Harumoto; Masahiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Harumoto; Masahiko.The latest application filed is for "film processing method".

Company Profile

27.38.44

Harumoto; Masahiko - Kyoto JP
HARUMOTO; Masahiko - Kyoto-shi JP
Harumoto; Masahiko - Shimogyo-ku JP
Harumoto; Masahiko - Kamikyo-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure device Grant 11,281,108 - Arisawa , et al. March 22, 2	2022-03-22
Substrate processing apparatus and substrate processing method Grant 11,243,469 - Harumoto , et al. February 8, 2	2022-02-08
Substrate treating method Grant 11,107,698 - Nakayama , et al. August 31, 2	2021-08-31
Film Processing Method App 20210233784 - TANAKA; Yuji ; et al.	2021-07-29
Film processing unit and substrate processing apparatus Grant 11,004,702 - Tanaka , et al. May 11, 2	2021-05-11
Substrate Treating Method And Apparatus Used Therefor App 20210134605 - NAKAYAMA; Chisayo ; et al.	2021-05-06
Exposure Device App 20210088911 - Arisawa; You ; et al.	2021-03-25
Exposure device, substrate processing apparatus, exposure method and substrate processing method Grant 10,955,745 - Nakayama , et al. March 23, 2	2021-03-23
Substrate Processing Apparatus, Film Formation Unit, Substrate Processing Method And Film Formation Method App 20210078036 - TANAKA; Yuji ; et al.	2021-03-18
Substrate treating method Grant 10,941,492 - Tanaka , et al. March 9, 2	2021-03-09
Substrate treating method and apparatus used therefor Grant 10,900,126 - Tanaka , et al. January 26, 2	2021-01-26
Film processing unit, substrate processing apparatus and substrate processing method Grant 10,854,480 - Tanaka , et al. December 1, 2	2020-12-01
Method for processing substrate Grant 10,840,096 - Yamada , et al. November 17, 2	2020-11-17
Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method Grant 10,832,925 - Harumoto , et al. November 10, 2	2020-11-10
Development unit, substrate processing apparatus, development method and substrate processing method Grant 10,754,251 - Tanaka , et al. A	2020-08-25
Developing method Grant 10,684,548 - Tanaka , et al.	2020-06-16
Substrate processing apparatus and substrate processing method Grant 10,591,820 - Harumoto , et al.	2020-03-17
Coating method Grant 10,569,297 - Harumoto , et al. Feb	2020-02-25
Developing method Grant 10,539,877 - Harumoto , et al. Ja	2020-01-21
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method Grant 10,444,636 - Matsuo , et al. Oc	2019-10-15
Developing Method App 20190294049 - HARUMOTO; Masahiko ; et al.	2019-09-26
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method Grant 10,401,736 - Matsuo , et al. Sep	2019-09-03
Etching device, substrate processing apparatus, etching method and substrate processing method Grant 10,395,942 - Harumoto , et al. A	2019-08-27
Method For Processing Substrate App 20190228964 - YAMADA; Takahiro ; et al.	2019-07-25
Substrate Processing Apparatus And Substrate Processing Method App 20190196335 - HARUMOTO; Masahiko ; et al.	2019-06-27
Substrate processing apparatus and substrate processing method Grant 10,331,034 - Tanaka , et al.	2019-06-25
Developing Method App 20190107780 - TANAKA; Yuji ; et al.	2019-04-11
Exposure Device, Substrate Processing Apparatus, Exposure Method And Substrate Processing Method App 20190086808 - NAKAYAMA; Chisayo ; et al.	2019-03-21
Substrate Processing Apparatus And Substrate Processing Method App 20190041754 - HARUMOTO; Masahiko ; et al.	2019-02-07
Development Unit, Substrate Processing Apparatus, Development Method And Substrate Processing Method App 20190041755 - TANAKA; Yuji ; et al.	2019-02-07
Developing method Grant 10,185,219 - Tanaka , et al. Ja	2019-01-22
Substrate Processing Apparatus And Substrate Processing Method App 20190004427 - TANAKA; Yuji ; et al.	2019-01-03
Film Processing Unit And Substrate Processing Apparatus App 20180315625 - TANAKA; Yuji ; et al.	2018-11-01
Film Processing Unit, Substrate Processing Apparatus And Substrate Processing Method App 20180315623 - TANAKA; Yuji ; et al.	2018-11-01
Exposure Device, Substrate Processing Apparatus, Exposure Method Of Substrate And Substrate Processing Method App 20180253011 - MATSUO; Tomohiro ; et al.	2018-09-06
Exposure Device, Substrate Processing Apparatus, Exposure Method Of Substrate And Substrate Processing Method App 20180253012 - MATSUO; Tomohiro ; et al.	2018-09-06
Substrate Treating Method And Apparatus Used Therefor App 20180230598 - TANAKA; Yuji ; et al.	2018-08-16
Substrate Treating Method App 20180230599 - TANAKA; Yuji ; et al.	2018-08-16
Substrate processing apparatus and substrate processing method Grant 10,047,441 - Harumoto , et al. August 14, 2	2018-08-14
Substrate Processing Apparatus, Film Formation Unit, Substrate Processing Method And Film Formation Method App 20180147599 - TANAKA; Yuji ; et al.	2018-05-31
Etching Device, Substrate Processing Apparatus, Etching Method And Substrate Processing Method App 20180076056 - HARUMOTO; Masahiko ; et al.	2018-03-15
Thermal Processing Device, Substrate Processing Apparatus, Thermal Processing Method And Substrate Processing Method App 20180050368 - HARUMOTO; Masahiko ; et al.	2018-02-22
Substrate Processing Apparatus And Substrate Processing Method App 20180044795 - HARUMOTO; Masahiko ; et al.	2018-02-15
Coating Method App 20180036767 - HARUMOTO; Masahiko ; et al.	2018-02-08
Substrate processing apparatus and substrate processing method Grant 9,828,676 - Harumoto , et al. November 28, 2	2017-11-28
Developing apparatus Grant 9,581,907 - Harumoto , et al. February 28, 2	2017-02-28
Substrate Processing Apparatus And Substrate Processing Method App 20160289839 - HARUMOTO; Masahiko ; et al.	2016-10-06
Developing Method App 20160195811 - Tanaka; Yuji ; et al.	2016-07-07
Substrate processing apparatus and substrate processing method Grant 9,375,748 - Harumoto , et al. June 28, 2	2016-06-28
Substrate cleaning method and substrate cleaning device Grant 9,028,621 - Miyagi , et al. May 12, 2	2015-05-12
Developing Apparatus App 20150104747 - Harumoto; Masahiko ; et al.	2015-04-16
Developing method Grant 8,956,695 - Harumoto , et al. February 17, 2	2015-02-17
Apparatus for and method of heat-treating film formed on surface of substrate Grant 8,781,308 - Harumoto July 15, 2	2014-07-15
Substrate Processing Apparatus And Substrate Processing Method App 20140022521 - HARUMOTO; Masahiko ; et al.	2014-01-23
Apparatus For And Method Of Heat-treating Film Formed On Surface Of Substrate App 20120213501 - HARUMOTO; Masahiko	2012-08-23
Developing Apparatus App 20120122038 - Harumoto; Masahiko ; et al.	2012-05-17
Substrate developing method and developing apparatus Grant 8,137,576 - Harumoto , et al. March 20, 2	2012-03-20
Substrate Cleaning Method And Substrate Cleaning Device App 20120006361 - MIYAGI; Tadashi ; et al.	2012-01-12
Apparatus for and method of processing substrate Grant 7,597,491 - Harumoto , et al. October 6, 2	2009-10-06
Developing Apparatus App 20090103960 - Harumoto; Masahiko ; et al.	2009-04-23
Substrate Developing Method And Developing Apparatus App 20080203058 - Harumoto; Masahiko ; et al.	2008-08-28
Method and apparatus for rinsing a substrate during lithographic development processing App 20080090185 - Harumoto; Masahiko ; et al.	2008-04-17
Method and system for performing development processing during photolithography App 20080090186 - Harumoto; Masahiko ; et al.	2008-04-17
Load Lock Device, And Substrate Processing Apparatus And Substrate Processing System Including The Same App 20080025823 - Harumoto; Masahiko	2008-01-31
Pattern forming method, film forming apparatus and pattern forming apparatus App 20070009839 - Harumoto; Masahiko	2007-01-11
Apparatus for and method of processing substrate App 20060088791 - Harumoto; Masahiko ; et al.	2006-04-27
Developing apparatus and developing method Grant 6,869,234 - Sanada , et al. March 22, 2	2005-03-22
Substrate treating method and apparatus App 20040180277 - Harumoto, Masahiko ; et al.	2004-09-16
Developing apparatus and developing method Grant 6,752,544 - Sanada , et al. June 22, 2	2004-06-22
Apparatus for developing substrate Grant 6,749,351 - Sanada , et al. June 15, 2	2004-06-15
Substrate processing apparatus Grant 6,692,165 - Tanaka , et al. February 17, 2	2004-02-17
Developing apparatus and developing method App 20040028403 - Sanada, Masakazu ; et al.	2004-02-12
Apparatus for and method of processing substrate Grant 6,656,277 - Sanada , et al. December 2, 2	2003-12-02
Developing apparatus and developing method App 20030185560 - Sanada, Masakazu ; et al.	2003-10-02
Apparatus For And Method Of Processing Substrate App 20030168007 - Sanada, Masakazu ; et al.	2003-09-11
Apparatus for developing substrate App 20030118341 - Sanada, Masakazu ; et al.	2003-06-26
Substrate processing apparatus App 20020121341 - Tanaka, Akiko ; et al.	2002-09-05