Halpin; Michael W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Halpin; Michael W..The latest application filed is for "system for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow".
- Halpin; Michael W. - Scottsdale AZ
- Halpin; Michael W. - Phoenix AZ
| Patent | Date |
|---|---|
| System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow Grant 10,480,095 - Halpin , et al. Nov | 2019-11-19 |
| System For Rapid Bake Of Semiconductor Substrate With Upper Linear Heating Elements Perpendicular To Horizontal Gas Flow App 20180155851 - Halpin; Michael W. ; et al. | 2018-06-07 |
| Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow Grant 9,885,123 - Halpin , et al. February 6, 2 | 2018-02-06 |
| Substrate Temperature Uniformity During Rapid Substrate Heating App 20120234230 - Halpin; Michael W. ; et al. | 2012-09-20 |
| Wafer support system Grant 7,655,093 - Halpin , et al. February 2, 2 | 2010-02-02 |
| Wafer Support System App 20070131173 - Halpin; Michael W. ; et al. | 2007-06-14 |
| Barrier Coating For Vitreous Materials App 20070119377 - Halpin; Michael W. | 2007-05-31 |
| Apparatus And Methods For Preventing Rotational Slippage Between A Vertical Shaft And A Support Structure For A Semiconductor Wafer Holder App 20070056150 - Weeks; Thomas M. ; et al. | 2007-03-15 |
| Wafer support system Grant 7,186,298 - Halpin , et al. March 6, 2 | 2007-03-06 |
| Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder Grant 7,169,234 - Weeks , et al. January 30, 2 | 2007-01-30 |
| Barrier coating for vitreous materials Grant 7,166,165 - Halpin January 23, 2 | 2007-01-23 |
| Lamp filament design Grant 6,980,734 - Halpin December 27, 2 | 2005-12-27 |
| Delicate product packaging system Grant 6,976,586 - Halpin December 20, 2 | 2005-12-20 |
| Bonded structures for use in semiconductor processing environments Grant 6,929,299 - Halpin August 16, 2 | 2005-08-16 |
| Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder App 20050166849 - Weeks, Thomas M. ; et al. | 2005-08-04 |
| Lamp filament design App 20050094989 - Halpin, Michael W. | 2005-05-05 |
| Bonded structures for use in semiconductor processing environments App 20050088003 - Halpin, Michael W. | 2005-04-28 |
| Compact process chamber for improved process uniformity Grant 6,869,485 - Halpin March 22, 2 | 2005-03-22 |
| Lamp filament design Grant 6,856,078 - Halpin February 15, 2 | 2005-02-15 |
| Wafer support system App 20040198153 - Halpin, Michael W. ; et al. | 2004-10-07 |
| Filament support for lamp Grant 6,781,291 - Halpin August 24, 2 | 2004-08-24 |
| Wafer support system Grant 6,692,576 - Halpin , et al. February 17, 2 | 2004-02-17 |
| Delicate product packaging system App 20030209463 - Halpin, Michael W. | 2003-11-13 |
| Process chamber with rectangular temperature compensation ring Grant 6,608,287 - Halpin , et al. August 19, 2 | 2003-08-19 |
| Lamp design App 20030102792 - Halpin, Michael W. | 2003-06-05 |
| Wafer support system App 20030075274 - Halpin, Michael W. ; et al. | 2003-04-24 |
| Lamp design App 20030001475 - Halpin, Michael W. | 2003-01-02 |
| Compact process chamber for improved process uniformity App 20020185062 - Halpin, Michael W. | 2002-12-12 |
| Wafer support system Grant 6,491,757 - Halpin , et al. December 10, 2 | 2002-12-10 |
| Process chamber with rectangular temperature compensation ring App 20020179586 - Wengert, John F. ; et al. | 2002-12-05 |
| Process chamber with downstream getter plate Grant 6,464,792 - Wengert , et al. October 15, 2 | 2002-10-15 |
| Heat lamps for zone heating Grant 6,465,761 - Stevens , et al. October 15, 2 | 2002-10-15 |
| Method and apparatus for controlling hydraulic dampers Grant 6,360,148 - Halpin March 19, 2 | 2002-03-19 |
| Barrier coating for vitreous materials App 20020011211 - Halpin, Michael W. | 2002-01-31 |
| Wafer support system Grant 6,343,183 - Halpin , et al. January 29, 2 | 2002-01-29 |
| Heat lamps for zone heating App 20020007797 - Stevens, Ronald R. ; et al. | 2002-01-24 |
| Wafer support system App 20010054390 - Halpin, Michael W. ; et al. | 2001-12-27 |
| Reflective surface for CVD reactor walls Grant 6,319,556 - Olsen , et al. November 20, 2 | 2001-11-20 |
| Wafer support system Grant 6,203,622 - Halpin , et al. March 20, 2 | 2001-03-20 |
| Compact process chamber for improved process uniformity Grant 6,143,079 - Halpin November 7, 2 | 2000-11-07 |
| Wafer support system Grant 6,113,702 - Halpin , et al. September 5, 2 | 2000-09-05 |
| Process chamber with inner support Grant 6,093,252 - Wengert , et al. July 25, 2 | 2000-07-25 |
| Wafer support system Grant 6,053,982 - Halpin , et al. April 25, 2 | 2000-04-25 |
| Reflective surface for CVD reactor walls Grant 6,021,152 - Olsen , et al. February 1, 2 | 2000-02-01 |
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