loadpatents
Patent applications and USPTO patent grants for Han; Sun-Seok.The latest application filed is for "air exhaust system of a chamber for manufacturing semiconductor device".
Patent | Date |
---|---|
Electrostatic chuck for preventing an arc Grant 6,847,516 - Kwon , et al. January 25, 2 | 2005-01-25 |
Impedance matching circuit for inductively coupled plasma source Grant 6,770,836 - Kwon , et al. August 3, 2 | 2004-08-03 |
Apparatus for generating inductively coupled plasma Grant 6,685,800 - Kim , et al. February 3, 2 | 2004-02-03 |
Parallel resonance whirl antenna Grant 6,653,988 - Kwon , et al. November 25, 2 | 2003-11-25 |
Air exhaust system of a chamber for manufacturing semiconductor device App 20030066605 - Ko, Bu-Jin ;   et al. | 2003-04-10 |
Electrostatic chuck for preventing an arc App 20030043530 - Kwon, Gi-Chung ;   et al. | 2003-03-06 |
Parallel resonance whirl antenna App 20030001792 - Kwon, Gi Chung ;   et al. | 2003-01-02 |
Plasma processing apparatus having parallel resonance antenna for very high frequency App 20020189763 - Kwon, Gi Chung ;   et al. | 2002-12-19 |
Impedance matching circuit for inductively coupled plasma source App 20020130110 - Kwon, Gi-Chung ;   et al. | 2002-09-19 |
Apparatus for generating inductively coupled plasma App 20020088548 - Kim, Hong Seub ;   et al. | 2002-07-11 |
Plasma processing apparatus App 20020007794 - Byun, Hong-Sik ;   et al. | 2002-01-24 |
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