Patent | Date |
---|
Substrate drying method and substrate drying apparatus Grant 11,158,523 - Hanawa , et al. October 26, 2 | 2021-10-26 |
Substrate treating method and substrate treating apparatus Grant 11,133,175 - Hanawa , et al. September 28, 2 | 2021-09-28 |
Substrate Processing Liquid, Substrate Processing Method And Substrate Processing Apparatus App 20210288172 - UEDA; Dai ;   et al. | 2021-09-16 |
Substrate treating method, substrate treating liquid and substrate treating apparatus Grant 11,094,565 - Sasaki , et al. August 17, 2 | 2021-08-17 |
Substrate Processing Method And Substrate Processing Device App 20210016331 - UEDA; Dai ;   et al. | 2021-01-21 |
Substrate Drying Method And Substrate Drying Apparatus App 20200234980 - HANAWA; Yosuke ;   et al. | 2020-07-23 |
Substrate treating apparatus and substrate treating method Grant 10,720,342 - Sasaki , et al. | 2020-07-21 |
Substrate treating method and substrate treating apparatus Grant 10,699,920 - Hanawa , et al. | 2020-06-30 |
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method Grant 10,612,844 - Hanawa , et al. | 2020-04-07 |
Substrate Treating Method And Substrate Treating Apparatus App 20190333755 - HANAWA; Yosuke ;   et al. | 2019-10-31 |
Substrate Treating Method And Substrate Treating Apparatus App 20190295865 - HANAWA; Yosuke ;   et al. | 2019-09-26 |
Substrate cleaning method and substrate cleaning apparatus Grant 10,286,425 - Sasaki , et al. | 2019-05-14 |
Substrate Treating Method, Substrate Treating Liquid And Substrate Treating Apparatus App 20190096704 - SASAKI; Yuta ;   et al. | 2019-03-28 |
Substrate Treating Method And Substrate Treating Apparatus App 20190030576 - HANAWA; Yosuke ;   et al. | 2019-01-31 |
Substrate treating apparatus and substrate treating method Grant 10,153,181 - Sasaki , et al. Dec | 2018-12-11 |
Vapor Supplying Apparatus, Vapor Drying Apparatus, Vapor Supplying Method, And Vapor Drying Method App 20180238621 - HANAWA; Yosuke ;   et al. | 2018-08-23 |
Substrate Treating Apparatus And Substrate Treating Method App 20180182646 - SASAKI; Yuta ;   et al. | 2018-06-28 |
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method Grant 9,976,804 - Hanawa , et al. May 22, 2 | 2018-05-22 |
Substrate cleaning method and substrate cleaning apparatus Grant 9,859,110 - Hanawa , et al. January 2, 2 | 2018-01-02 |
Substrate Treating Apparatus And Substrate Treating Method App 20170345683 - SASAKI; Yuta ;   et al. | 2017-11-30 |
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20170309472 - HANAWA; Yosuke ;   et al. | 2017-10-26 |
Substrate cleaning method and substrate cleaning apparatus Grant 9,728,396 - Hanawa , et al. August 8, 2 | 2017-08-08 |
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20170043379 - SASAKI; Yuta ;   et al. | 2017-02-16 |
Vapor Supplying Apparatus, Vapor Drying Apparatus, Vapor Supplying Method, And Vapor Drying Method App 20160243461 - HANAWA; Yosuke ;   et al. | 2016-08-25 |
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20160074913 - HANAWA; Yosuke ;   et al. | 2016-03-17 |