Patent | Date |
---|
Thin film display element and manufacturing Grant 11,335,766 - Malvaranta , et al. May 17, 2 | 2022-05-17 |
Thin Film Display Element And Manufacturing App 20200035777 - MALVARANTA; Pertti ;   et al. | 2020-01-30 |
Inorganic Tfel Display Element And Manufacturing App 20190223268 - SEPPANEN; Heli ;   et al. | 2019-07-18 |
Display device and a method for manufacturing such device Grant 10,111,300 - Harkonen October 23, 2 | 2018-10-23 |
Display Device And A Method For Manufacturing Such Device App 20180077773 - Harkonen; Kari | 2018-03-15 |
Transparent inorganic thin-film electroluminescent display element and method for manufacturing it Grant 9,226,362 - Harkonen December 29, 2 | 2015-12-29 |
Transparent Inorganic Thin-film Electroluminescent Display Element And Method For Manufacturing It App 20150189718 - Harkonen; Kari | 2015-07-02 |
Multilayer moisture barrier Grant 9,013,018 - Pankow , et al. April 21, 2 | 2015-04-21 |
Method in depositing metal oxide materials Grant 8,367,561 - Maula , et al. February 5, 2 | 2013-02-05 |
Moisture Barrier App 20130009264 - Pankow; Joel W. ;   et al. | 2013-01-10 |
Gas Deposition Reactor App 20110265720 - Maula; Jarmo ;   et al. | 2011-11-03 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys App 20110097858 - Doczy; Mark ;   et al. | 2011-04-28 |
Multilayer material and method of preparing same Grant 7,901,736 - Maula , et al. March 8, 2 | 2011-03-08 |
Method In Depositing Metal Oxide Materials App 20100167555 - Maula; Jarmo ;   et al. | 2010-07-01 |
Selective Aluminum Doping Of Copper Interconnects And Structures Formed Thereby App 20080241575 - Lavoie; Adrein R. ;   et al. | 2008-10-02 |
Method for preventing metal leaching from copper and its alloys App 20070269595 - Harkonen; Kari ;   et al. | 2007-11-22 |
Precursor Material Delivery System With Staging Volume For Atomic Layer Deposition App 20070117383 - Aitchison; Bradley J. ;   et al. | 2007-05-24 |
Transition metal alloys for use a gate electrode and device incorporating these alloys App 20070096163 - Doczy; Mark ;   et al. | 2007-05-03 |
Precursor Material Delivery System With Thermal Enhancements For Atomic Layer Deposition App 20070089674 - Aitchison; Bradley J. ;   et al. | 2007-04-26 |
Deposition of carbon- and transition metal-containing thin films Grant 7,198,820 - Harkonen , et al. April 3, 2 | 2007-04-03 |
Diaphragm valve for atomic layer deposition Grant 7,191,793 - Maula , et al. March 20, 2 | 2007-03-20 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys Grant 7,193,253 - Doczy , et al. March 20, 2 | 2007-03-20 |
Precursor material delivery system for atomic layer deposition Grant 7,141,095 - Aitchison , et al. November 28, 2 | 2006-11-28 |
Diaphragm Valve For Atomic Layer Deposition App 20060174945 - Maula; Jarmo Ilmari ;   et al. | 2006-08-10 |
Multilayer material and method of preparing same App 20060134433 - Maula; Jarmo ;   et al. | 2006-06-22 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys Grant 7,030,430 - Doczy , et al. April 18, 2 | 2006-04-18 |
Diaphragm valve with reliability enhancements for atomic layer deposition Grant 7,021,330 - Maula , et al. April 4, 2 | 2006-04-04 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys App 20050280050 - Doczy, Mark ;   et al. | 2005-12-22 |
High-speed diaphragm valve for atomic layer deposition Grant 6,941,963 - Maula , et al. September 13, 2 | 2005-09-13 |
High conductivity particle filter Grant 6,936,086 - Harkonen , et al. August 30, 2 | 2005-08-30 |
Diaphragm valve for high-temperature precursor supply in atomic layer deposition Grant 6,907,897 - Maula , et al. June 21, 2 | 2005-06-21 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys App 20050037557 - Doczy, Mark ;   et al. | 2005-02-17 |
High-speed diaphragm valve for atomic layer deposition App 20050011555 - Maula, Jarmo Ilmari ;   et al. | 2005-01-20 |
Diaphragm valve with reliability enhancements for atomic layer deposition App 20040262562 - Maula, Jarmo Ilmari ;   et al. | 2004-12-30 |
Diaphragm valve for high-temperature precursor supply in atomic layer deposition App 20040261850 - Maula, Jarmo Ilmari ;   et al. | 2004-12-30 |
Deposition of carbon-and transition metal-containing thin films App 20040208994 - Harkonen, Kari ;   et al. | 2004-10-21 |
Precursor material delivery system for atomic layer deposition App 20040124131 - Aitchison, Bradley J. ;   et al. | 2004-07-01 |
Capacitor fabrication methods and capacitor structures including niobium oxide App 20040087081 - Aitchison, Bradley J. ;   et al. | 2004-05-06 |
High conductivity particle filter App 20040045889 - Harkonen, Kari ;   et al. | 2004-03-11 |
Phosphor layer of an electroluminescent component Grant 5,314,759 - Harkonen , et al. May 24, 1 | 1994-05-24 |