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Patent applications and USPTO patent grants for Hamada; Masahito.The latest application filed is for "chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium".
Patent | Date |
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Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium Grant 10,755,952 - Sasagawa , et al. A | 2020-08-25 |
Chemical Liquid Discharge Mechanism, Liquid Processing Apparatus, Chemical Liquid Discharge Method, And Storage Medium App 20180350633 - Sasagawa; Norihiko ;   et al. | 2018-12-06 |
Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium Grant 10,074,548 - Sasagawa , et al. September 11, 2 | 2018-09-11 |
Chemical Liquid Discharge Mechanism, Liquid Processing Apparatus, Chemical Liquid Discharge Method, And Storage Medium App 20160008840 - Sasagawa; Norihiko ;   et al. | 2016-01-14 |
Film removing device and film removing method Grant 8,343,284 - Kamei , et al. January 1, 2 | 2013-01-01 |
Coating and processing apparatus and method Grant 8,277,884 - Kobayashi , et al. October 2, 2 | 2012-10-02 |
Film Removing Device And Film Removing Method App 20110247659 - KAMEI; Shigenori ;   et al. | 2011-10-13 |
Film removing device and film removing method Grant 8,016,976 - Kamei , et al. September 13, 2 | 2011-09-13 |
Liquid processing apparatus and liquid processing method Grant 7,927,657 - Kobayashi , et al. April 19, 2 | 2011-04-19 |
Development processing device Grant 7,819,594 - Funakoshi , et al. October 26, 2 | 2010-10-26 |
Coating And Processing Apparatus And Method App 20100034969 - KOBAYASHI; Shinji ;   et al. | 2010-02-11 |
Coating and processing apparatus and method Grant 7,615,117 - Kobayashi , et al. November 10, 2 | 2009-11-10 |
Liquid Processing Apparatus And Liquid Processing Method App 20090263577 - KOBAYASHI; Shinji ;   et al. | 2009-10-22 |
Liquid processing apparatus and liquid processing method Grant 7,566,365 - Kobayashi , et al. July 28, 2 | 2009-07-28 |
Coating treatment apparatus and coating treatment method Grant 7,553,374 - Hamada , et al. June 30, 2 | 2009-06-30 |
Development processing device App 20080176172 - Funakoshi; Hideo ;   et al. | 2008-07-24 |
Film Removing Device And Film Removing Method App 20080041523 - Kamei; Shigenori ;   et al. | 2008-02-21 |
Coating treatment apparatus and coating treatment method App 20050181127 - Hamada, Masahito ;   et al. | 2005-08-18 |
Coating and processing apparatus and method App 20040180141 - Kobayashi, Shinji ;   et al. | 2004-09-16 |
Liquid processing apparatus and liquid processing method App 20040180142 - Kobayashi, Shinji ;   et al. | 2004-09-16 |
Developing apparatus and method thereof Grant 6,312,171 - Matsuyama , et al. November 6, 2 | 2001-11-06 |
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