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name:-0.0097250938415527
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Hamaya; Zenichi Patent Filings

Hamaya; Zenichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hamaya; Zenichi.The latest application filed is for "imprint method, imprint apparatus, and method of manufacturing article".

Company Profile
2.9.12
  • Hamaya; Zenichi - Utsunomiya JP
  • Hamaya; Zenichi - Utsunomiya-shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Imprint apparatus, imprint method, and method for manufacturing article
Grant 11,314,167 - Murakami , et al. April 26, 2
2022-04-26
Imprint Method, Imprint Apparatus, And Method Of Manufacturing Article
App 20200264507 - Hamaya; Zenichi ;   et al.
2020-08-20
Imprint Apparatus, Imprint Method, And Method For Manufacturing Article
App 20190317398 - Murakami; Yosuke ;   et al.
2019-10-17
Imprint apparatus
Grant 10,095,117 - Hamaya , et al. October 9, 2
2018-10-09
Interferometer system, lithography apparatus, and article manufacturing method
Grant 9,804,510 - Hamaya , et al. October 31, 2
2017-10-31
Mold Replicating Method, Imprint Apparatus, And Article Manufacturing Method
App 20170210036 - Hamaya; Zenichi ;   et al.
2017-07-27
Imprint Apparatus And Article Manufacturing Method Using Same
App 20160306281 - Hamaya; Zenichi ;   et al.
2016-10-20
Imprint apparatus
Grant 9,400,426 - Hamaya , et al. July 26, 2
2016-07-26
Imprint apparatus
Grant 9,285,675 - Hamaya , et al. March 15, 2
2016-03-15
Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing device
Grant 9,217,937 - Hamaya , et al. December 22, 2
2015-12-22
Interferometer System, Lithography Apparatus, And Article Manufacturing Method
App 20140198307 - Hamaya; Zenichi ;   et al.
2014-07-17
Stage Apparatus And Adjustment Method Thereof, Exposure Apparatus, And Method Of Manufacturing Device
App 20140125962 - Hamaya; Zenichi ;   et al.
2014-05-08
Imprint Apparatus And Article Manufacturing Method Using Same
App 20130056904 - Hamaya; Zenichi ;   et al.
2013-03-07
Imprint Apparatus And Article Manufacturing Method Using Same
App 20130056905 - Hamaya; Zenichi ;   et al.
2013-03-07
Exposure Apparatus And Device Manufacturing Method
App 20100068659 - Hamaya; Zenichi
2010-03-18
Positioning apparatus, exposure apparatus, and device manufacturing method
Grant 7,646,488 - Hamaya January 12, 2
2010-01-12
Positioning Apparatus, Exposure Apparatus, And Device Manufacturing Method
App 20080136078 - Hamaya; Zenichi
2008-06-12

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