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Patent applications and USPTO patent grants for Harzendorf; Torsten.The latest application filed is for "optical arrangement for spectral decomposition of light".
Patent | Date |
---|---|
Optical Arrangement for Spectral Decomposition of Light App 20180011334 - Zeitner; Uwe Detlef ;   et al. | 2018-01-11 |
Lithographic apparatus and sensor therefor Grant 8,629,418 - Van De Kerkhof , et al. January 14, 2 | 2014-01-14 |
Sensor for use in a lithographic apparatus Grant 7,453,078 - Kok , et al. November 18, 2 | 2008-11-18 |
Sensor for use in a lithographic apparatus App 20080007844 - Kok; Haico Victor ;   et al. | 2008-01-10 |
Sensor for use in a lithographic apparatus Grant 7,282,701 - Kok , et al. October 16, 2 | 2007-10-16 |
Sensor for use in a lithographic apparatus App 20070108377 - Kok; Haico Victor ;   et al. | 2007-05-17 |
Sensor for use in a lithographic apparatus App 20060192093 - Kok; Haico Victor ;   et al. | 2006-08-31 |
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