Patent | Date |
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Modular Mainframe Layout For Supporting Multiple Semiconductor Process Modules Or Chambers App 20220262652 - HARRIS; Randy A. ;   et al. | 2022-08-18 |
Modular Mainframe Layout For Supporting Multiple Semiconductor Process Modules Or Chambers App 20220262653 - HARRIS; Randy A. ;   et al. | 2022-08-18 |
Wafer electroplating chuck assembly Grant 10,174,437 - Harris , et al. J | 2019-01-08 |
Wafer processing system with chuck assembly maintenance module Grant 9,812,344 - Rye , et al. November 7, 2 | 2017-11-07 |
Electroplating apparatus with contact ring deplating Grant 9,598,788 - Harris , et al. March 21, 2 | 2017-03-21 |
Wafer Electroplating Chuck Assembly App 20170009367 - Harris; Randy A. ;   et al. | 2017-01-12 |
Electroplating With Reduced Air Bubble Defects App 20160237584 - McHugh; Paul R. ;   et al. | 2016-08-18 |
Wafer Processing System With Chuck Assembly Maintenance Module App 20160225656 - Rye; Jason ;   et al. | 2016-08-04 |
Electroplating Processor With Geometric Electrolyte Flow Path App 20150075976 - Harris; Randy A. ;   et al. | 2015-03-19 |
Electroplating processor with geometric electrolyte flow path Grant 8,968,533 - Harris , et al. March 3, 2 | 2015-03-03 |
Contact ring for an electrochemical processor Grant 8,900,425 - Harris , et al. December 2, 2 | 2014-12-02 |
Electroplating Processor With Vacuum Rotor App 20140262795 - Zimmerman; Nolan L. ;   et al. | 2014-09-18 |
Electroplating Apparatus With Contact Ring Deplating App 20140083862 - Harris; Randy A. ;   et al. | 2014-03-27 |
Electroplating Processor With Geometric Electrolyte Flow Path App 20130299343 - Harris; Randy A. ;   et al. | 2013-11-14 |
Contact Ring For An Electrochemical Processor App 20130134035 - Harris; Randy A. ;   et al. | 2013-05-30 |
High throughput semiconductor wafer processing Grant 7,934,898 - Harris , et al. May 3, 2 | 2011-05-03 |
System for processing a workpiece Grant 7,849,865 - Harris December 14, 2 | 2010-12-14 |
Apparatus and method for cleaning and drying a container for semiconductor workpieces Grant 7,520,286 - Davis , et al. April 21, 2 | 2009-04-21 |
Workpiece Loading System App 20090022574 - Eudy; Steve L. ;   et al. | 2009-01-22 |
High Throughput Semiconductor Wafer Processing App 20090024244 - Harris; Randy A. ;   et al. | 2009-01-22 |
System For Processing A Workpiece App 20080163898 - Harris; Randy A. | 2008-07-10 |
Thermal wafer processor Grant 7,371,998 - Harris , et al. May 13, 2 | 2008-05-13 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces Grant 7,371,306 - Davis , et al. May 13, 2 | 2008-05-13 |
End-effectors for handling microelectronic wafers Grant 7,334,826 - Woodruff , et al. February 26, 2 | 2008-02-26 |
Thermal Wafer Processor App 20080006617 - Harris; Randy A. ;   et al. | 2008-01-10 |
End-effectors for handling microelectronic workpieces Grant 7,281,741 - Woodruff , et al. October 16, 2 | 2007-10-16 |
Apparatus and method for cleaning and drying a container for semiconductor workpieces App 20070125404 - Davis; Jeffry Alan ;   et al. | 2007-06-07 |
End-effectors for handling microelectronic workpieces App 20070104559 - Woodruff; Daniel J. ;   et al. | 2007-05-10 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems Grant 7,198,694 - Woodruff , et al. April 3, 2 | 2007-04-03 |
End-effectors and associated control and guidance systems and methods App 20070014656 - Harris; Randy A. ;   et al. | 2007-01-18 |
Apparatuses and method for transferring and/or pre-processing microelectronic workpieces Grant 7,114,903 - Harris , et al. October 3, 2 | 2006-10-03 |
Modular tool unit for processing of microfeature workpieces App 20060045666 - Harris; Randy A. ;   et al. | 2006-03-02 |
Modular tool unit for processing microelectronic workpieces App 20060009047 - Wirth; Paul Zachary ;   et al. | 2006-01-12 |
Method and apparatus for securing microelectronic workpiece containers Grant 6,969,841 - Harris November 29, 2 | 2005-11-29 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces App 20050061438 - Davis, Jeffry Alan ;   et al. | 2005-03-24 |
Interchangeable workpiece handling apparatus and associated tool for processing microfeature workpieces App 20050063798 - Davis, Jeffry Alan ;   et al. | 2005-03-24 |
Wet chemical processing chambers for processing microfeature workpieces App 20050050767 - Hanson, Kyle M. ;   et al. | 2005-03-10 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems App 20050034809 - Woodruff, Daniel J. ;   et al. | 2005-02-17 |
Apparatuses and method for transferring and/or pre-processing microelectronic workpieces App 20040049911 - Harris, Randy A. ;   et al. | 2004-03-18 |
End-effectors for handling microelectronic workpieces App 20030085582 - Woodruff, Daniel J. ;   et al. | 2003-05-08 |
End-effectors for handling microelectronic workpieces App 20030082042 - Woodruff, Daniel J. ;   et al. | 2003-05-01 |