Patent | Date |
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Chemically amplified positive resist composition Grant 8,378,016 - Ando , et al. February 19, 2 | 2013-02-19 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 8,124,803 - Yoshida , et al. February 28, 2 | 2012-02-28 |
Resin Suitable For An Acid Generator And A Chemically Amplified Positive Resist Composition Containing The Same App 20110165519 - ANDO; Nobuo ;   et al. | 2011-07-07 |
Resin suitable for an acid generator Grant 7,932,334 - Ando , et al. April 26, 2 | 2011-04-26 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same Grant 7,862,980 - Harada , et al. January 4, 2 | 2011-01-04 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,786,322 - Yamaguchi , et al. August 31, 2 | 2010-08-31 |
Chemically amplified positive resist composition Grant 7,759,045 - Akita , et al. July 20, 2 | 2010-07-20 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same Grant 7,667,050 - Shigematsu , et al. February 23, 2 | 2010-02-23 |
Sulfonium compound Grant 7,612,217 - Sakamoto , et al. November 3, 2 | 2009-11-03 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,579,497 - Harada , et al. August 25, 2 | 2009-08-25 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same Grant 7,579,132 - Harada , et al. August 25, 2 | 2009-08-25 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,531,686 - Harada , et al. May 12, 2 | 2009-05-12 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,527,910 - Yamaguchi , et al. May 5, 2 | 2009-05-05 |
Chemically amplified positive resist composition App 20090004601 - Akita; Makoto ;   et al. | 2009-01-01 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same Grant 7,439,006 - Yoshida , et al. October 21, 2 | 2008-10-21 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20080086014 - Shigematsu; Junji ;   et al. | 2008-04-10 |
Sulfonium compound App 20080081925 - Sakamoto; Hiromu ;   et al. | 2008-04-03 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20080081293 - Harada; Yukako ;   et al. | 2008-04-03 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20080076063 - Yoshida; Isao ;   et al. | 2008-03-27 |
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20080044738 - Harada; Yukako ;   et al. | 2008-02-21 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,304,175 - Harada , et al. December 4, 2 | 2007-12-04 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,301,047 - Yoshida , et al. November 27, 2 | 2007-11-27 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same Grant 7,262,321 - Harada , et al. August 28, 2 | 2007-08-28 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070184382 - Yamaguchi; Satoshi ;   et al. | 2007-08-09 |
Resin suitable for an acid generator and a chemically amplified positive resist composition containing the same App 20070149702 - Ando; Nobuo ;   et al. | 2007-06-28 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070122750 - Yamaguchi; Satoshi ;   et al. | 2007-05-31 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070100158 - Harada; Yukako ;   et al. | 2007-05-03 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070100159 - Yoshida; Isao ;   et al. | 2007-05-03 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070100096 - Harada; Yukako ;   et al. | 2007-05-03 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070078269 - Harada; Yukako ;   et al. | 2007-04-05 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20070027336 - Yoshida; Isao ;   et al. | 2007-02-01 |
Salt suitable for an acid generator and a chemically amplified resist composition containing the same App 20060194982 - Harada; Yukako ;   et al. | 2006-08-31 |