HAO; Fangli
Patent Applications and Registrations
Patent applications and USPTO patent grants for HAO; Fangli.The latest application filed is for "substrate support with improved process uniformity".
- HAO; Fangli - Cupertino CA
- HAO; Fangli - Fremont CA
- Hao; Fangli - Cupertine CA
| Patent | Date |
|---|---|
| Substrate Support With Improved Process Uniformity App 20210166914 - HAO; Fangli ; et al. | 2021-06-03 |
| Substrate support with improved process uniformity Grant 10,910,195 - Hao , et al. February 2, 2 | 2021-02-02 |
| Helium plug design to reduce arcing Grant 10,741,425 - Hao , et al. A | 2020-08-11 |
| Boltless substrate support assembly Grant 10,460,978 - Hao , et al. Oc | 2019-10-29 |
| Pin lifter assembly with small gap Grant 10,262,887 - Hao , et al. | 2019-04-16 |
| Electrostatic Chuck With Flexible Wafer Temperature Control App 20180286642 - MATYUSHKIN; Alexander ; et al. | 2018-10-04 |
| Boltless Substrate Support Assembly App 20180261492 - Hao; Fangli ; et al. | 2018-09-13 |
| Helium Plug Design To Reduce Arcing App 20180240688 - Hao; Fangli ; et al. | 2018-08-23 |
| Substrate Support With Improved Process Uniformity App 20180190526 - Hao; Fangli ; et al. | 2018-07-05 |
| Pin Lifter Assembly With Small Gap App 20180114716 - Hao; Fangli ; et al. | 2018-04-26 |
| Coating method for gas delivery system Grant 9,689,533 - Kenworthy , et al. June 27, 2 | 2017-06-27 |
| Coating Method For Gas Delivery System App 20140366968 - Kenworthy; Ian ; et al. | 2014-12-18 |
| Automated bubble detection apparatus and method Grant 8,854,451 - Cormier , et al. October 7, 2 | 2014-10-07 |
| Coating method for gas delivery system Grant 8,852,685 - Kenworthy , et al. October 7, 2 | 2014-10-07 |
| Automated Bubble Detection Apparatus And Method App 20130100278 - Cormier; Josh ; et al. | 2013-04-25 |
| Coating Method For Gas Delivery System App 20110259519 - Kenworthy; Ian ; et al. | 2011-10-27 |
| Lower electrode design for higher uniformity Grant 7,524,397 - Hao , et al. April 28, 2 | 2009-04-28 |
| Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system Grant 7,234,222 - Hao , et al. June 26, 2 | 2007-06-26 |
| Corrosion resistant apparatus for control of a multi-zone nozzle in a plasma processing system App 20060065523 - Hao; Fangli ; et al. | 2006-03-30 |
| Deformation reduction at the main chamber App 20060032736 - Lenz; Eric ; et al. | 2006-02-16 |
| Deformation reduction at the main chamber Grant 6,949,204 - Lenz , et al. September 27, 2 | 2005-09-27 |
| Two position robot design for FOUP purge Grant 6,922,867 - Hao August 2, 2 | 2005-08-02 |
| Symmetrical semiconductor reactor Grant 6,889,627 - Hao May 10, 2 | 2005-05-10 |
| Linear drive system for use in a plasma processing system Grant 6,863,784 - Hao , et al. March 8, 2 | 2005-03-08 |
| Linear drive system for use in a plasma processing system App 20040108301 - Hao, Fangli ; et al. | 2004-06-10 |
| Deformation reduction at the main chamber Grant 6,712,929 - Lenz , et al. March 30, 2 | 2004-03-30 |
| Linear drive system for use in a plasma processing system Grant 6,669,811 - Hao , et al. December 30, 2 | 2003-12-30 |
| Wafer area pressure control Grant 6,433,484 - Hao , et al. August 13, 2 | 2002-08-13 |
| Gas distribution apparatus for semiconductor processing Grant 6,432,831 - Dhindsa , et al. August 13, 2 | 2002-08-13 |
| Linear drive system for use in a plasma processing system App 20020100555 - Hao, Fangli ; et al. | 2002-08-01 |
| Gas distribution apparatus for semiconductor processing Grant 6,415,736 - Hao , et al. July 9, 2 | 2002-07-09 |
| Lower electrode design for higher uniformity Grant 6,363,882 - Hao , et al. April 2, 2 | 2002-04-02 |
| Linear drive system for use in a plasma processing system Grant 6,350,317 - Hao , et al. February 26, 2 | 2002-02-26 |
| Gas distribution apparatus for semiconductor processing App 20010027026 - Dhindsa, Rajinder ; et al. | 2001-10-04 |
| Gas distribution apparatus for semiconductor processing Grant 6,245,192 - Dhindsa , et al. June 12, 2 | 2001-06-12 |
| Reaction chamber component having improved temperature uniformity Grant 6,123,775 - Hao , et al. September 26, 2 | 2000-09-26 |
| Endpoint detection methods in plasma etch processes and apparatus therefor Grant 5,966,586 - Hao October 12, 1 | 1999-10-12 |
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