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Patent applications and USPTO patent grants for Haller; Uwe P..The latest application filed is for "multi-zone heater control for wafer processing equipment".
Patent | Date |
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Multi-zone Heater Control For Wafer Processing Equipment App 20220248500 - Haller; Uwe P. ;   et al. | 2022-08-04 |
Virtual sensor for spatially resolved wafer temperature control Grant 11,024,522 - Mungekar , et al. June 1, 2 | 2021-06-01 |
Virtual Sensor For Spatially Resolved Wafer Temperature Control App 20190362991 - MUNGEKAR; Hemant ;   et al. | 2019-11-28 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System App 20160049323 - YE; Zheng John ;   et al. | 2016-02-18 |
Method And Apparatus For Controlling Laminator Temperature On A Solar Cell App 20090188603 - Haller; Uwe P. ;   et al. | 2009-07-30 |
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