Harima; Yoshiyuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Harima; Yoshiyuki.The latest application filed is for "electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus".
- Harima; Yoshiyuki - Tokyo JP
- Harima; Yoshiyuki - Shiroyama-machi JP
- Harima; Yoshiyuki - Tsukui-gun JP
- Harima; Yoshiyuki - Zushi JP
| Patent | Date |
|---|---|
| Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus Grant 11,244,810 - Mori , et al. February 8, 2 | 2022-02-08 |
| Electric Field Sensor, Surface Wave Plasma Source, And Surface Wave Plasma Processing Apparatus App 20200365371 - MORI; Kiyoshi ; et al. | 2020-11-19 |
| Wafer plating apparatus Grant 6,736,945 - Ishida , et al. May 18, 2 | 2004-05-18 |
| Liquid treatment system and liquid treatment method Grant 6,634,370 - Nakashima , et al. October 21, 2 | 2003-10-21 |
| Liquid treatment system and liquid treatment method App 20010037764 - Nakashima, Satoshi ; et al. | 2001-11-08 |
| Wafer plating apparatus App 20010017105 - Ishida, Hirofumi ; et al. | 2001-08-30 |
| Wafer plating apparatus App 20010017258 - Ishida, Hirofumi ; et al. | 2001-08-30 |
| System for carrying-in of cassette for substrates to be processed Grant 5,971,696 - Endo , et al. October 26, 1 | 1999-10-26 |
| Vertical heat-treatment apparatus having boat transfer mechanism Grant 5,048,164 - Harima September 17, 1 | 1991-09-17 |
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