| Patent | Date |
|---|
Semiconductor Device
App 20220285207 - KANG; Sung Jin ; et al. | 2022-09-08 |
Semiconductor device and method of fabricating the same
Grant 11,348,827 - Kang , et al. May 31, 2 | 2022-05-31 |
Semiconductor Device
App 20220005763 - LEE; Jangho ; et al. | 2022-01-06 |
Cleaning Solution Production Systems And Methods, And Plasma Reaction Tanks
App 20210351047 - YOO; Beom Jin ; et al. | 2021-11-11 |
Semiconductor device
Grant 11,139,244 - Lee , et al. October 5, 2 | 2021-10-05 |
Cleaning solution production systems and methods, and plasma reaction tanks
Grant 11,107,705 - Yoo , et al. August 31, 2 | 2021-08-31 |
Semiconductor devices and methods of manufacturing the same
Grant 11,037,872 - Han , et al. June 15, 2 | 2021-06-15 |
Semiconductor Device
App 20210166974 - LEE; Woojin ; et al. | 2021-06-03 |
Semiconductor device and method of manufacturing the same
Grant 10,943,824 - Lee , et al. March 9, 2 | 2021-03-09 |
RF sensing apparatus of plasma processing chamber and plasma processing chamber including same
Grant 10,901,007 - Kim , et al. January 26, 2 | 2021-01-26 |
Semiconductor Device And Method Of Fabricating The Same
App 20210020497 - KANG; Sung Jin ; et al. | 2021-01-21 |
Semiconductor Device
App 20210005551 - LEE; Jangho ; et al. | 2021-01-07 |
Semiconductor device and method for fabricating the same
Grant 10,832,948 - Han , et al. November 10, 2 | 2020-11-10 |
Semiconductor device with multi-layered wiring and method for fabricating the same
Grant 10,825,766 - Kim , et al. November 3, 2 | 2020-11-03 |
Methods of fabricating semiconductor devices
Grant 10,804,145 - Kim , et al. October 13, 2 | 2020-10-13 |
Method of manufacturing integrated circuit device
Grant 10,795,262 - Park , et al. October 6, 2 | 2020-10-06 |
Methods of manufacturing semiconductor devices
Grant 10,777,449 - Jang , et al. Sept | 2020-09-15 |
Semiconductor Device And Method For Fabricating The Same
App 20200251376 - Kind Code | 2020-08-06 |
Methods Of Fabricating Semiconductor Devices
App 20200227314 - Kim; Yeong Gil ; et al. | 2020-07-16 |
Gas injection apparatus and thin film deposition equipment including the same
Grant 10,669,631 - Kim , et al. | 2020-06-02 |
Semiconductor device with air gap between wires and method for fabricating the same
Grant 10,658,231 - Han , et al. | 2020-05-19 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20200105664 - HAN; Kyu-Hee ; et al. | 2020-04-02 |
Semiconductor Device And Method Of Manufacturing The Same
App 20200098620 - LEE; Woojin ; et al. | 2020-03-26 |
Rf Sensing Apparatus Of Plasma Processing Chamber And Plasma Processing Chamber Including Same
App 20200072874 - KIM; YOUNG DO ; et al. | 2020-03-05 |
Semiconductor device
Grant 10,566,284 - Kim , et al. Feb | 2020-02-18 |
Semiconductor Device And Method For Fabricating The Same
App 20200051909 - KIM; Ji Young ; et al. | 2020-02-13 |
Cleaning Solution Production Systems And Methods, And Plasma Reaction Tanks
App 20200035515 - YOO; Beom Jin ; et al. | 2020-01-30 |
Plasma Generator, Cleaning Liquid Processing Apparatus, Semiconductor Device Cleaning Apparatus, Cleaning Liquid Processing Meth
App 20200020551 - YOO; Beom Jin ; et al. | 2020-01-16 |
Methods of forming an ultra-low-k dielectric layer and dielectric layers formed thereby
Grant 10,446,495 - Kang , et al. Oc | 2019-10-15 |
Method Of Manufacturing Integrated Circuit Device
App 20190287792 - PARK; Jin ; et al. | 2019-09-19 |
Semiconductor devices and methods of manufacturing the same
Grant 10,304,734 - You , et al. | 2019-05-28 |
Semiconductor Device
App 20190157214 - KIM; Jun Kwan ; et al. | 2019-05-23 |
Methods Of Manufacturing Semiconductor Devices
App 20190139813 - JANG; Sang-Shin ; et al. | 2019-05-09 |
Methods Of Forming An Ultra-low-k Dielectric Layer And Dielectric Layers Formed Thereby
App 20190043809 - KANG; Yoonhee ; et al. | 2019-02-07 |
Semiconductor devices and methods of manufacturing the same
Grant 10,199,263 - Jang , et al. Fe | 2019-02-05 |
Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system
Grant 10,196,738 - Lee , et al. Fe | 2019-02-05 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20180330987 - YOU; WOO KYUNG ; et al. | 2018-11-15 |
Gas Injection Apparatus And Thin Film Deposition Equipment Including The Same
App 20180320267 - Kim; Ki-Chul ; et al. | 2018-11-08 |
Semiconductor device including air-gap
Grant 10,090,381 - Baek , et al. October 2, 2 | 2018-10-02 |
Semiconductor devices and methods of manufacturing the same
Grant 10,062,609 - You , et al. August 28, 2 | 2018-08-28 |
Gas injection apparatus and thin film deposition equipment including the same
Grant 10,041,172 - Kim , et al. August 7, 2 | 2018-08-07 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20180130697 - JANG; Sang-Shin ; et al. | 2018-05-10 |
Semiconductor Device And Method For Fabricating The Same
App 20180096880 - HAN; Kyu Hee ; et al. | 2018-04-05 |
Semiconductor Device Including Air-gap
App 20180083099 - BAEK; JONGMIN ; et al. | 2018-03-22 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20180033691 - You; Woo Kyung ; et al. | 2018-02-01 |
Deposition Process Monitoring System, And Method Of Controlling Deposition Process And Method Of Fabricating Semiconductor Device Using The System
App 20180010243 - Lee; Chang-yun ; et al. | 2018-01-11 |
Methods of fabricating semiconductor devices including supporting patterns in gap regions between conductive patterns
Grant 9,741,608 - Han , et al. August 22, 2 | 2017-08-22 |
Methods of forming semiconductor devices including low-k dielectric layer
Grant 9,633,836 - Ahn , et al. April 25, 2 | 2017-04-25 |
Method And Apparatus For Manufacturing A Semiconductor Device
App 20170092480 - YI; In-Sun ; et al. | 2017-03-30 |
Semiconductor Devices Including Supporting Patterns In Gap Regions Between Conductive Patterns And Methods Of Fabricating The Same
App 20160225658 - Han; Kyu-Hee ; et al. | 2016-08-04 |
Semiconductor devices including supporting patterns in gap regions between conductive patterns
Grant 9,337,150 - Han , et al. May 10, 2 | 2016-05-10 |
Semiconductor devices having through-electrodes and methods for fabricating the same
Grant 9,312,171 - Han , et al. April 12, 2 | 2016-04-12 |
Gas Injection Apparatus And Thin Film Deposition Equipment Including The Same
App 20160060759 - Kim; Ki-Chul ; et al. | 2016-03-03 |
Method of manufacturing a semiconductor device having a porous, low-k dielectric layer
Grant 9,224,593 - Ahn , et al. December 29, 2 | 2015-12-29 |
Semiconductor devices and methods of fabricating the same
Grant 9,171,781 - Lee , et al. October 27, 2 | 2015-10-27 |
Semiconductor devices
Grant 9,053,948 - Kim , et al. June 9, 2 | 2015-06-09 |
Semiconductor Devices Having Through-electrodes And Methods For Fabricating The Same
App 20150155233 - Han; Kyu-Hee ; et al. | 2015-06-04 |
Methods Of Forming Semiconductor Devices Including Low-k Dielectric Layer
App 20140370704 - AHN; Sang-Hoon ; et al. | 2014-12-18 |
Semiconductor Devices And Methods Of Fabricating The Same
App 20140312456 - Kim; Kyoung-Hee ; et al. | 2014-10-23 |
Semiconductor Devices And Methods Of Fabricating The Same
App 20140225251 - LEE; Jang-Hee ; et al. | 2014-08-14 |
Semiconductor devices and methods of manufacturing the same
Grant 8,786,058 - Han , et al. July 22, 2 | 2014-07-22 |
Semiconductor devices and methods of manufacturing semiconductor devices
Grant 8,736,018 - Kim , et al. May 27, 2 | 2014-05-27 |
Semiconductor Devices Including Supporting Patterns In Gap Regions Between Conductive Patterns And Methods Of Fabricating The Same
App 20140061926 - Han; Kyu-Hee ; et al. | 2014-03-06 |
Integrated circuit devices with crack-resistant fuse structures
Grant 8,569,862 - Ahn , et al. October 29, 2 | 2013-10-29 |
Method Of Forming Through Silicon Via Of Semiconductor Device Using Low-k Dielectric Material
App 20130228936 - Han; Kyu-hee ; et al. | 2013-09-05 |
Method of forming hardened porous dielectric layer and method of fabricating semiconductor device having hardened porous dielectric layer
Grant 8,524,615 - Ahn , et al. September 3, 2 | 2013-09-03 |
Integrated Circuit Devices With Crack-resistant Fuse Structures
App 20130193552 - Ahn; Sang-Hoon ; et al. | 2013-08-01 |
Integrated circuit devices having selectively strengthened composite interlayer insulation layers and methods of fabricating the same
Grant 8,455,985 - Han , et al. June 4, 2 | 2013-06-04 |
Method of forming through silicon via of semiconductor device using low-k dielectric material
Grant 8,426,308 - Han , et al. April 23, 2 | 2013-04-23 |
Methods of forming integrated circuit devices with crack-resistant fuse structures
Grant 8,404,579 - Ahn , et al. March 26, 2 | 2013-03-26 |
Method of Manufacturing a Semiconductor Device Having a Porous, Low-K Dielectric Layer
App 20120178253 - Ahn; Sang-Hoon ; et al. | 2012-07-12 |
Semiconductor Devices And Methods Of Manufacturing Semiconductor Devices
App 20120153500 - KIM; Kyoung-Hee ; et al. | 2012-06-21 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20120112361 - HAN; KYU-HEE ; et al. | 2012-05-10 |
Method Of Forming Through Silicon Via Of Semiconductor Device Using Low-k Dielectric Material
App 20120094437 - Han; Kyu-hee ; et al. | 2012-04-19 |
Method Of Forming Hardened Porous Dielectric Layer And Method Of Fabricating Semiconductor Device Having Hardened Porous Dielectric Layer
App 20120083117 - Ahn; Sang-Hoon ; et al. | 2012-04-05 |
Apparatus For Manufacturing Semiconductor Device And Method Of Manufacturing Semiconductor Device Using The Same
App 20110263117 - Nam; Sang-Don ; et al. | 2011-10-27 |
Integrated Circuit Devices Having Selectively Strengthened Composite Interlayer Insulation Layers And Methods Of Fabricating The Same
App 20110241184 - Han; Kyu-hee ; et al. | 2011-10-06 |
Methods Of Forming Integrated Circuit Devices With Crack-resistant Fuse Structures
App 20110136332 - Ahn; Sang-Hoon ; et al. | 2011-06-09 |
Gas supplying apparatus
Grant 7,303,141 - Han , et al. December 4, 2 | 2007-12-04 |
Semiconductor manufacturing apparatus
App 20050155555 - Han, Kyu-hee ; et al. | 2005-07-21 |
Gas supplying apparatus
App 20040217217 - Han, Kyu-hee ; et al. | 2004-11-04 |
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