Hamilton; Shawn M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hamilton; Shawn M..The latest application filed is for "apparatus for uv flowable dielectric".
- Hamilton; Shawn M. - Boulder Creek CA
| Patent | Date |
|---|---|
| Apparatus for UV flowable dielectric Grant 11,270,896 - Mohn , et al. March 8, 2 | 2022-03-08 |
| Anti-transient showerhead Grant 10,494,717 - Sung , et al. De | 2019-12-03 |
| Apparatus For Uv Flowable Dielectric App 20190333790 - Mohn; Jonathan D. ; et al. | 2019-10-31 |
| Apparatus for UV flowable dielectric Grant 10,388,546 - Mohn , et al. A | 2019-08-20 |
| Anti-transient Showerhead App 20180340256 - Sung; Edward ; et al. | 2018-11-29 |
| Configurable liquid precursor vaporizer Grant 10,107,490 - Smith , et al. October 23, 2 | 2018-10-23 |
| Anti-transient showerhead Grant 10,023,959 - Sung , et al. July 17, 2 | 2018-07-17 |
| Dual-plenum showerhead with interleaved plenum sub-volumes Grant 9,728,380 - Mohn , et al. August 8, 2 | 2017-08-08 |
| System and apparatus for flowable deposition in semiconductor fabrication Grant 9,719,169 - Mohn , et al. August 1, 2 | 2017-08-01 |
| Apparatus For Uv Flowable Dielectric App 20170137943 - Mohn; Jonathan D. ; et al. | 2017-05-18 |
| Anti-transient Showerhead App 20160348242 - Sung; Edward ; et al. | 2016-12-01 |
| Variable Showerhead Flow By Varying Internal Baffle Conductance App 20160020074 - Mohn; Jonathan D. ; et al. | 2016-01-21 |
| Configurable Liquid Precursor Vaporizer App 20150377481 - Smith; Colin F. ; et al. | 2015-12-31 |
| Variable showerhead flow by varying internal baffle conductance Grant 9,121,097 - Mohn , et al. September 1, 2 | 2015-09-01 |
| Variable Showerhead Flow By Varying Internal Baffle Conductance App 20140061324 - Mohn; Jonathan D. ; et al. | 2014-03-06 |
| System And Apparatus For Flowable Deposition In Semiconductor Fabrication App 20120161405 - Mohn; Jonathan D. ; et al. | 2012-06-28 |
| Active edge gripping and effector Grant 7,300,082 - Rogers , et al. November 27, 2 | 2007-11-27 |
| Active edge gripping end effector App 20050017529 - Rogers, Theodore W. ; et al. | 2005-01-27 |
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