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Patent applications and USPTO patent grants for HASAN; Tanbir.The latest application filed is for "method and apparatus for pattern fidelity control".
Patent | Date |
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Method And Apparatus For Pattern Fidelity Control App 20210181642 - HASAN; Tanbir ;   et al. | 2021-06-17 |
Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus Grant 11,029,614 - Tel , et al. June 8, 2 | 2021-06-08 |
Method and apparatus for pattern fidelity control Grant 10,908,515 - Hasan , et al. February 2, 2 | 2021-02-02 |
Method And Apparatus For Pattern Fidelity Control App 20200019069 - HASAN; Tanbir ;   et al. | 2020-01-16 |
Level Sensor Apparatus, Method Of Measuring Topographical Variation Across A Substrate, Method Of Measuring Variation Of A Physi App 20190243259 - TEL; Wim Tjibbo ;   et al. | 2019-08-08 |
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