| Patent | Date |
|---|
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
Grant 11,437,264 - Sung , et al. September 6, 2 | 2022-09-06 |
Substrate Processing Apparatus And Method Of Processing A Substrate
App 20210272838 - SUN; Jong Woo ; et al. | 2021-09-02 |
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus
App 20210202276 - SONG; Seung-Yoon ; et al. | 2021-07-01 |
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
Grant 11,037,806 - Song , et al. June 15, 2 | 2021-06-15 |
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20210175110 - SUNG; Jung Mo ; et al. | 2021-06-10 |
Substrate processing apparatus including edge ring
Grant 11,018,046 - Sun , et al. May 25, 2 | 2021-05-25 |
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
Grant 10,964,578 - Sung , et al. March 30, 2 | 2021-03-30 |
System for fabricating a semiconductor device
Grant 10,892,142 - Jeon , et al. January 12, 2 | 2021-01-12 |
Substrate Processing Apparatus Including Edge Ring
App 20200328105 - SUN; Jong Woo ; et al. | 2020-10-15 |
Method of fabricating semiconductor devices
Grant 10,720,491 - Yoon , et al. | 2020-07-21 |
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus
App 20200227289 - Song; Seung-Yoon ; et al. | 2020-07-16 |
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20200135527 - SUNG; Jung Mo ; et al. | 2020-04-30 |
Plasma Processing Apparatus Including Gas Distribution Plate
App 20190304751 - Park; Chan Hoon ; et al. | 2019-10-03 |
System For Fabricating A Semiconductor Device
App 20190287766 - JEON; SANGJEAN ; et al. | 2019-09-19 |
Method Of Fabricating Semiconductor Devices
App 20190273130 - YOON; Jun Ho ; et al. | 2019-09-05 |
Method of fabricating semiconductor devices
Grant 10,319,805 - Yoon , et al. | 2019-06-11 |
Plasma Processing Apparatus, Plasma Processing Method And Method Of Manufacturing Semiconductor Device Using The Same
App 20190096636 - NAM; Sang Ki ; et al. | 2019-03-28 |
Method Of Fabricating Semiconductor Devices
App 20180108728 - YOON; Jun Ho ; et al. | 2018-04-19 |
Method of forming fine pattern of semiconductor device
Grant 9,812,335 - Han , et al. November 7, 2 | 2017-11-07 |
Method for fabricating a semiconductor device
Grant 9,799,561 - Park , et al. October 24, 2 | 2017-10-24 |
Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode
Grant 9,647,056 - Yoon , et al. May 9, 2 | 2017-05-09 |
Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method
Grant 9,607,853 - Jeon , et al. March 28, 2 | 2017-03-28 |
Method For Fabricating A Semiconductor Device
App 20170053828 - PARK; Chan-Hoon ; et al. | 2017-02-23 |
Methods For Forming Pattern Using Cyclic Processing
App 20160314981 - YOON; Junho ; et al. | 2016-10-27 |
Method Of Manufacturing Semiconductor Device
App 20160293444 - PARK; Jae-hong ; et al. | 2016-10-06 |
Method Of Forming Fine Pattern Of Semiconductor Device
App 20160293445 - HAN; Je-Woo ; et al. | 2016-10-06 |
Semiconductor Devices Including A Support For An Electrode And Methods Of Forming Semiconductor Devices Including A Support For An Electrode
App 20160093686 - Yoon; Junho ; et al. | 2016-03-31 |
Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode
Grant 9,240,441 - Yoon , et al. January 19, 2 | 2016-01-19 |
Patterning Method Using Metal Mask And Method Of Fabricating Semiconductor Device Including The Same Patterning Method
App 20160013070 - JEON; Kyung-yub ; et al. | 2016-01-14 |
Method of fabricating semiconductor device using photo key
Grant 9,230,808 - Han , et al. January 5, 2 | 2016-01-05 |
Methods Of Removing A Hard Mask
App 20150380267 - HAN; Je-Woo ; et al. | 2015-12-31 |
Method of fabricating semiconductor devices
Grant 9,123,657 - Park , et al. September 1, 2 | 2015-09-01 |
Methods of forming semiconductor device using bowing control layer
Grant 9,093,500 - Park , et al. July 28, 2 | 2015-07-28 |
Method Of Fabricating Semiconductor Devices
App 20150079791 - PARK; Minjoon ; et al. | 2015-03-19 |
Methods of fabricating a semiconductor device with capacitors using mold structure and protection layer
Grant 8,969,167 - Yoon , et al. March 3, 2 | 2015-03-03 |
Methods Of Forming Semiconductor Device Using Bowing Control Layer
App 20150056805 - Park; Jae-Hong ; et al. | 2015-02-26 |
Methods of manufacturing semiconductor devices
Grant 8,822,341 - Jeon , et al. September 2, 2 | 2014-09-02 |
Method of fabricating semiconductor device
Grant 8,815,697 - Yoon , et al. August 26, 2 | 2014-08-26 |
Methods Of Fabricating A Semiconductor Device With Capacitors Using Mold Structure And Protection Layer
App 20140065784 - Yoon; Junho ; et al. | 2014-03-06 |
Semiconductor Devices Including A Support For An Electrode And Methods Of Forming Semiconductor Devices Including A Support For An Electrode
App 20140065785 - Yoon; Junho ; et al. | 2014-03-06 |
Method Of Fabricating Semiconductor Device Using Photo Key
App 20140038383 - HAN; Je-woo ; et al. | 2014-02-06 |
Method of forming semiconductor device
Grant 8,563,371 - Jeon , et al. October 22, 2 | 2013-10-22 |
Method of fabricating semiconductor device
App 20130005110 - Yoon; Jun-Ho ; et al. | 2013-01-03 |
Semiconductor Devices Including Strained Semiconductor Regions, Methods Of Fabricating The Same, And Electronic Systems Including The Devices
App 20120164809 - YOON; Jun-Ho ; et al. | 2012-06-28 |
Method Of Forming Semiconductor Device
App 20120064709 - JEON; Kyung-Yub ; et al. | 2012-03-15 |
Methods Of Manufacturing Semiconductor Devices
App 20110318930 - Jeon; Yong-Ho ; et al. | 2011-12-29 |
Method for forming fine patterns of a semiconductor device using double patterning
Grant 7,550,391 - Jeon , et al. June 23, 2 | 2009-06-23 |
Method for forming fine patterns of a semiconductor device using double patterning
App 20080090418 - Jeon; Kyung-yub ; et al. | 2008-04-17 |
Method of etching semiconductor device and method of fabricating semiconductor device using the same
App 20080070417 - Han; Je-woo ; et al. | 2008-03-20 |
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