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Semiconductor device Grant 11,088,073 - Matsuno , et al. August 10, 2 | 2021-08-10 |
SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus Grant 10,950,435 - Hamano , et al. March 16, 2 | 2021-03-16 |
SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus Grant 10,910,218 - Hamano , et al. February 2, 2 | 2021-02-02 |
Semiconductor Device App 20200303296 - MATSUNO; Yoshinori ;   et al. | 2020-09-24 |
Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus Grant 10,711,372 - Ohno , et al. | 2020-07-14 |
Semiconductor wafer, semiconductor device, and method for producing semiconductor device Grant 10,707,075 - Hamano , et al. | 2020-07-07 |
Semiconductor Wafer, Semiconductor Device, And Method For Producing Semiconductor Device App 20200144053 - HAMANO; Kenichi ;   et al. | 2020-05-07 |
Sic Epitaxial Wafer, Method For Manufacturing Sic Epitaxial Wafer, Sic Device, And Power Conversion Apparatus App 20200020528 - HAMANO; Kenichi ;   et al. | 2020-01-16 |
Substrate mounting member, wafer plate, and SiC epitaxial substrate manufacturing method Grant 10,508,362 - Hamano , et al. Dec | 2019-12-17 |
Silicon Carbide Epitaxial Wafer Manufacturing Method, Silicon Carbide Semiconductor Device Manufacturing Method And Silicon Carb App 20190284718 - OHNO; Akihito ;   et al. | 2019-09-19 |
Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus Grant 10,370,775 - Ohno , et al. | 2019-08-06 |
Method of manufacturing silicon carbide epitaxial wafer Grant 10,229,830 - Hamano , et al. | 2019-03-12 |
Method Of Manufacturing Silicon Carbide Epitaxial Wafer App 20180226246 - HAMANO; Kenichi ;   et al. | 2018-08-09 |
Method for manufacturing SiC epitaxial wafer Grant 9,988,738 - Tomita , et al. June 5, 2 | 2018-06-05 |
Method for manufacturing silicon carbide semiconductor device Grant 9,957,638 - Ohno , et al. May 1, 2 | 2018-05-01 |
Single-crystal 4H-SiC substrate Grant 9,903,048 - Ohno , et al. February 27, 2 | 2018-02-27 |
Driving Force Transmission Device App 20170327143 - ARAMOTO; Gento ;   et al. | 2017-11-16 |
Silicon Carbide Epitaxial Wafer Manufacturing Method, Silicon Carbide Semiconductor Device Manufacturing Method And Silicon Carbide Epitaxial Wafer Manufacturing Apparatus App 20170314160 - OHNO; Akihito ;   et al. | 2017-11-02 |
SUBSTRATE MOUNTING MEMBER, WAFER PLATE, AND SiC EPITAXIAL SUBSTRATE MANUFACTURING METHOD App 20170283984 - HAMANO; Kenichi ;   et al. | 2017-10-05 |
Method for manufacturing a single-crystal 4H--SiC substrate Grant 9,752,254 - Ohno , et al. September 5, 2 | 2017-09-05 |
SINGLE-CRYSTAL 4H-SiC SUBSTRATE App 20160298264 - Ohno; Akihito ;   et al. | 2016-10-13 |
METHOD FOR MANUFACTURING A SINGLE-CRYSTAL 4H-SiC SUBSTRATE App 20160298262 - Ohno; Akihito ;   et al. | 2016-10-13 |
Single-crystal 4H-SiC substrate Grant 9,422,640 - Ohno , et al. August 23, 2 | 2016-08-23 |
Film thickness measurement method Grant 9,400,172 - Hattori , et al. July 26, 2 | 2016-07-26 |
Sic Epitaxial Wafer Production Method App 20150354090 - TOMITA; Nobuyuki ;   et al. | 2015-12-10 |
Method For Manufacturing Silicon Carbide Semiconductor Device App 20150267320 - OHNO; Akihito ;   et al. | 2015-09-24 |
SINGLE-CRYSTAL 4H-SiC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME App 20140295136 - Ohno; Akihito ;   et al. | 2014-10-02 |
Film Thickness Measurement Method App 20140239181 - Hattori; Ryo ;   et al. | 2014-08-28 |
Method of manufacturing silicon carbide epitaxial wafer Grant 8,679,952 - Tomita , et al. March 25, 2 | 2014-03-25 |
Method for manufacturing silicon carbide semiconductor device Grant 8,569,106 - Hamano , et al. October 29, 2 | 2013-10-29 |
Silicon Carbide Epitaxial Wafer And Manufacturing Method Therefor, Silicon Carbide Bulk Substrate For Epitaxial Growth And Manufacturing Method Therefor And Heat Treatment Apparatus App 20130126906 - Tomita; Nobuyuki ;   et al. | 2013-05-23 |
Method For Manufacturing Silicon Carbide Semiconductor Device App 20110312161 - Hamano; Kenichi ;   et al. | 2011-12-22 |
Photo video camera device Grant 5,218,439 - Mizoguchi , et al. June 8, 1 | 1993-06-08 |