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Method and apparatus for work quality control
Grant 10,614,391 - Imazawa , et al. | 2020-04-07 |
Method And Apparatus For Work Quality Control
App 20160253618 - IMAZAWA; Kei ; et al. | 2016-09-01 |
Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method
Grant 8,995,748 - Sakai , et al. March 31, 2 | 2015-03-31 |
Recipe Generation Apparatus, Inspection Support Apparatus, Inspection System, And Recording Media
App 20140177940 - Nakagaki; Ryo ; et al. | 2014-06-26 |
Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool
Grant 8,675,949 - Takagi , et al. March 18, 2 | 2014-03-18 |
Method of evaluating systematic defect, and apparatus therefor
Grant 8,621,400 - Takagi , et al. December 31, 2 | 2013-12-31 |
Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device
Grant 8,612,811 - Matsumoto , et al. December 17, 2 | 2013-12-17 |
Pattern Review Tool, Recipe Making Tool, And Method Of Making Recipe
App 20130283227 - Sakai; Tsunehiro ; et al. | 2013-10-24 |
Method Of Evaluating Systematic Defect, And Apparatus Therefor
App 20130191807 - Takagi; Yuji ; et al. | 2013-07-25 |
Defect Image Processing Apparatus, Defect Image Processing Method, Semiconductor Defect Classifying Apparatus, And Semiconductor Defect Classifying Method
App 20120141011 - Sakai; Tsunehiro ; et al. | 2012-06-07 |
Reviewed Defect Selection Processing Method, Defect Review Method, Reviewed Defect Selection Processing Tool, And Defect Review Tool
App 20120093392 - Takagi; Yuji ; et al. | 2012-04-19 |
Defective-ratio Predicting Method, Defective-ratio Predicting Program, Managing Method For Semiconductor Manufacturing Apparatus, And Manufacturing Method For Semiconductor Device
App 20110172806 - Matsumoto; Chizu ; et al. | 2011-07-14 |
Semiconductor device yield prediction system and method
Grant 7,945,410 - Morioka , et al. May 17, 2 | 2011-05-17 |
Liquid Crystal Display Device with Evaluation Patterns Disposed Thereon, and Method for Manufacturing the Same
App 20080241486 - Ishikawa; Seiji ; et al. | 2008-10-02 |
Semiconductor Device Yield Prediction System And Method
App 20080140330 - Morioka; Natsuyo ; et al. | 2008-06-12 |
Method for analyzing circuit pattern defects and a system thereof
Grant 7,352,890 - Shimoda , et al. April 1, 2 | 2008-04-01 |
Probe driving method, and probe apparatus
Grant 7,301,146 - Tomimatsu , et al. November 27, 2 | 2007-11-27 |
Method for analyzing circuit pattern defects and a system thereof
App 20060140472 - Shimoda; Atsushi ; et al. | 2006-06-29 |
Method and system for analyzing circuit pattern defects
Grant 7,062,081 - Shimoda , et al. June 13, 2 | 2006-06-13 |
Probe driving method, and probe apparatus
App 20050269511 - Tomimatsu, Satoshi ; et al. | 2005-12-08 |
Probe driving method, and probe apparatus
Grant 6,960,765 - Tomimatsu , et al. November 1, 2 | 2005-11-01 |
Method for test conditions
Grant 6,895,346 - Hamamura , et al. May 17, 2 | 2005-05-17 |
Photomask for test wafers
Grant 6,841,405 - Hamamura , et al. January 11, 2 | 2005-01-11 |
System for testing electronic devices
Grant 6,780,660 - Hamamura , et al. August 24, 2 | 2004-08-24 |
Method of testing electronic devices
Grant 6,770,496 - Hamamura , et al. August 3, 2 | 2004-08-03 |
Method of testing electronic devices indicating short-circuit
Grant 6,771,077 - Hamamura , et al. August 3, 2 | 2004-08-03 |
Method for test conditions
App 20030199110 - Hamamura, Yuichi ; et al. | 2003-10-23 |
Method of manufacturing electronic devices
App 20030199107 - Hamamura, Yuichi ; et al. | 2003-10-23 |
System for testing electronic devices
App 20030199111 - Hamamura, Yuichi ; et al. | 2003-10-23 |
Photomask for test wafers
App 20030197522 - Hamamura, Yuichi ; et al. | 2003-10-23 |
Method of testing electronic devices
App 20030197523 - Hamamura, Yuichi ; et al. | 2003-10-23 |
Probe driving method, and probe apparatus
App 20030184332 - Tomimatsu, Satoshi ; et al. | 2003-10-02 |
Method and apparatus for observing or processing and analyzing using a charged beam
Grant 6,476,387 - Nishimura , et al. November 5, 2 | 2002-11-05 |
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
Grant 6,303,932 - Hamamura , et al. October 16, 2 | 2001-10-16 |
Method for analyzing circuit pattern defects and a system thereof
App 20010016061 - Shimoda, Atsushi ; et al. | 2001-08-23 |
Method and system for judging milling end point for use in charged particle beam milling system
Grant 5,952,658 - Shimase , et al. September 14, 1 | 1999-09-14 |
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