Han; Xinhai
Patent Applications and Registrations
Patent applications and USPTO patent grants for Han; Xinhai.The latest application filed is for "hot showerhead".
Company Profile
28.28.47
- Han; Xinhai - Santa Clara CA
- Han; Xinhai - Fremont CA
- Han; Xinhai - Sunnyvale CA US
Patent Activity
| Patent | Date |
|---|---|
| Hot Showerhead App 20220307131 - Subramani; Anantha K. ; et al. | 2022-09-29 |
| Doped Silicon Nitride For 3d Nand App 20220216048 - Li; Tianyang ; et al. | 2022-07-07 |
| Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices Grant 11,365,476 - Jha , et al. June 21, 2 | 2022-06-21 |
| Film stack overlay improvement Grant 11,339,475 - Han , et al. May 24, 2 | 2022-05-24 |
| Analyzing In-plane Distortion App 20220138396 - Wang; Wenjiao ; et al. | 2022-05-05 |
| Power Supply Signal Conditioning For An Electrostatic Chuck App 20220102179 - Ye; Zheng John ; et al. | 2022-03-31 |
| On stack overlay improvement for 3D NAND Grant 11,276,569 - Lin , et al. March 15, 2 | 2022-03-15 |
| Systems And Methods For Depositing High Density And High Tensile Stress Films App 20220068630 - Yang; Chuanxi ; et al. | 2022-03-03 |
| 3-D NAND Control Gate Enhancement App 20220005815 - Kwon; Thomas ; et al. | 2022-01-06 |
| 3-D NAND control gate enhancement Grant 11,164,882 - Kwon , et al. November 2, 2 | 2021-11-02 |
| Method of forming film stacks with reduced defects Grant 11,145,504 - Jiang , et al. October 12, 2 | 2021-10-12 |
| Stack of multiple deposited semiconductor layers Grant 11,056,406 - Miao , et al. July 6, 2 | 2021-07-06 |
| Chamber Configurations For Controlled Deposition App 20210047730 - Addepalli; Sai Susmita ; et al. | 2021-02-18 |
| Modified Stacks For 3d Nand App 20210040607 - Han; Xinhai ; et al. | 2021-02-11 |
| Semiconductor Substrate Supports With Improved High Temperature Chucking App 20210035843 - Li; Jian ; et al. | 2021-02-04 |
| Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
| Faceplate Having A Curved Surface App 20200385862 - SRIVASTAVA; Shailendra ; et al. | 2020-12-10 |
| PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
| High deposition rate and high quality nitride Grant 10,790,140 - Han , et al. September 29, 2 | 2020-09-29 |
| Multi-layer Stacks For 3d Nand Extendability App 20200295041 - HAN; Xinhai ; et al. | 2020-09-17 |
| 3-D NAND Control Gate Enhancement App 20200266202 - Kwon; Thomas ; et al. | 2020-08-20 |
| Method Of Forming Film Stacks With Reduced Defects App 20200227258 - JIANG; Zhijun ; et al. | 2020-07-16 |
| Multi-layer stacks for 3D NAND extendibility Grant 10,700,087 - Han , et al. | 2020-06-30 |
| 3d Nand Structures With Decreased Pitch App 20200203374 - Kwon; Thomas ; et al. | 2020-06-25 |
| Methods For Depositing Phosphorus-doped Silicon Nitride Films App 20200190664 - HU; Kesong ; et al. | 2020-06-18 |
| Film Stack Overlay Improvement For 3d Nand Application App 20200173022 - HAN; Xinhai ; et al. | 2020-06-04 |
| Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application App 20200126784 - HAN; Xinhai ; et al. | 2020-04-23 |
| Stack Of Multiple Deposited Semiconductor Layers App 20200091019 - Miao; Liyan ; et al. | 2020-03-19 |
| On Stack Overlay Improvement For 3d Nand App 20200043723 - LIN; Yongjing ; et al. | 2020-02-06 |
| Low dielectric constant oxide and low resistance OP stack for 3D NAND application Grant 10,553,427 - Han , et al. Fe | 2020-02-04 |
| Technique To Enable High Temperature Clean For Rapid Processing Of Wafers App 20190382889 - PARIMI; Venkata Sharat Chandra ; et al. | 2019-12-19 |
| Methods of forming a stack of multiple deposited semiconductor layers Grant 10,490,467 - Miao , et al. Nov | 2019-11-26 |
| VNAND tensile thick TEOS oxide Grant 10,483,282 - Tsiang , et al. Nov | 2019-11-19 |
| Dielectric-metal stack for 3D flash memory application Grant 10,475,644 - Han , et al. Nov | 2019-11-12 |
| Vnand Tensile Thick Teos Oxide App 20190229128 - TSIANG; Michael Wenyoung ; et al. | 2019-07-25 |
| Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices App 20190185996 - JHA; Praket P. ; et al. | 2019-06-20 |
| Dual-channel showerhead for formation of film stacks Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
| Multi-layer Stacks For 3d Nand Extendability App 20190115365 - HAN; Xinhai ; et al. | 2019-04-18 |
| Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices Grant 10,246,772 - Jha , et al. | 2019-04-02 |
| VNAND tensile thick TEOS oxide Grant 10,199,388 - Tsiang , et al. Fe | 2019-02-05 |
| Methods Of Forming A Stack Of Multiple Deposited Semiconductor Layers App 20190013250 - Miao; Liyan ; et al. | 2019-01-10 |
| Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application App 20180315592 - HAN; Xinhai ; et al. | 2018-11-01 |
| Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
| Dielectric-metal Stack For 3d Flash Memory Application App 20180247808 - HAN; Xinhai ; et al. | 2018-08-30 |
| PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
| High Deposition Rate And High Quality Nitride App 20180233356 - HAN; Xinhai ; et al. | 2018-08-16 |
| PECVD apparatus and process Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
| Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber Grant 10,002,745 - Zhang , et al. June 19, 2 | 2018-06-19 |
| Dielectric-metal stack for 3D flash memory application Grant 9,972,487 - Han , et al. May 15, 2 | 2018-05-15 |
| Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
| PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
| Plasma Treatment Process For In-situ Chamber Cleaning Efficiency Enhancemnet In Plasma Processing Chamber App 20170323768 - ZHANG; Lin ; et al. | 2017-11-09 |
| Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
| Vnand Tensile Thick Teos Oxide App 20170062469 - TSIANG; Michael Wenyoung ; et al. | 2017-03-02 |
| Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
| Gate stack materials for semiconductor applications for lithographic overlay improvement Grant 9,490,116 - Tsiang , et al. November 8, 2 | 2016-11-08 |
| Dual-channel Showerhead For Formation Of Film Stacks App 20160322200 - ALAYAVALLI; Kaushik ; et al. | 2016-11-03 |
| Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices App 20160293609 - JHA; Praket P. ; et al. | 2016-10-06 |
| PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
| Gate Stack Materials For Semiconductor Applications For Lithographic Overlay Improvement App 20160203971 - TSIANG; Michael ; et al. | 2016-07-14 |
| Pecvd Process App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
| PECVD process Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
| Pecvd Apparatus And Process App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
| Dielectric-metal Stack For 3d Flash Memory Application App 20150206757 - HAN; XINHAI ; et al. | 2015-07-23 |
| High Throughput Multi-layer Stack Deposition App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
| Methods For Maintaining Clean Etch Rate And Reducing Particulate Contamination With Pecvd Of Amorphous Silicon Filims App 20140272184 - SREEKALA; Subbalakshmi ; et al. | 2014-09-18 |
| Pecvd Process App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
| Silicon nitride passivation layer for covering high aspect ratio features Grant 8,563,095 - Rajagopalan , et al. October 22, 2 | 2013-10-22 |
| Zero Shrinkage Smooth Interface Oxy-nitride And Oxy-amorphous-silicon Stacks For 3d Memory Vertical Gate Application App 20130161629 - HAN; XINHAI ; et al. | 2013-06-27 |
| High mobility monolithic p-i-n diodes Grant 8,298,887 - Han , et al. October 30, 2 | 2012-10-30 |
| PECVD oxide-nitride and oxide-silicon stacks for 3D memory application Grant 8,076,250 - Rajagopalan , et al. December 13, 2 | 2011-12-13 |
| Silicon Nitride Passivation Layer For Covering High Aspect Ratio Features App 20110223765 - RAJAGOPALAN; Nagarajan ; et al. | 2011-09-15 |
| High Mobility Monolithic P-i-n Diodes App 20110136327 - Han; Xinhai ; et al. | 2011-06-09 |
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