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Patent applications and USPTO patent grants for Hasebe, Keizo.The latest application filed is for "film forming method and film forming apparatus".
Patent | Date |
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Film forming method and film forming apparatus App 20010014224 - Hasebe, Keizo ;   et al. | 2001-08-16 |
Film forming method and film forming apparatus App 20010009135 - Hasebe, Keizo ;   et al. | 2001-07-26 |
Film forming method and film forming apparatus Grant 6,228,561 - Hasebe , et al. May 8, 2 | 2001-05-08 |
Resist processing system having process solution deaeration mechanism Grant 6,217,657 - Kiba , et al. April 17, 2 | 2001-04-17 |
Method of forming coating film and apparatus therefor Grant 6,063,190 - Hasebe , et al. May 16, 2 | 2000-05-16 |
Resist processing apparatus Grant 6,033,475 - Hasebe , et al. March 7, 2 | 2000-03-07 |
Solvent and resist spin coating apparatus Grant 5,942,035 - Hasebe , et al. August 24, 1 | 1999-08-24 |
Resist processing method and resist processing system Grant 5,866,307 - Kiba , et al. February 2, 1 | 1999-02-02 |
Substrate processing system Grant 5,826,129 - Hasebe , et al. October 20, 1 | 1998-10-20 |
Method of forming coating film and apparatus therefor Grant 5,658,615 - Hasebe , et al. August 19, 1 | 1997-08-19 |
System and method for applying a liquid Grant 5,252,137 - Tateyama , et al. October 12, 1 | 1993-10-12 |
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