170263415 - BIZEN; Daisuke ;   et al. | 2017-09-14 |
Measurement Device, Calibration Method Of Measurement Device, And Calibration Member App 20170092462 - HATANO; Michio ;   et al. | 2017-03-30 |
Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded Grant 9,521,372 - Momonoi , et al. December 13, 2 | 2016-12-13 |
Scanning electron microscope Grant 9,472,376 - Yokosuka , et al. October 18, 2 | 2016-10-18 |
Charged particle beam apparatus and image forming method Grant 9,245,711 - Hatano , et al. January 26, 2 | 2016-01-26 |
Electron beam apparatus for visualizing a displacement of an electric field Grant 9,208,994 - Ohshima , et al. December 8, 2 | 2015-12-08 |
Charged particle radiation device with bandpass detection Grant 9,202,667 - Hatano , et al. December 1, 2 | 2015-12-01 |
Charged Particle Beam Apparatus and Image Forming Method App 20150221471 - HATANO; Michio ;   et al. | 2015-08-06 |
Scanning electron microscope Grant 9,029,766 - Morishita , et al. May 12, 2 | 2015-05-12 |
Scanning Electron Microscope App 20150008322 - Yokosuka; Toshiyuki ;   et al. | 2015-01-08 |
Charged particle beam apparatus Grant 8,629,395 - Morishita , et al. January 14, 2 | 2014-01-14 |
Pattern Measuring Apparatus, Pattern Measuring Method, And Computer-readable Recording Medium On Which A Pattern Measuring Program Is Recorded App 20130321610 - Momonoi; Yoshinori ;   et al. | 2013-12-05 |
Electron Beam Apparatus App 20130146766 - Ohshima; Takashi ;   et al. | 2013-06-13 |
Charged Particle Radiation Device App 20130043388 - Hatano; Michio ;   et al. | 2013-02-21 |
Charged Particle Beam Apparatus App 20120298864 - Morishita; Hideo ;   et al. | 2012-11-29 |
Scanning electron microscope Grant 8,217,363 - Hatano , et al. July 10, 2 | 2012-07-10 |
Scanning electron microscope Grant 8,097,848 - Hatano , et al. January 17, 2 | 2012-01-17 |
Scanning electron microscope Grant 7,755,045 - Hatano , et al. July 13, 2 | 2010-07-13 |
Scanning Electron Microscope App 20100090109 - HATANO; Michio ;   et al. | 2010-04-15 |
Scanning Electron Microscope App 20090230304 - Hatano; Michio ;   et al. | 2009-09-17 |
Charged Particle Application Apparatus App 20090101817 - OHSHIMA; Takashi ;   et al. | 2009-04-23 |
Scanning electron microscope Grant 7,511,271 - Hatano , et al. March 31, 2 | 2009-03-31 |
Charged particle beam device Grant 7,504,624 - Kawasaki , et al. March 17, 2 | 2009-03-17 |
Scanning electron microscope App 20080237465 - Hatano; Michio ;   et al. | 2008-10-02 |
Scanning Electron Microscope App 20080035843 - Hatano; Michio ;   et al. | 2008-02-14 |
Charged particle beam device App 20060255269 - Kawasaki; Takeshi ;   et al. | 2006-11-16 |
Scanning electron microscope App 20060186337 - Hatano; Michio ;   et al. | 2006-08-24 |
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