Patent | Date |
---|
Measurement Apparatus And Method App 20210270750 - KUO; Yenting ;   et al. | 2021-09-02 |
Substrate measurement system, method of measuring substrate, and computer program product Grant 10,295,409 - Toshima , et al. | 2019-05-21 |
Manufacturing method of photomask and recording medium Grant 10,151,972 - Hashimoto , et al. Dec | 2018-12-11 |
Layout method of mask pattern, manufacturing method of a semiconductor device and exposure mask Grant 10,120,275 - Hamasaki , et al. November 6, 2 | 2018-11-06 |
Manufacturing Method Of Photomask And Recording Medium App 20180157167 - HASHIMOTO; Takaki ;   et al. | 2018-06-07 |
Measurement apparatus, exposure apparatus, measurement method, and recording medium Grant 9,910,363 - Furubayashi , et al. March 6, 2 | 2018-03-06 |
Layout Method Of Mask Pattern, Manufacturing Method Of A Semiconductor Device And Exposure Mask App 20170329887 - HAMASAKI; Masakazu ;   et al. | 2017-11-16 |
Substrate Measurement System, Method Of Measuring Substrate, And Computer Program Product App 20170235232 - TOSHIMA; Miki ;   et al. | 2017-08-17 |
Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium Grant 9,703,912 - Furubayashi , et al. July 11, 2 | 2017-07-11 |
Microstructure device and method for manufacturing the same Grant 9,698,157 - Kono , et al. July 4, 2 | 2017-07-04 |
Measurement Apparatus, Exposure Apparatus, Measurement Method, And Recording Medium App 20170068170 - FURUBAYASHI; Ai ;   et al. | 2017-03-09 |
Microstructure Device And Method For Manufacturing The Same App 20160268278 - KONO; Yuko ;   et al. | 2016-09-15 |
Mask Set, Fabrication Method Of Mask Set, Manufacturing Method Of Semiconductor Device, And Recording Medium App 20160266484 - Furubayashi; Ai ;   et al. | 2016-09-15 |
Integrated circuit device, method for producing mask layout, and program for producing mask layout Grant 9,257,367 - Okada , et al. February 9, 2 | 2016-02-09 |
Pattern Generating Method, Pattern Forming Method, And Pattern Generating Program App 20150070681 - Uno; Taiga ;   et al. | 2015-03-12 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20150008584 - Hashimoto; Takaki ;   et al. | 2015-01-08 |
Semiconductor device and manufacturing method of semiconductor device Grant 8,865,589 - Hashimoto , et al. October 21, 2 | 2014-10-21 |
Integrated Circuit Device, Method For Producing Mask Layout, And Program For Producing Mask Layout App 20140252639 - OKADA; Motohiro ;   et al. | 2014-09-11 |
Photomask and method for manufacturing the same Grant 8,778,570 - Okuda , et al. July 15, 2 | 2014-07-15 |
Semiconductor device manufacturing method Grant 8,679,731 - Fukuhara , et al. March 25, 2 | 2014-03-25 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20130241073 - Hashimoto; Takaki ;   et al. | 2013-09-19 |
Pattern Generating Apparatus, Pattern Generating Program, And Method For Fabricating Semiconductor Device App 20130045607 - INOUE; Ai ;   et al. | 2013-02-21 |
Semiconductor Device Manufacturing Method App 20120328992 - Fukuhara; Kazuya ;   et al. | 2012-12-27 |
Semiconductor device manufacturing method Grant 8,293,456 - Fukuhara , et al. October 23, 2 | 2012-10-23 |
Semiconductor device and method of manufacturing the same Grant 8,288,812 - Kai , et al. October 16, 2 | 2012-10-16 |
Photomask And Method For Manufacturing The Same App 20120225374 - OKUDA; Kentaro ;   et al. | 2012-09-06 |
Exposure Method And Method For Manufacturing Semiconductor Device App 20120070985 - Hashimoto; Takaki ;   et al. | 2012-03-22 |
Semiconductor Device And Method Of Manufacturing The Same App 20110049601 - Kai; Yasunobu ;   et al. | 2011-03-03 |
Semiconductor Memory Device App 20100202181 - HASHIMOTO; Takaki ;   et al. | 2010-08-12 |
Semiconductor Device Manufacturing Method App 20090220894 - FUKUHARA; Kazuya ;   et al. | 2009-09-03 |