Hanamachi; Toshihiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hanamachi; Toshihiko.The latest application filed is for "plate with flow channel".
- Hanamachi; Toshihiko - Kanagawa JP
- HANAMACHI; Toshihiko - Yokohama-shi JP
- Hanamachi; Toshihiko - Yokohama JP
- Hanamachi; Toshihiko - Isehara JP
- HANAMACHI; Toshihiko - Isehara-city JP
- Hanamachi; Toshihiko - Kawasaki JP
- Hanamachi; Toshihiko - Kanazawa-ku Yokohama-shi JP
- Hanamachi, Toshihiko - Kawasaki-shi JP
| Patent | Date |
|---|---|
| Plate With Flow Channel App 20220026151 - Araki; Yoshihito ; et al. | 2022-01-27 |
| Joining Method And Joined Body App 20220009022 - Hanamachi; Toshihiko ; et al. | 2022-01-13 |
| Stage And Method Of Manufacturing Stage App 20210398839 - HANAMACHI; Toshihiko ; et al. | 2021-12-23 |
| Substrate supporting unit and film forming device having the substrate supporting unit Grant 11,201,040 - Takahara , et al. December 14, 2 | 2021-12-14 |
| Joined Body App 20210324889 - Takimoto; Masaru ; et al. | 2021-10-21 |
| Heater And Stage Having The Heater App 20210235550 - HANAMACHI; Toshihiko ; et al. | 2021-07-29 |
| Stage, Film-forming Apparatus, And Film-processing Apparatus App 20210217638 - HANAMACHI; Toshihiko ; et al. | 2021-07-15 |
| Sheath Heater App 20200045779 - HANAMACHI; Toshihiko ; et al. | 2020-02-06 |
| Heater Unit App 20200043638 - HANAMACHI; Toshihiko ; et al. | 2020-02-06 |
| Substrate Supporting Unit And Film Forming Device Having The Substrate Supporting Unit App 20190385827 - TAKAHARA; Go ; et al. | 2019-12-19 |
| Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater Grant 10,462,850 - Hirano , et al. Oc | 2019-10-29 |
| Heater unit Grant 10,290,529 - Hanamachi , et al. | 2019-05-14 |
| Method of manufacturing plate with passage, plate with passage, temperature adjustment plate, cold plate, and shower plate Grant 10,279,441 - Hanamachi | 2019-05-07 |
| Substrate support device Grant 10,276,410 - Tachikawa , et al. | 2019-04-30 |
| Heater Unit App 20180226285 - HANAMACHI; Toshihiko ; et al. | 2018-08-09 |
| Substrate support device Grant 9,551,071 - Hanamachi , et al. January 24, 2 | 2017-01-24 |
| Substrate Support Device App 20150376783 - HANAMACHI; Toshihiko ; et al. | 2015-12-31 |
| Lamination and method for manufacturing lamination Grant 9,162,251 - Hirano , et al. October 20, 2 | 2015-10-20 |
| Laminated Body And Method Of Manufacturing Laminated Body App 20140134448 - Yamauchi; Yuichiro ; et al. | 2014-05-15 |
| Lamination, Conductive Material, And Method For Manufacturing Lamination App 20140069700 - Hirano; Satoshi ; et al. | 2014-03-13 |
| Lamination And Method For Manufacturing Lamination App 20140023875 - Hirano; Satoshi ; et al. | 2014-01-23 |
| Method Of Manufacturing Ceramic Sintered Body, Ceramic Sintered Body, And Ceramic Heater App 20130200067 - Hirano; Satoshi ; et al. | 2013-08-08 |
| Substrate Support Device App 20130134148 - TACHIKAWA; Toshihiro ; et al. | 2013-05-30 |
| Method Of Manufacturing Plate With Passage, Plate With Passage, Temperature Adjustment Plate, Cold Plate, And Shower Plate App 20130112383 - Hanamachi; Toshihiko | 2013-05-09 |
| Squirrel-cage Rotor And Manufacturing Method Of Squirrel-cage Rotor App 20130106233 - Hanamachi; Toshihiko | 2013-05-02 |
| Ceramics heater Grant 7,372,001 - Tachikawa , et al. May 13, 2 | 2008-05-13 |
| Apparatus for vapor deposition Grant 7,241,346 - Hanamachi , et al. July 10, 2 | 2007-07-10 |
| Apparatus for vapor deposition App 20040194710 - Hanamachi, Toshihiko ; et al. | 2004-10-07 |
| Ceramics heater App 20040112888 - Tachikawa, Toshihiro ; et al. | 2004-06-17 |
| Electrostatic chuck Grant 6,687,113 - Saito , et al. February 3, 2 | 2004-02-03 |
| Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly Grant 6,535,371 - Kayamoto , et al. March 18, 2 | 2003-03-18 |
| Heating apparatus Grant 6,376,808 - Tachikawa , et al. April 23, 2 | 2002-04-23 |
| Electrostatic chuck App 20010055190 - Saito, Shinji ; et al. | 2001-12-27 |
| Heating apparatus App 20010042744 - Tachikawa, Toshihiro ; et al. | 2001-11-22 |
| Ceramic heater device and film forming device using the same App 20010029895 - Hanamachi, Toshihiko ; et al. | 2001-10-18 |
| Substrate holding apparatus for processing semiconductor Grant 6,159,301 - Sato , et al. December 12, 2 | 2000-12-12 |
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