Harrison; Dale A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Harrison; Dale A..The latest application filed is for "vacuum ultraviolet absorption spectroscopy system and method".

Company Profile

8.42.40

Harrison; Dale A. - Austin TX
Harrison; Dale A - Austin TX
Harrison; Dale A. - Gilbert AZ
Harrison; Dale A. - Tracy CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vacuum ultraviolet absorption spectroscopy system and method Grant 10,677,767 - Harrison , et al.	2020-06-09
Vacuum ultraviolet absorption spectroscopy system and method Grant 10,641,749 - Harrison , et al.	2020-05-05
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20190376938 - Harrison; Dale A. ; et al.	2019-12-12
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20190293614 - Harrison; Dale A. ; et al.	2019-09-26
Vacuum ultraviolet absorption spectroscopy system and method Grant 10,338,040 - Harrison , et al.	2019-07-02
Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatography Grant 10,302,607 - Walsh , et al.	2019-05-28
Vacuum ultraviolet absorption spectroscopy system and method Grant 9,976,996 - Harrison , et al. May 22, 2	2018-05-22
Vacuum ultraviolet absorption spectroscopy system and method Grant 9,891,197 - Harrison , et al. February 13, 2	2018-02-13
Vacuum ultraviolet absorption spectroscopy system and method Grant 9,696,286 - Harrison , et al. July 4, 2	2017-07-04
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20170030828 - Harrison; Dale A. ; et al.	2017-02-02
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20170030874 - Harrison; Dale A. ; et al.	2017-02-02
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20160377531 - Harrison; Dale A. ; et al.	2016-12-29
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20160377581 - Harrison; Dale A. ; et al.	2016-12-29
Method For Detailed And Bulk Classification Analysis Of Complex Samples Using Vacuum Ultra-Violet Spectroscopy And Gas Chromatography App 20160363569 - Walsh; Phillip ; et al.	2016-12-15
Vacuum ultraviolet absorption spectroscopy system and method Grant 9,465,015 - Harrison , et al. October 11, 2	2016-10-11
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy Grant 9,310,292 - Walsh , et al. April 12, 2	2016-04-12
Vacuum ultraviolet absorption spectroscopy system and method Grant 9,116,158 - Harrison , et al. August 25, 2	2015-08-25
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20150059440 - Harrison; Dale A. ; et al.	2015-03-05
Polarization device for vacuum ultraviolet or shorter wavelengths Grant 8,867,130 - Harrison , et al. October 21, 2	2014-10-21
Optical vacuum ultra-violet wavelength nanoimprint metrology Grant 8,867,041 - Walsh , et al. October 21, 2	2014-10-21
Methods And Apparatus For Vacuum Ultraviolet (VUV) Or Shorter Wavelength Circular Dichroism Spectroscopy App 20140264053 - Walsh; Phillip ; et al.	2014-09-18
Vacuum Ultraviolet Absorption Spectroscopy System And Method App 20140192343 - Harrison; Dale A. ; et al.	2014-07-10
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy Grant 8,773,662 - Walsh , et al. July 8, 2	2014-07-08
Methods And Apparatus For Vacuum Ultraviolet (vuv) Or Shorter Wavelength Circular Dichroism Spectroscopy App 20120268740 - Walsh; Phillip ; et al.	2012-10-25
Optical Vacuum Ultra-Violet Wavelength Nanoimprint Metrology App 20120182542 - Walsh; Phillip ; et al.	2012-07-19
Automated calibration methodology for VUV metrology system Grant 8,153,987 - Hurst , et al. April 10, 2	2012-04-10
Method and apparatus for accurate calibration of VUV reflectometer Grant 8,119,991 - Harrison February 21, 2	2012-02-21
Broad band referencing reflectometer Grant 8,054,453 - Harrison November 8, 2	2011-11-08
Broad band referencing reflectometer Grant 8,014,000 - Harrison September 6, 2	2011-09-06
Broad Band Referencing Reflectometer App 20100328648 - Harrison; Dale A.	2010-12-30
Method and Apparatus for Accurate Calibration of VUV Reflectometer App 20100301225 - Harrison; Dale A.	2010-12-02
Automated calibration methodology for VUV metrology system App 20100294922 - HURST; JEFFREY B. ; et al.	2010-11-25
Combined Optical Metrology Techniques App 20100277741 - Walsh; Phillip ; et al.	2010-11-04
Method and apparatus for accurate calibration of VUV reflectometer Grant 7,804,059 - Harrison September 28, 2	2010-09-28
Spectrometer with collimated input light Grant 7,684,037 - Harrison , et al. March 23, 2	2010-03-23
Broad band referencing reflectometer App 20100051822 - Harrison; Dale A.	2010-03-04
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,663,097 - Walsh , et al. February 16, 2	2010-02-16
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,663,747 - Harrison , et al. February 16, 2	2010-02-16
Contamination Monitoring And Control Techniques For Use With An Optical Metrology Instrument App 20100000569 - Harrison; Dale A. ; et al.	2010-01-07
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,622,310 - Harrison , et al. November 24, 2	2009-11-24
Spectrometer with moveable detector element Grant 7,579,601 - Harrison , et al. August 25, 2	2009-08-25
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,511,265 - Walsh , et al. March 31, 2	2009-03-31
Prism spectrometer Grant 7,485,869 - Harrison , et al. February 3, 2	2009-02-03
Broad band referencing reflectometer App 20090002711 - Harrison; Dale A.	2009-01-01
Vacuum ultra-violet reflectometer with stray light correction Grant 7,446,876 - Harrison November 4, 2	2008-11-04
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces App 20080246951 - Walsh; Phillip ; et al.	2008-10-09
Spectrometer with moveable detector element App 20080204711 - Harrison; Dale A. ; et al.	2008-08-28
Prism spectrometer App 20080203314 - Harrison; Dale A. ; et al.	2008-08-28
Spectrometer with collimated input light App 20080204710 - Harrison; Dale A. ; et al.	2008-08-28
Method and apparatus for performing highly accurate thin film measurements Grant 7,399,975 - Harrison July 15, 2	2008-07-15
Vacuum ultraviolet referencing reflectometer Grant 7,394,551 - Harrison July 1, 2	2008-07-01
Broad band referencing reflectometer Grant 7,391,030 - Harrison June 24, 2	2008-06-24
Contamination monitoring and control techniques for use with an optical metrology instrument App 20080073560 - Harrison; Dale A. ; et al.	2008-03-27
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,342,235 - Harrison , et al. March 11, 2	2008-03-11
Broad band referencing reflectometer App 20080042071 - Harrison; Dale A.	2008-02-21
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,282,703 - Walsh , et al. October 16, 2	2007-10-16
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement App 20070215801 - Walsh; Phillip ; et al.	2007-09-20
Vacuum ultraviolet reflectometer having collimated beam Grant 7,271,394 - Harrison September 18, 2	2007-09-18
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement App 20070181794 - Walsh; Phillip ; et al.	2007-08-09
Method and apparatus for accurate calibration of VUV reflectometer App 20070181793 - Harrison; Dale A.	2007-08-09
Method and apparatus for performing highly accurate thin film measurements App 20070182970 - Harrison; Dale A.	2007-08-09
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement App 20070181795 - Walsh; Phillip ; et al.	2007-08-09
Vacuum ultraviolet reflectometer integrated with processing system Grant 7,189,973 - Harrison March 13, 2	2007-03-13
Broad band referencing reflectometer App 20070030488 - Harrison; Dale A.	2007-02-08
Broad band referencing reflectometer Grant 7,126,131 - Harrison October 24, 2	2006-10-24
Vacuum ultraviolet reflectometer integrated with processing system App 20060208198 - Harrison; Dale A.	2006-09-21
Vacuum ultraviolet reflectometer having collimated beam App 20060192958 - Harrison; Dale A.	2006-08-31
Vacuum ultraviolet reflectometer system and method Grant 7,067,818 - Harrison June 27, 2	2006-06-27
Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer Grant 7,026,626 - Harrison April 11, 2	2006-04-11
Broad band referencing reflectometer App 20050006590 - Harrison, Dale A.	2005-01-13
Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer App 20050001173 - Harrison, Dale A.	2005-01-06
Vacuum ultraviolet reflectometer system and method App 20050001172 - Harrison, Dale A.	2005-01-06
Vacuum ultraviolet referencing reflectometer App 20050002037 - Harrison, Dale A.	2005-01-06
Method of inferring optical parameters outside of a measurement spectral range Grant 6,710,865 - Forouhi , et al. March 23, 2	2004-03-23
Method of monitoring thin-film processes and metrology tool thereof App 20030053081 - Forouhi, Abdul Rahim ; et al.	2003-03-20
Method of inferring optical parameters outside of a measurement spectral range App 20020113957 - Forouhi, Abdul Rahim ; et al.	2002-08-22
Graded anti-reflective coatings for photolithography App 20020097493 - Li, Guoguang ; et al.	2002-07-25
Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate Grant 6,392,756 - Li , et al. May 21, 2	2002-05-21
Method and apparatus for optically examining miniature patterns Grant 6,327,035 - Li , et al. December 4, 2	2001-12-04

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