HATAKEYAMA; Masahiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for HATAKEYAMA; Masahiro.The latest application filed is for "substrate processing system".

Company Profile

4.98.86

HATAKEYAMA; Masahiro - Tokyo JP
Hatakeyama; Masahiro - Kanagawa-ken JP
Hatakeyama; Masahiro - Fujisawa JP
Hatakeyama; Masahiro - Ohta-Ku JP
Hatakeyama; Masahiro - Ichihara JP
Hatakeyama; Masahiro - Ichihara-shi JP
Hatakeyama; Masahiro - Fujisawa-shi JP
Hatakeyama; Masahiro - Kanagawa N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing System App 20220234164 - TORIKOSHI; Tsuneo ; et al.	2022-07-28
Method For Polishing Substrate Including Functional Chip App 20200391341 - TOGAWA; Tetsuji ; et al.	2020-12-17
Polishing Apparatus App 20200269381 - Shinozaki; Hiroyuki ; et al.	2020-08-27
Polishing apparatus Grant 10,688,620 - Shinozaki , et al.	2020-06-23
Polishing Apparatus Of Substrate App 20200130131 - Togawa; Tetsuji ; et al.	2020-04-30
Information Processing Apparatus, Information Processing System, Information Processing Method, Program, Substrate Processing Ap App 20200109712 - Maishigi; Keiji ; et al.	2020-04-09
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Grant 10,446,404 - Tajima , et al. Oc	2019-10-15
Inspection device Grant 10,157,722 - Hatakeyama , et al. Dec	2018-12-18
Electron-beam Irradiated Area Adjustment Method And Adjustment System, Electron-beam Irradiated Region Correction Method, And Electron Beam Irradiation Apparatus App 20180233374 - TAJIMA; Ryo ; et al.	2018-08-16
Inspection device Grant 10,002,740 - Hatakeyama , et al. June 19, 2	2018-06-19
Specimen observation method and device using secondary emission electron and mirror electron detection Grant 9,966,227 - Hatakeyama , et al. May 8, 2	2018-05-08
Polishing Apparatus And Polishing Method App 20180093360 - SHINOZAKI; Hiroyuki ; et al.	2018-04-05
Inspection Device App 20180040452 - HATAKEYAMA; Masahiro ; et al.	2018-02-08
Surface processing apparatus Grant 9,852,878 - Hatakeyama , et al. December 26, 2	2017-12-26
Inspection apparatus Grant 9,728,374 - Hayashi , et al. August 8, 2	2017-08-08
Inspection apparatus Grant 9,601,302 - Yoshikawa , et al. March 21, 2	2017-03-21
Inspection Apparatus App 20160322192 - HAYASHI; Takehide ; et al.	2016-11-03
Inspection Device App 20160307726 - Hatakeyama; Masahiro ; et al.	2016-10-20
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Inspection apparatus Grant 9,368,322 - Hayashi , et al. June 14, 2	2016-06-14
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Surface Processing Apparatus App 20150371813 - HATAKEYAMA; Masahiro ; et al.	2015-12-24
Inspection Apparatus App 20150340193 - YOSHIKAWA; Shoji ; et al.	2015-11-26
Electron beam apparatus and sample observation method using the same Grant 9,194,826 - Kaga , et al. November 24, 2	2015-11-24
Inspection Apparatus App 20150287570 - HAYASHI; Takehide ; et al.	2015-10-08
Inspection apparatus Grant 9,134,261 - Yoshikawa , et al. September 15, 2	2015-09-15
Electro-optical inspection apparatus and method with dust or particle collection function Grant 9,105,444 - Watanabe , et al. August 11, 2	2015-08-11
Inspection method and apparatus of a glass substrate for imprint Grant 9,074,994 - Hatakeyama , et al. July 7, 2	2015-07-07
Phenol purification process Grant 9,029,609 - Shirahata , et al. May 12, 2	2015-05-12
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Inspection Apparatus App 20150097116 - HATAKEYAMA; Masahiro ; et al.	2015-04-09
Phenol Purification Process App 20150065755 - Shirahata; Tatsuo ; et al.	2015-03-05
Specimen Observation Method And Device Using Secondary Emission Electron And Mirror Electron Detection App 20150060666 - Hatakeyama; Masahiro ; et al.	2015-03-05
Image Acquisition Apparatus, Image Acquisition Method And Defect Inspection Apparatus App 20150041645 - IIDA; Susumu ; et al.	2015-02-12
Inspection apparatus Grant 8,946,629 - Hatakeyama , et al. February 3, 2	2015-02-03
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Specimen observation method and device using secondary emission electron and mirror electron detection Grant 8,937,283 - Hatakeyama , et al. January 20, 2	2015-01-20
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Sample observing device and sample observing method Grant 8,884,225 - Karimata , et al. November 11, 2	2014-11-11
Inspection Apparatus App 20140319345 - HATAKEYAMA; Masahiro ; et al.	2014-10-30
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Method and apparatus for inspecting sample surface Grant 8,859,984 - Noji , et al. October 14, 2	2014-10-14
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Detector and inspecting apparatus Grant 8,796,621 - Hatakeyama , et al. August 5, 2	2014-08-05
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Inspection apparatus Grant 8,742,344 - Hatakeyama , et al. June 3, 2	2014-06-03
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20140091215 - WATANABE; Kenji ; et al.	2014-04-03
Inspection Apparatus App 20140077078 - HATAKEYAMA; Masahiro ; et al.	2014-03-20
Sample surface inspection apparatus and method Grant 8,674,317 - Hatakeyama , et al. March 18, 2	2014-03-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Inspection Device App 20140014848 - Hatakeyama; Masahiro ; et al.	2014-01-16
Electro-optical inspection apparatus and method with dust or particle collection function Grant 8,624,182 - Watanabe , et al. January 7, 2	2014-01-07
Method And Apparatus For Inspecting Sample Surface App 20130313429 - Noji; Nobuharu ; et al.	2013-11-28
Detector And Inspecting Apparatus App 20130228684 - Hatakeyama; Masahiro ; et al.	2013-09-05
Method and apparatus for inspecting sample surface Grant 8,525,127 - Noji , et al. September 3, 2	2013-09-03
Inspection device Grant 8,497,476 - Hatakeyama , et al. July 30, 2	2013-07-30
Sample Observing Device And Sample Observing Method App 20130161511 - Karimata; Tsutomu ; et al.	2013-06-27
Method And Apparatus For Charged Particle Beam Inspection App 20130119251 - Hatakeyama; Masahiro ; et al.	2013-05-16
Detector and inspecting apparatus Grant 8,431,892 - Hatakeyama , et al. April 30, 2	2013-04-30
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Method and apparatus for charged particle beam inspection Grant 8,368,018 - Hatakeyama , et al. February 5, 2	2013-02-05
Substrate surface inspection method and inspection apparatus Grant 8,274,047 - Naito , et al. September 25, 2	2012-09-25
Inspection Device App 20120235036 - Hatakeyama; Masahiro ; et al.	2012-09-20
Method And Apparatus For Inspecting Sample Surface App 20120145921 - Noji; Nobuharu ; et al.	2012-06-14
Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20120074316 - WATANABE; Kenji ; et al.	2012-03-29
Sample Surface Inspection Apparatus And Method App 20120049063 - Hatakeyama; Masahiro ; et al.	2012-03-01
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample Grant 8,124,933 - Watanabe , et al. February 28, 2	2012-02-28
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Sample surface inspection apparatus and method Grant 8,076,654 - Hatakeyama , et al. December 13, 2	2011-12-13
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same Grant 8,013,315 - Watanabe , et al. September 6, 2	2011-09-06
Specimen Observation Method And Device, And Inspection Method And Device Using The Method And Device App 20110155905 - Hatakeyama; Masahiro ; et al.	2011-06-30
Apparatus and method for inspecting sample surface Grant 7,952,071 - Noji , et al. May 31, 2	2011-05-31
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Detector and inspecting apparatus Grant 7,928,382 - Hatakeyama , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Detector And Inspecting Apparatus App 20110024623 - HATAKEYAMA; Masahiro ; et al.	2011-02-03
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2	2011-01-04
Sample surface observation method Grant 7,829,853 - Watanabe , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Substrate Surface Inspection Method And Inspection Apparatus App 20100032566 - Naito; Yoshihiko ; et al.	2010-02-11
Method And Apparatus For Charged Particle Beam Inspection App 20100019147 - Hatakeyama; Masahiro ; et al.	2010-01-28
Mapping-projection-type Electron Beam Apparatus For Inspecting Sample By Using Electrons Emitted From The Sample App 20100019149 - WATANABE; Kenji ; et al.	2010-01-28
Inspection Method And Apparatus Of A Glass Substrate For Imprint App 20100012838 - Hatakeyama; Masahiro ; et al.	2010-01-21
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample Grant 7,592,586 - Watanabe , et al. September 22, 2	2009-09-22
Detector And Inspecting Apparatus App 20090224151 - Hatakeyama; Masahiro ; et al.	2009-09-10
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus Grant 7,521,692 - Hatakeyama , et al. April 21, 2	2009-04-21
Sample Surface Observation Method App 20090090863 - WATANABE; Kenji ; et al.	2009-04-09
Method And Apparatus For Inspecting Sample Surface App 20090050802 - Noji; Nobuharu ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Apparatus And Method For Inspecting Sample Surface App 20090026368 - Noji; Nobuharu ; et al.	2009-01-29
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Detecting apparatus and device manufacturing method Grant 7,449,691 - Hatakeyama , et al. November 11, 2	2008-11-11
Sample surface inspection apparatus and method App 20080265159 - Hatakeyama; Masahiro ; et al.	2008-10-30
Electron Beam Apparatus And Sample Observation Method Using The Same App 20080251718 - KAGA; Toru ; et al.	2008-10-16
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Sample surface inspection apparatus and method Grant 7,391,036 - Hatakeyama , et al. June 24, 2	2008-06-24
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same App 20080099697 - Watanabe; Kenji ; et al.	2008-05-01
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Electron Beam Apparatus And An Aberration Correction Optical Apparatus App 20080067377 - Hatakeyama; Masahiro ; et al.	2008-03-20
TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus App 20080023651 - Hatakeyama; Masahiro ; et al.	2008-01-31
TDI detecting device, a feed-through equipment and electron beam apparatus using these devices Grant 7,285,010 - Hatakeyama , et al. October 23, 2	2007-10-23
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those App 20070192057 - Satake; Tohru ; et al.	2007-08-16
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those Grant 7,220,604 - Satake , et al. May 22, 2	2007-05-22
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus Grant 7,176,459 - Watanabe , et al. February 13, 2	2007-02-13
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample App 20060237646 - Watanabe; Kenji ; et al.	2006-10-26
Detecting apparatus and device manufacturing method App 20060219909 - Hatakeyama; Masahiro ; et al.	2006-10-05
Microfabrication of pattern imprinting Grant 7,115,354 - Hatakeyama , et al. October 3, 2	2006-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and device manufacturing method using same Grant 7,098,457 - Nagahama , et al. August 29, 2	2006-08-29
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Detecting apparatus and device manufacturing method Grant 7,075,072 - Hatakeyama , et al. July 11, 2	2006-07-11
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Electron beam apparatus App 20050253066 - Watanabe, Kenji ; et al.	2005-11-17
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those App 20050224457 - Satake, Tohru ; et al.	2005-10-13
Beam source Grant 6,949,735 - Hatakeyama , et al. September 27, 2	2005-09-27
Electron beam apparatus and device manufacturing method using same App 20050205783 - Nagahama, Ichirota ; et al.	2005-09-22
Sample surface inspection apparatus and method App 20050158653 - Hatakeyama, Masahiro ; et al.	2005-07-21
Electron beam apparatus and device manufacturing method using same Grant 6,909,092 - Nagahama , et al. June 21, 2	2005-06-21
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Tdi detecting device, a feed-through equipment and electron beam apparatus using these devices App 20040173762 - Hatakeyama, Masahiro ; et al.	2004-09-09
Microfabrication of pattern imprinting App 20040090610 - Hatakeyama, Masahiro ; et al.	2004-05-13
Microfabrication of pattern imprinting Grant 6,671,034 - Hatakeyama , et al. December 30, 2	2003-12-30
Electron beam apparatus and device manufacturing method using same App 20030213893 - Nagahama, Ichirota ; et al.	2003-11-20
Magnetic recording disk and method of manufacturing same Grant 6,627,095 - Hatakeyama , et al. September 30, 2	2003-09-30
Detecting apparatus and device manufacturing method App 20030047682 - Hatakeyama, Masahiro ; et al.	2003-03-13
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07
Magnetic recording disk and method of manufacturing same App 20010016235 - Hatakeyama, Masahiro ; et al.	2001-08-23
Magnetic recording disk Grant 6,194,048 - Hatakeyama , et al. February 27, 2	2001-02-27
Fabrication apparatus employing energy beam Grant 6,015,976 - Hatakeyama , et al. January 18, 2	2000-01-18
Ultra-fine microfabrication method using an energy beam Grant 6,010,831 - Hatakeyama , et al. January 4, 2	2000-01-04
Fabrication method employing energy beam source Grant 5,998,097 - Hatakeyama , et al. December 7, 1	1999-12-07
Fabrication method employing and energy beam source Grant 5,989,779 - Hatakeyama , et al. November 23, 1	1999-11-23
Ultra-fine microfabrication method using a fast atomic energy beam Grant 5,894,058 - Hatakeyama , et al. April 13, 1	1999-04-13
Fast atomic beam source with an inductively coupled plasma generator Grant 5,883,470 - Hatakeyama , et al. March 16, 1	1999-03-16
Fabrication method with energy beam Grant 5,868,952 - Hatakeyama , et al. February 9, 1	1999-02-09
Micro-processing apparatus and method therefor Grant 5,852,298 - Hatakeyama , et al. December 22, 1	1998-12-22
Method and apparatus for energy beam machining Grant 5,770,123 - Hatakeyama , et al. June 23, 1	1998-06-23
Fast atom beam source Grant 5,640,009 - Hatakeyama June 17, 1	1997-06-17
Fast atom beam source Grant 5,216,241 - Hatakeyama , et al. June 1, 1	1993-06-01