| Patent | Date |
|---|
Method Of Processing Substrate, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20220277955 - WASEDA; Takayuki ; et al. | 2022-09-01 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20220246422 - HASHIMOTO; Yoshitomo ; et al. | 2022-08-04 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20220230870 - HASHIMOTO; Yoshitomo ; et al. | 2022-07-21 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium And Substrate Processing Apparatus
App 20220208544 - KOSHI; Yasunobu ; et al. | 2022-06-30 |
Method Of Processing Substrate, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20220199421 - DEGAI; Motomu ; et al. | 2022-06-23 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 11,315,800 - Degai , et al. April 26, 2 | 2022-04-26 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus, And Recording Medium
App 20220093388 - NAKATANI; Kimihiko ; et al. | 2022-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20220093385 - SHIMIZU; Tomiyuki ; et al. | 2022-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20220028679 - HARADA; Katsuyoshi ; et al. | 2022-01-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20220020598 - NAKATANI; Kimihiko ; et al. | 2022-01-20 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus, And Recording Medium
App 20210398794 - HARADA; Kazuhiro ; et al. | 2021-12-23 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 11,183,382 - Nakatani , et al. November 23, 2 | 2021-11-23 |
Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium
Grant 11,164,741 - Harada , et al. November 2, 2 | 2021-11-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210301396 - HASHIMOTO; Yoshitomo ; et al. | 2021-09-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210296110 - HARADA; Katsuyoshi ; et al. | 2021-09-23 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210280409 - YAMASHITA; Hiroki ; et al. | 2021-09-09 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 11,056,337 - Harada , et al. July 6, 2 | 2021-07-06 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210202245 - WASEDA; Takayuki ; et al. | 2021-07-01 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210159088 - DEGAI; Motomu ; et al. | 2021-05-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210066073 - HASHIMOTO; Yoshitomo ; et al. | 2021-03-04 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,930,491 - Hashimoto , et al. February 23, 2 | 2021-02-23 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210035801 - WASEDA; Takayuki ; et al. | 2021-02-04 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,910,214 - Hashimoto , et al. February 2, 2 | 2021-02-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200402788 - HASHIMOTO; Yoshitomo ; et al. | 2020-12-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200373151 - HARADA; Katsuyoshi ; et al. | 2020-11-26 |
Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium
Grant 10,790,136 - Matsuoka , et al. September 29, 2 | 2020-09-29 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,770,287 - Harada , et al. Sep | 2020-09-08 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,763,101 - Hashimoto , et al. Sep | 2020-09-01 |
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
Grant 10,755,921 - Hashimoto , et al. A | 2020-08-25 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200176249 - NAKATANI; Kimihiko ; et al. | 2020-06-04 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,626,502 - Hashimoto , et al. | 2020-04-21 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,600,642 - Hirose , et al. | 2020-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200090930 - HASHIMOTO; Yoshitomo ; et al. | 2020-03-19 |
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
Grant 10,586,698 - Hashimoto , et al. | 2020-03-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190393025 - HARADA; Katsuyoshi ; et al. | 2019-12-26 |
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
Grant 10,497,561 - Nakamura , et al. De | 2019-12-03 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190267230 - HARADA; Katsuyoshi ; et al. | 2019-08-29 |
Method Of Manufacturing Semiconductor Device, Substrate Processing System And Non-transitory Computer-readable Recording Medium
App 20190259603 - MATSUOKA; Tatsuru ; et al. | 2019-08-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190221425 - HASHIMOTO; Yoshitomo ; et al. | 2019-07-18 |
Method For Manufacturing Semiconductor Device, Substrate-processing Apparatus, And Recording Medium
App 20190189422 - NAKAMURA; Yoshinobu ; et al. | 2019-06-20 |
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
Grant 10,229,829 - Nakamura , et al. | 2019-03-12 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,199,219 - Shimamoto , et al. Fe | 2019-02-05 |
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
Grant 10,163,625 - Nakamura , et al. Dec | 2018-12-25 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180347047 - HASHIMOTO; Yoshitomo ; et al. | 2018-12-06 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180337031 - HASHIMOTO; Yoshitomo ; et al. | 2018-11-22 |
Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium
Grant 10,096,463 - Hashimoto , et al. October 9, 2 | 2018-10-09 |
Method of manufacturing semiconductor device by forming and modifying film on substrate
Grant 10,090,149 - Hashimoto , et al. October 2, 2 | 2018-10-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180269055 - HASHIMOTO; Yoshitomo ; et al. | 2018-09-20 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,074,535 - Matsuoka , et al. September 11, 2 | 2018-09-11 |
Method For Manufacturing Semiconductor Device, Substrate-processing Apparatus, And Recording Medium
App 20180233351 - NAKAMURA; Yoshinobu ; et al. | 2018-08-16 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180218898 - HIROSE; Yoshiro ; et al. | 2018-08-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180179628 - HASHIMOTO; Yoshitomo ; et al. | 2018-06-28 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,934,962 - Hashimoto , et al. April 3, 2 | 2018-04-03 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180076017 - HASHIMOTO; Yoshitomo ; et al. | 2018-03-15 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,881,789 - Hashimoto , et al. January 30, 2 | 2018-01-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170365467 - SHIMAMOTO; Satoshi ; et al. | 2017-12-21 |
Method of manufacturing semiconductor device and substrate processing method
Grant 9,837,261 - Hirose , et al. December 5, 2 | 2017-12-05 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium
App 20170271144 - HASHIMOTO; Yoshitomo ; et al. | 2017-09-21 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
App 20170263439 - HASHIMOTO; Yoshitomo ; et al. | 2017-09-14 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,741,555 - Hashimoto , et al. August 22, 2 | 2017-08-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170221698 - HASHIMOTO; Yoshitomo ; et al. | 2017-08-03 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,704,703 - Hashimoto , et al. July 11, 2 | 2017-07-11 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,691,606 - Hashimoto , et al. June 27, 2 | 2017-06-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170178902 - HASHIMOTO; Yoshitomo ; et al. | 2017-06-22 |
Method Of Manufacturing Semiconductor Device
App 20170162386 - HASHIMOTO; Yoshitomo ; et al. | 2017-06-08 |
Method For Manufacturing Semiconductor Device, Substrate-processing Apparatus, And Recording Medium
App 20170103885 - NAKAMURA; Yoshinobu ; et al. | 2017-04-13 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,620,357 - Hashimoto , et al. April 11, 2 | 2017-04-11 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,583,338 - Hashimoto , et al. February 28, 2 | 2017-02-28 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170040157 - HASHIMOTO; Yoshitomo ; et al. | 2017-02-09 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170025271 - HASHIMOTO; Yoshitomo ; et al. | 2017-01-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170011908 - MATSUOKA; Tatsuru ; et al. | 2017-01-12 |
Method of Manufacturing Semiconductor Device and Substrate Processing Method
App 20160365243 - HIROSE; Yoshiro ; et al. | 2016-12-15 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 9,460,916 - Shimamoto , et al. October 4, 2 | 2016-10-04 |
Method of manufacturing semiconductor device and substrate processing method
Grant 9,460,911 - Hirose , et al. October 4, 2 | 2016-10-04 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160203978 - HASHIMOTO; Yoshitomo ; et al. | 2016-07-14 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20160071721 - SHIMAMOTO; Satoshi ; et al. | 2016-03-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160013042 - HASHIMOTO; Yoshitomo ; et al. | 2016-01-14 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,218,959 - Shimamoto , et al. December 22, 2 | 2015-12-22 |
Method of Manufacturing Semiconductor Device and Substrate Processing Method
App 20150243498 - HIROSE; Yoshiro ; et al. | 2015-08-27 |
Method of manufacturing semiconductor device and method of processing substrate
Grant 9,054,046 - Hirose , et al. June 9, 2 | 2015-06-09 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150111395 - HASHIMOTO; Yoshitomo ; et al. | 2015-04-23 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20140242809 - HASHIMOTO; Yoshitomo ; et al. | 2014-08-28 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 8,785,333 - Hashimoto , et al. July 22, 2 | 2014-07-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20140057452 - HASHIMOTO; Yoshitomo ; et al. | 2014-02-27 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20130252435 - SHIMAMOTO; Satoshi ; et al. | 2013-09-26 |
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
App 20130149873 - Hirose; Yoshiro ; et al. | 2013-06-13 |
| 