Patent | Date |
---|
Ultrasonic transducer, method for making same, ultrasonic transducer array, and ultrasonic test apparatus Grant 10,603,689 - Machida , et al. | 2020-03-31 |
Ultrasonic Transducer, Method For Making Same, Ultrasonic Transducer Array, And Ultrasonic Test Apparatus App 20170291192 - MACHIDA; Shuntaro ;   et al. | 2017-10-12 |
Semiconductor device carrying micro electro mechanical system Grant 8,581,354 - Fujimori , et al. November 12, 2 | 2013-11-12 |
Integrated micro electro-mechanical system and manufacturing method thereof Grant 8,129,802 - Fukuda , et al. March 6, 2 | 2012-03-06 |
Method of manufacturing micro electro mechanical systems device Grant 7,972,886 - Jeong , et al. July 5, 2 | 2011-07-05 |
Controlling stress in MEMS structures Grant 7,670,861 - Hanaoka , et al. March 2, 2 | 2010-03-02 |
Inertial sensor and manufacturing method of the same Grant 7,658,109 - Fukuda , et al. February 9, 2 | 2010-02-09 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20090064785 - Fukuda; Hiroshi ;   et al. | 2009-03-12 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20090049911 - Fukuda; Hiroshi ;   et al. | 2009-02-26 |
Method Of Manufacturing Micro Electro Mechanical Systems Device App 20090017579 - JEONG; Heewon ;   et al. | 2009-01-15 |
Inertial Sensor And Manufacturing Method Of The Same App 20080196502 - FUKUDA; Hiroshi ;   et al. | 2008-08-21 |
Integrated micro electro-mechanical system and manufacturing method thereof Grant 7,402,449 - Fukuda , et al. July 22, 2 | 2008-07-22 |
Semiconductor Device Carrying Micro Electro Mechanical System App 20080128841 - Fujimori; Tsukasa ;   et al. | 2008-06-05 |
Sensor and sensor module Grant 7,325,457 - Fujimori , et al. February 5, 2 | 2008-02-05 |
Manufacturing method of MEMS structures and manufacturing method of MEMS structures with semiconductor device App 20070249082 - Hanaoka; Yuko ;   et al. | 2007-10-25 |
Process For Producing Semiconductor Integrated Circuit Device And Semiconductor Integrated Circuit Device App 20070184618 - Tanabe; Yoshikazu ;   et al. | 2007-08-09 |
Sensor and sensor module App 20070068266 - Fujimori; Tsukasa ;   et al. | 2007-03-29 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20060205106 - Fukuda; Hiroshi ;   et al. | 2006-09-14 |
Semiconductor device Grant 6,864,584 - Hanaoka , et al. March 8, 2 | 2005-03-08 |
Process for producing semiconductor integrated circuit device and semiconductor integrated circuit device App 20040259339 - Tanabe, Yoshikazu ;   et al. | 2004-12-23 |
Process for producing semiconductor integrated circuit device and semiconductor integrated circuit device Grant 6,784,038 - Tanabe , et al. August 31, 2 | 2004-08-31 |
Semiconductor device App 20030080433 - Hanaoka, Yuko ;   et al. | 2003-05-01 |
Process for producing semiconductor integrated circuit device and semiconductor integrated circuit device App 20020004263 - Tanabe, Yoshikazu ;   et al. | 2002-01-10 |
Method of forming semiconductor integrated circuit device with dual gate CMOS structure Grant 6,323,115 - Tanabe , et al. November 27, 2 | 2001-11-27 |