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Patent applications and USPTO patent grants for Harink; Thijs.The latest application filed is for "lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination".
Patent | Date |
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Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination Grant 7,522,258 - Luttikhuis , et al. April 21, 2 | 2009-04-21 |
Lithographic projection apparatus and device manufacturing method Grant 7,274,431 - Box , et al. September 25, 2 | 2007-09-25 |
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination App 20070002297 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2007-01-04 |
Lithographic apparatus and a device manufacturing method Grant 7,126,664 - Luttikhuis , et al. October 24, 2 | 2006-10-24 |
Lithographic apparatus and a device manufacturing method App 20060007414 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2006-01-12 |
Lithographic projection apparatus and device manufacturing method App 20050018157 - Box, Wilhelmus Josephus ;   et al. | 2005-01-27 |
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