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Method of creating writing data Grant 10,503,860 - Hara , et al. Dec | 2019-12-10 |
Generating method of drawing data and charged particle beam drawing method Grant 10,445,450 - Hara , et al. Oc | 2019-10-15 |
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Drawing Data Generating Method App 20170193650 - Hara; Shigehiro ;   et al. | 2017-07-06 |
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Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus Grant 9,558,315 - Yasui , et al. January 31, 2 | 2017-01-31 |
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Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data Grant 9,164,044 - Hara , et al. October 20, 2 | 2015-10-20 |
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Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus Grant 8,280,632 - Sakamoto , et al. October 2, 2 | 2012-10-02 |
Figure data verification apparatus and method therefor Grant 8,255,441 - Kasahara , et al. August 28, 2 | 2012-08-28 |
Charged particle beam drawing apparatus and proximity effect correction method thereof Grant 8,207,514 - Hara , et al. June 26, 2 | 2012-06-26 |
Charged particle beam drawing method and apparatus Grant 8,188,449 - Shibata , et al. May 29, 2 | 2012-05-29 |
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Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data Grant 7,786,453 - Sakamoto , et al. August 31, 2 | 2010-08-31 |
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Apparatus And Method For Inspecting Overlapping Figure, And Charged Particle Beam Writing Apparatus App 20090216450 - Sakamoto; Shinji ;   et al. | 2009-08-27 |
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Method Of Forming Pattern Writing Data By Using Charged Particle Beam App 20070226675 - ANPO; Akihito ;   et al. | 2007-09-27 |
Creation Method And Conversion Method Of Charged Particle Beam Writing Data, And Writing Method Of Charged Particle Beam App 20070053242 - Kasahara; Jun ;   et al. | 2007-03-08 |
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Method for designing phase-shifting masks with automatization capability Grant 5,538,815 - Oi , et al. July 23, 1 | 1996-07-23 |