HAN; Young-Ki

Patent Applications and Registrations

Patent applications and USPTO patent grants for HAN; Young-Ki.The latest application filed is for "liner assembly and substrate processing apparatus having the same".

Company Profile

0.8.13

HAN; Young-Ki - Seoul KR
Han, Young-Ki - Gangbuk-gu KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Liner Assembly And Substrate Processing Apparatus Having The Same App 20160168706 - SEO; Young-Soo ; et al.	2016-06-16
Liner Assembly And Substrate Processing Apparatus Having The Same App 20160160351 - SEO; Young-Soo ; et al.	2016-06-09
Gas Distribution Apparatus And Substrate Processing Apparatus Including Same App 20150348755 - HAN; Young-Ki ; et al.	2015-12-03
Apparatus for plasma processing and method for plasma processing Grant 8,888,950 - Lee , et al. November 18, 2	2014-11-18
Substrate Holder, Substrate Supporting Apparatus, Substrate Processing Apparatus, And Substrate Processing Method Using The Same App 20140332498 - HAN; Young Ki ; et al.	2014-11-13
Apparatus and method for processing substrate Grant 8,864,936 - Han , et al. October 21, 2	2014-10-21
Liner Assembly And Substrate Processing Apparatus Having The Same App 20140283746 - SEO; Young-Soo ; et al.	2014-09-25
Substrate Supporter And Substrate Processing Apparatus Including The Same App 20140251540 - SEO; Young-Soo ; et al.	2014-09-11
Plasma processing apparatus and method for plasma processing Grant 8,373,086 - Kim , et al. February 12, 2	2013-02-12
Method of forming oxide film and oxide deposition apparatus Grant 8,105,647 - Lee , et al. January 31, 2	2012-01-31
Substrate Holder, Substrate Supporting Apparatus, Substrate Processing Apparatus, And Substrate Processing Method Using The Same App 20110049100 - Han; Young Ki ; et al.	2011-03-03
Plasma Processing Apparatus And Method For Plasma Processing App 20110024399 - Kim; Hyoung Won ; et al.	2011-02-03
Apparatus And Method For Processing Substrate App 20100288728 - Han; Young Ki ; et al.	2010-11-18
Apparatus For Plasma Processing And Method For Plasma Processing App 20100059478 - Lee; Kyung Ho ; et al.	2010-03-11
Method Of Forming Oxide Film And Oxide Deposition Apparatus App 20070234957 - LEE; Jin Ho ; et al.	2007-10-11
Method of forming ruthenium thin film using plasma enhanced process Grant 6,734,100 - Park , et al. May 11, 2	2004-05-11
Method for forming ruthenium film of a semiconductor device App 20030215994 - Choi, Jung-Hwan ; et al.	2003-11-20
Method of forming ruthenium thin film using plasma enhanced process App 20030119315 - Park, Kyung Woong ; et al.	2003-06-26

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