Hara; Hiromichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hara; Hiromichi.The latest application filed is for "vibration damping apparatus, lithography apparatus, and method of manufacturing article".

Company Profile

2.17.15

Hara; Hiromichi - Utsunomiya JP
Hara; Hiromichi - Utsunomiya-shi JP
Hara; Hiromichi - Mie JP
Hara, Hiromichi - Yokkaichi JP
Hara; Hiromichi - Tochigi JP
Hara; Hiromichi - Tokyo JP
Hara; Hiromichi - Kawasaki JA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vibration damping apparatus, lithography apparatus, and method of manufacturing article Grant 10,481,509 - Morimoto , et al. Nov	2019-11-19
Vibration Damping Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20190278185 - Morimoto; Yoshihiro ; et al.	2019-09-12
Exposure apparatus, structure, method for setting up apparatus, and device manufacturing method having filling member formed by hardening liquid to support setting leg Grant 8,780,329 - Hara , et al. July 15, 2	2014-07-15
Exposure apparatus and device manufacturing method Grant 7,944,546 - Yoshida , et al. May 17, 2	2011-05-17
Exposure apparatus and device manufacturing method Grant 7,821,617 - Hara October 26, 2	2010-10-26
Exposure Apparatus And Device Manufacturing Method App 20100079736 - Wada; Hiroyuki ; et al.	2010-04-01
Exposure Apparatus And Device Manufacturing Method App 20090195767 - Yoshida; Masatomi ; et al.	2009-08-06
Exposure Apparatus, Structure, Method For Setting Up Apparatus, And Device Manufacturing Method App 20090168036 - Hara; Hiromichi ; et al.	2009-07-02
Exposure Apparatus And Device Manufacturing Method App 20070160356 - Hara; Hiromichi	2007-07-12
Exposure apparatus and device manufacturing method Grant 7,227,617 - Hara June 5, 2	2007-06-05
Radiation-sensitive resin composition Grant 7,060,414 - Suzuki , et al. June 13, 2	2006-06-13
Exposure apparatus and device manufacturing method App 20060023180 - Hara; Hiromichi	2006-02-02
Radiation-sensitive resin composition App 20050158657 - Suzuki, Aki ; et al.	2005-07-21
Exposure apparatus Grant 6,914,663 - Hara July 5, 2	2005-07-05
Radiation-sensitive resin composition Grant 6,899,989 - Suzuki , et al. May 31, 2	2005-05-31
Exposure apparatus Grant 6,897,939 - Hara May 24, 2	2005-05-24
Exposure apparatus and method of manufacturing a semiconductor device using the same Grant 6,885,431 - Hara April 26, 2	2005-04-26
Anti-vibration system for exposure apparatus Grant 6,862,077 - Hara March 1, 2	2005-03-01
Exposure apparatus App 20040137384 - Hara, Hiromichi	2004-07-15
Exposure apparatus and method of manufacturing a semiconductor device using the same App 20040057031 - Hara, Hiromichi	2004-03-25
Exposure apparatus App 20040057032 - Hara, Hiromichi	2004-03-25
Radiation-sensitive resin composition Grant 6,623,907 - Numata , et al. September 23, 2	2003-09-23
Anti-vibration system for exposure apparatus App 20030030779 - Hara, Hiromichi	2003-02-13
Anti-vibration system for exposure apparatus Grant 6,512,571 - Hara January 28, 2	2003-01-28
Driving apparatus and exposure apparatus Grant 6,493,062 - Tokuda , et al. December 10, 2	2002-12-10
Radiation-sensitive resin composition App 20020090569 - Suzuki, Aki ; et al.	2002-07-11
Driving Apparatus And Exposure Apparatus App 20020054280 - TOKUDA, YUKIO ; et al.	2002-05-09
Anti-vibration System For Exposure Apparatus App 20020012108 - HARA, HIROMICHI	2002-01-31
Radiation-sensitive resin composition App 20010023050 - Numata, Jun ; et al.	2001-09-20
Vibration damping apparatus Grant 5,881,987 - Hara March 16, 1	1999-03-16
Process for producing polymer having functional groups at its chain terminals Grant 4,083,834 - Komatsu , et al. April 11, 1	1978-04-11

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