Hase; Tomoharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hase; Tomoharu.The latest application filed is for "immersion exposure apparatus and device manufacturing method".

Company Profile

0.10.10

Hase; Tomoharu - Kyoto-shi JP
Hase; Tomoharu - Utsunomiya JP
Hase; Tomoharu - Tochigi-ken JP
Hase; Tomoharu - Utsunomiya-shi JP
Hase, Tomoharu - Tochigi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Immersion Exposure Apparatus And Device Manufacturing Method App 20090185150 - Hase; Tomoharu	2009-07-23
Exposing method, exposing apparatus and device manufacturing method utilizing them Grant 7,251,014 - Hase July 31, 2	2007-07-31
Illumination system and exposure apparatus Grant 7,236,239 - Hase June 26, 2	2007-06-26
Exposure apparatus and method of cleaning optical element of the same Grant 7,119,878 - Hase , et al. October 10, 2	2006-10-10
Exposure apparatus and device manufacturing method Grant 7,116,397 - Hase October 3, 2	2006-10-03
Exposure apparatus and method of cleaning optical element of the same Grant 7,061,576 - Hase , et al. June 13, 2	2006-06-13
Exposure apparatus and device manufacturing method App 20060077362 - Hase; Tomoharu	2006-04-13
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components Grant 6,999,159 - Hase February 14, 2	2006-02-14
Exposure apparatus and method of cleaning optical element of the same App 20060001853 - Hase; Tomoharu ; et al.	2006-01-05
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components Grant 6,967,706 - Hase November 22, 2	2005-11-22
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components App 20050231697 - Hase, Tomoharu	2005-10-20
Exposing method, exposing apparatus and device manufacturing method utilizing them App 20050122492 - Hase, Tomoharu	2005-06-09
Illumination system and exposure apparatus App 20050117137 - Hase, Tomoharu	2005-06-02
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components App 20050030499 - Hase, Tomoharu	2005-02-10
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components Grant 6,853,439 - Hase February 8, 2	2005-02-08
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components Grant 6,630,985 - Hase October 7, 2	2003-10-07
Exposure apparatus and device manufacturing method App 20020149753 - Hase, Tomoharu	2002-10-17
Exposure apparatus App 20010030739 - Hase, Tomoharu ; et al.	2001-10-18
Exposure apparatus and method of cleaning optical element of the same App 20010028447 - Hase, Tomoharu ; et al.	2001-10-11
Exposure apparatus and method of cleaning optical element of the same Grant 6,252,648 - Hase , et al. June 26, 2	2001-06-26

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