Patent | Date |
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Process chamber component having yttrium--aluminum coating Grant 9,012,030 - Han , et al. April 21, 2 | 2015-04-21 |
Method Of Forming A Process Chamber Component Having Electroplated Yttrium Containing Coating App 20120138472 - HAN; Nianci ;   et al. | 2012-06-07 |
Process Chamber Component Having Yttrium-aluminum Coating App 20120135155 - HAN; Nianci ;   et al. | 2012-05-31 |
Process chamber component having electroplated yttrium containing coating Grant 8,114,525 - Han , et al. February 14, 2 | 2012-02-14 |
Method of manufacturing a process chamber component having yttrium-aluminum coating Grant 8,110,086 - Han , et al. February 7, 2 | 2012-02-07 |
Electroplating an yttrium-containing coating on a chamber component Grant 7,833,401 - Han , et al. November 16, 2 | 2010-11-16 |
Process chamber component having electroplated yttrium containing coating App 20080223725 - Han; Nianci ;   et al. | 2008-09-18 |
Process chamber component having yttrium-aluminum coating App 20080110760 - Han; Nianci ;   et al. | 2008-05-15 |
Process chamber component having electroplated yttrium containing coating Grant 7,371,467 - Han , et al. May 13, 2 | 2008-05-13 |
Forming A Chamber Component Having A Yttrium-containing Coating App 20080017516 - Han; Nianci ;   et al. | 2008-01-24 |
Bonded multi-layer RF window App 20070079936 - Li; Maocheng ;   et al. | 2007-04-12 |
Process chamber having component with yttrium-aluminum coating Grant 6,942,929 - Han , et al. September 13, 2 | 2005-09-13 |
Coating boron carbide on aluminum Grant 6,808,747 - Shih , et al. October 26, 2 | 2004-10-26 |
Process chamber component having electroplated yttrium containing coating App 20040191545 - Han, Nianci ;   et al. | 2004-09-30 |
Substrate processing using a member comprising an oxide of a group IIIB metal Grant 6,641,697 - Han , et al. November 4, 2 | 2003-11-04 |
Cleaning ceramic surfaces App 20030190870 - Shih, Hong ;   et al. | 2003-10-09 |
Wavy and roughened dome in plasma processing reactor Grant 6,623,595 - Han , et al. September 23, 2 | 2003-09-23 |
Corrosion-resistant protective coating for an apparatus and method for processing a substrate Grant 6,592,707 - Shih , et al. July 15, 2 | 2003-07-15 |
Process chamber having component with yttrium-aluminum coating App 20030127049 - Han, Nianci ;   et al. | 2003-07-10 |
Diamond coated parts in a plasma reactor Grant 6,508,911 - Han , et al. January 21, 2 | 2003-01-21 |
Substrate processing using a member comprising an oxide of a group IIIB metal App 20020100554 - Han, Nianci ;   et al. | 2002-08-01 |
Corrosion-resistant protective coating for an apparatus and method for processing a substrate App 20020066532 - Shih, Hong ;   et al. | 2002-06-06 |
Ceramic composition for an apparatus and method for processing a substrate Grant 6,352,611 - Han , et al. March 5, 2 | 2002-03-05 |
Boron carbide parts and coatings in a plasma reactor Grant 6,120,640 - Shih , et al. September 19, 2 | 2000-09-19 |
Silicon carbide composite article particularly useful for plasma reactors Grant 5,904,778 - Lu , et al. May 18, 1 | 1999-05-18 |