HARA; Masamichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for HARA; Masamichi.The latest application filed is for "film forming apparatus and film forming method".

Company Profile

3.42.51

HARA; Masamichi - Yamanashi JP
Hara; Masamichi - Nirasaki JP
Hara; Masamichi - Nirasaki City JP
Hara; Masamichi - Albany NY US
HARA; Masamichi - Clifton Park NY
HARA; Masamichi - Nirasaki-shi JP
Hara; Masamichi - Yamanashi-ken JP
Hara; Masamichi - Minami-Ashigara JP
Hara; Masamichi - Minami-Ashigara-shi JP
Hara; Masamichi - Minamiashigara JP
Hara, Masamichi - Minamiashigara-shi JP
Hara; Masamichi - Sodegaura JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Film Forming Apparatus And Film Forming Method App 20210388493 - SORITA; Yuta ; et al.	2021-12-16
Substrate Stage App 20200335365 - Hara; Masamichi ; et al.	2020-10-22
Substrate Processing Apparatus And Charge Neutralization Method For Mounting Table App 20200312636 - KAWAWA; Takahiro ; et al.	2020-10-01
Substrate processing apparatus Grant 10,468,237 - Gomi , et al. No	2019-11-05
Substrate Processing Apparatus App 20180315585 - Gomi; Atsushi ; et al.	2018-11-01
Substrate processing apparatus Grant 10,049,860 - Gomi , et al. August 14, 2	2018-08-14
Film forming method using reversible decomposition reaction Grant 9,976,217 - Gomi , et al. May 22, 2	2018-05-22
Trap assembly in film forming apparatus Grant 9,896,761 - Hara , et al. February 20, 2	2018-02-20
Cooling processing apparatus and method for operating the same Grant 9,673,078 - Miyashita , et al. June 6, 2	2017-06-06
Deposition device Grant 9,404,180 - Hara , et al. August 2, 2	2016-08-02
Load lock device Grant 9,303,788 - Hara , et al. April 5, 2	2016-04-05
Method for forming barrier film on wiring line Grant 9,293,417 - Miyoshi , et al. March 22, 2	2016-03-22
Substrate Processing System, Gate Valve and Substrate Transfer Method App 20150371812 - MAEDA; Kouji ; et al.	2015-12-24
Cooling Processing Apparatus And Method For Operating The Same App 20150357222 - MIYASHITA; Tetsuya ; et al.	2015-12-10
Substrate mounting mechanism, and substrate processing apparatus Grant 9,202,728 - Hara , et al. December 1, 2	2015-12-01
Gate valve unit, substrate processing device and substrate processing method thereof Grant 9,121,515 - Yamamoto , et al. September 1, 2	2015-09-01
Substrate Processing Apparatus App 20150235815 - Gomi; Atsushi ; et al.	2015-08-20
Method for film formation, apparatus for film formation, and computer-readable recording medium Grant 9,062,374 - Hara , et al. June 23, 2	2015-06-23
Trap Assembly In Film Forming Apparatus App 20150136027 - HARA; Masamichi ; et al.	2015-05-21
Mounting table structure, film forming apparatus and raw material recovery method Grant 8,992,686 - Gomi , et al. March 31, 2	2015-03-31
Placing Table Structure App 20150044368 - Gomi; Atsushi ; et al.	2015-02-12
Method of forming copper wiring and method and system for forming copper film Grant 8,859,422 - Ishizaka , et al. October 14, 2	2014-10-14
Method Of Forming Copper Wiring And Method And System For Forming Copper Film App 20140287163 - ISHIZAKA; Tadahiro ; et al.	2014-09-25
Load Lock Device App 20140124069 - HARA; Masamichi ; et al.	2014-05-08
Plasma Processing Apparatus And Cleaning Method For Removing Metal Oxide Film App 20140060572 - YASUMURO; Chiaki ; et al.	2014-03-06
Gate Valve Unit, Substrate Processing Device And Substrate Processing Method Thereof App 20140003892 - Yamamoto; Kaoru ; et al.	2014-01-02
Film forming apparatus and film forming method Grant 8,518,181 - Hara August 27, 2	2013-08-27
Raw material recovery method and trapping mechanism for recovering raw material Grant 8,408,025 - Gomi , et al. April 2, 2	2013-04-02
Methods of forming copper wiring and copper film, and film forming system Grant 8,399,353 - Ishizaka , et al. March 19, 2	2013-03-19
Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same Grant 8,349,283 - Hara , et al. January 8, 2	2013-01-08
Deposition Device App 20130000558 - Hara; Masamichi ; et al.	2013-01-03
Apparatus For Thermal And Plasma Enhanced Vapor Deposition And Method Of Operating App 20120315404 - LI; Yicheng ; et al.	2012-12-13
Film formation method and film formation apparatus Grant 8,277,889 - Gomi , et al. October 2, 2	2012-10-02
Method for film formation, apparatus for film formation, and computer-readable recording medium Grant 8,273,409 - Hara , et al. September 25, 2	2012-09-25
Method and apparatus for reducing particle contamination in a deposition system Grant 8,268,078 - Suzuki , et al. September 18, 2	2012-09-18
Substrate Mounting Mechanism, And Substrate Processing App 20120199573 - HARA; Masamichi ; et al.	2012-08-09
Methods Of Forming Copper Wiring And Copper Film, And Film Forming System App 20120196437 - ISHIZAKA; Tadahiro ; et al.	2012-08-02
Method Of Forming Copper Wiring And Method And System For Forming Copper Film App 20120196052 - ISHIZAKA; Tadahiro ; et al.	2012-08-02
Film Forming Method App 20120114869 - MIYOSHI; Hidenori ; et al.	2012-05-10
Mounting Table Structure, Film Forming Apparatus And Raw Material Recovery Method App 20120055403 - GOMI; Atsushi ; et al.	2012-03-08
Vacuum Processing Apparatus App 20120014768 - MIYASHITA; Tetsuya ; et al.	2012-01-19
Method for Film Formation, Apparatus for Film Formation, and Computer-Readable Recording Medium App 20110300291 - Hara; Masamichi ; et al.	2011-12-08
Placing Table Structure App 20110263123 - Gomi; Atsushi ; et al.	2011-10-27
Integrated substrate processing in a vacuum processing tool Grant 8,034,406 - Ishizaka , et al. October 11, 2	2011-10-11
Metal Recovery Method, Metal Recovery Apparatus, Gas Exhaust System And Film Forming Device Using Same App 20110206585 - Hara; Masamichi ; et al.	2011-08-25
Raw Material Recovery Method And Trapping Mechanism For Recovering Raw Material App 20110203310 - Gomi; Atsushi ; et al.	2011-08-25
Method of integrating PEALD Ta-containing films into Cu metallization Grant 7,959,985 - Ishizaka , et al. June 14, 2	2011-06-14
Method For Film Formation, Apparatus For Film Formation, And Computer-readable Recording Medium App 20110092070 - Hara; Masamichi ; et al.	2011-04-21
Raw Material Gas Supply System And Film Forming Apparatus App 20100236480 - Hara; Masamichi ; et al.	2010-09-23
Substrate Mounting Mechanism And Substrate Processing Apparatus Having Same App 20100212594 - HARA; Masamichi ; et al.	2010-08-26
Substrate Mounting Mechanism, Substrate Processing Apparatus, Method For Suppressing Film Deposition On Substrate Mounting Mechanism, And Storage Medium App 20100210115 - HARA; Masamichi ; et al.	2010-08-19
Substrate processing method and fabrication process of a semiconductor device Grant 7,772,111 - Ikeda , et al. August 10, 2	2010-08-10
Film precursor tray for use in a film precursor evaporation system and method of using Grant 7,708,835 - Suzuki , et al. May 4, 2	2010-05-04
Film Formation Method And Film Formation Apparatus App 20100075035 - Gomi; Atsushi ; et al.	2010-03-25
Gas Supply Method And Gas Supply Device App 20100062158 - Hara; Masamichi ; et al.	2010-03-11
Method For Forming Metal Film Using Carbonyl Material, Method For Forming Multi-layer Wiring Structure, And Method For Manufacturing Semiconductor Device App 20100015800 - HARA; Masamichi ; et al.	2010-01-21
Multi-tray film precursor evaporation system and thin film deposition system incorporating same Grant 7,638,002 - Suzuki , et al. December 29, 2	2009-12-29
Method of cleaning cover glass having spacer Grant 7,501,304 - Ooseki , et al. March 10, 2	2009-03-10
Method for preparing solid precursor tray for use in solid precursor evaporation system Grant 7,488,512 - Suzuki , et al. February 10, 2	2009-02-10
Replaceable precursor tray for use in a multi-tray solid precursor delivery system Grant 7,484,315 - Suzuki , et al. February 3, 2	2009-02-03
Method for thin film deposition using multi-tray film precursor evaporation system Grant 7,459,396 - Suzuki , et al. December 2, 2	2008-12-02
Integrated substrate processing in a vacuum processing tool App 20080075835 - Ishizaka; Tadahiro ; et al.	2008-03-27
Substrate processing method and fabrication process of a semiconductor device Grant 7,332,426 - Ikeda , et al. February 19, 2	2008-02-19
Method And Apparatus For Reducing Carbon Monoxide Poisoning At The Peripheral Edge Of A Substrate In A Thin Film Deposition System App 20070234955 - Suzuki; Kenji ; et al.	2007-10-11
Method and apparatus for reducing particle contamination in a deposition system App 20070215048 - Suzuki; Kenji ; et al.	2007-09-20
Method and apparatus for reducing particle formation in a vapor distribution system App 20070218200 - Suzuki; Kenji ; et al.	2007-09-20
Method of integrating PEALD Ta- containing films into Cu metallization App 20070218683 - Ishizaka; Tadahiro ; et al.	2007-09-20
Substrate Processing Method And Fabrication Process Of A Semiconductor Device App 20070134907 - Ikeda; Taro ; et al.	2007-06-14
Apparatus for thermal and plasma enhanced vapor deposition and method of operating App 20070116873 - Li; Yicheng ; et al.	2007-05-24
Apparatus for thermal and plasma enhanced vapor deposition and method of operating App 20070116872 - Li; Yicheng ; et al.	2007-05-24
Method of cleaning cover glass having spacer App 20070072392 - Ooseki; Meiki ; et al.	2007-03-29
Method For Thin Film Deposition Using Multi-tray Film Precursor Evaporation System App 20070032079 - Suzuki; Kenji ; et al.	2007-02-08
Method of and apparatus for packaging rolled article Grant 7,096,645 - Tashiro , et al. August 29, 2	2006-08-29
Film precursor evaporation system and method of using App 20060185597 - Suzuki; Kenji ; et al.	2006-08-24
Film precursor tray for use in a film precursor evaporation system and method of using App 20060185598 - Suzuki; Kenji ; et al.	2006-08-24
Multi-tray film precursor evaporation system and thin film deposition system incorporating same App 20060112882 - Suzuki; Kenji ; et al.	2006-06-01
Replaceable precursor tray for use in a multi-tray solid precursor delivery system App 20060112883 - Suzuki; Kenji ; et al.	2006-06-01
Method for preparing solid precursor tray for use in solid precursor evaporation system App 20060115593 - Suzuki; Kenji ; et al.	2006-06-01
Film forming apparatus and film forming method App 20060032444 - Hara; Masamichi	2006-02-16
Substrate processing method and fabrication process of a semiconductor device App 20050272247 - Ikeda, Taro ; et al.	2005-12-08
Method of and apparatus for packaging rolled article App 20040163985 - Tashiro, Katsumi ; et al.	2004-08-26
Bisphosphonic acid derivative and compound thereof labeled with radioactive nuclide Grant 6,607,710 - Ito , et al. August 19, 2	2003-08-19

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