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Semiconductor device
Grant 8,686,544 - Harafuji , et al. April 1, 2 | 2014-04-01 |
Semiconductor device
App 20070108532 - Harafuji; Kenji ; et al. | 2007-05-17 |
Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
Grant 7,160,748 - Ishibashi , et al. January 9, 2 | 2007-01-09 |
Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
Grant 6,921,678 - Ishibashi , et al. July 26, 2 | 2005-07-26 |
Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
App 20050142682 - Ishibashi, Akihiko ; et al. | 2005-06-30 |
Method of fabricating nitride semiconductor device
Grant 6,867,112 - Ishibashi , et al. March 15, 2 | 2005-03-15 |
Bipolar transistor and semiconductor device
Grant 6,737,684 - Takagi , et al. May 18, 2 | 2004-05-18 |
Method of fabricating nitride semiconductor device
Grant 6,667,185 - Ishibashi , et al. December 23, 2 | 2003-12-23 |
Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
App 20030203629 - Ishibashi, Akihiko ; et al. | 2003-10-30 |
Method of fabricating nitride semiconductor device
App 20030143765 - Ishibashi, Akihiko ; et al. | 2003-07-31 |
Method and apparatus for depositing semiconductor film and method for fabricating semiconductor device
App 20020195054 - Harafuji, Kenji ; et al. | 2002-12-26 |
Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
App 20020081763 - Ishibashi, Akihiko ; et al. | 2002-06-27 |
Semiconductor film deposition apparatus
App 20010032588 - Harafuji, Kenji ; et al. | 2001-10-25 |
Plasma treatment method and plasma treatment system
Grant 5,928,528 - Kubota , et al. July 27, 1 | 1999-07-27 |
Plasma generating and processing method and apparatus thereof
Grant 5,869,402 - Harafuji , et al. February 9, 1 | 1999-02-09 |
Dry etching Method
Grant 5,635,021 - Harafuji June 3, 1 | 1997-06-03 |
Plasma generating method and apparatus
Grant 5,424,905 - Nomura , et al. June 13, 1 | 1995-06-13 |
Method and apparatus for generating highly dense uniform plasma in a high frequency electric field
Grant 5,345,145 - Harafuji , et al. September 6, 1 | 1994-09-06 |
Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field
Grant 5,332,880 - Kubota , et al. July 26, 1 | 1994-07-26 |
Dry etching method and dry etching apparatus
Grant 5,324,388 - Yamano , et al. June 28, 1 | 1994-06-28 |
Drying etching method
Grant 5,259,922 - Yamano , et al. November 9, 1 | 1993-11-09 |
Method and apparatus for writing a pattern on a semiconductor sample based on a resist pattern corrected for proximity effects resulting from direct exposure of the sample by a charged-particle beam or light
Grant 5,182,718 - Harafuji , et al. January 26, 1 | 1993-01-26 |
Scanning electron microscope and a method of displaying cross sectional profiles using the same
Grant 5,057,689 - Nomura , et al. October 15, 1 | 1991-10-15 |
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