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Patent applications and USPTO patent grants for Halon; Bernard.The latest application filed is for "anisotropic etching of aluminum".
Patent | Date |
---|---|
Anisotropic etching of aluminum Grant 4,547,261 - Maa , et al. October 15, 1 | 1985-10-15 |
Plasma etching of aluminum Grant 4,375,385 - Halon March 1, 1 | 1983-03-01 |
Plasma etching of aluminum Grant 4,372,807 - Vossen, Jr. , et al. February 8, 1 | 1983-02-08 |
Removal of plasma etching residues Grant 4,370,195 - Halon , et al. January 25, 1 | 1983-01-25 |
Method for making adherent pinhole free aluminum films on pyroelectric and/or piezoelectric substrates Grant 4,214,018 - Halon , et al. July 22, 1 | 1980-07-22 |
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