Hakey; Mark Charles

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hakey; Mark Charles.The latest application filed is for "method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers".

Company Profile

1.58.67

Hakey; Mark Charles - Fairfax VT
Hakey, Mark Charles - Milton VT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of cleaving a single crystal substrate parallel to its active planar surface and method of using the cleaved daughter substrate Grant 10,589,445 - Furukawa , et al.	2020-03-17
Metal-oxide-semiconductor device structures with tailored dopant depth profiles Grant 7,994,575 - Furukawa , et al. August 9, 2	2011-08-09
Method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,989,222 - Furukawa , et al. August 2, 2	2011-08-02
Semiconductor transistors with contact holes close to gates Grant 7,985,643 - Furukawa , et al. July 26, 2	2011-07-26
Methods for fabricating a metal-oxide-semiconductor device structure Grant 7,951,660 - Furukawa , et al. May 31, 2	2011-05-31
Phase change memory cell with vertical transistor Grant 7,932,167 - Furukawa , et al. April 26, 2	2011-04-26
Layer patterning using double exposure processes in a single photoresist layer Grant 7,923,202 - Furukawa , et al. April 12, 2	2011-04-12
Passive electrically testable acceleration and voltage measurement devices Grant 7,898,045 - Furukawa , et al. March 1, 2	2011-03-01
Methods and structures for promoting stable synthesis of carbon nanotubes Grant 7,851,064 - Furukawa , et al. December 14, 2	2010-12-14
Vertical carbon nanotube field effect transistors and arrays Grant 7,829,883 - Furukawa , et al. November 9, 2	2010-11-09
Layout and process to contact sub-lithographic structures Grant 7,825,525 - Furukawa , et al. November 2, 2	2010-11-02
Method of Making Integrated Circuit Chip Utilizing Oriented Carbon Nanotube Conductive Layers App 20100273298 - Furukawa; Toshiharu ; et al.	2010-10-28
Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby Grant 7,820,502 - Furukawa , et al. October 26, 2	2010-10-26
Integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,786,583 - Furukawa , et al. August 31, 2	2010-08-31
Design structure incorporating a hybrid substrate Grant 7,750,406 - Cannon , et al. July 6, 2	2010-07-06
Well isolation trenches (WIT) for CMOS devices Grant 7,737,504 - Furukawa , et al. June 15, 2	2010-06-15
Sidewall image transfer processes for forming multiple line-widths Grant 7,699,996 - Furukawa , et al. April 20, 2	2010-04-20
Vertical nanotube semiconductor device structures and methods of forming the same Grant 7,691,720 - Furukawa , et al. April 6, 2	2010-04-06
Method of forming a dual gated FinFET gain cell Grant 7,674,674 - Furukawa , et al. March 9, 2	2010-03-09
Non-volatile switching and memory devices using vertical nanotubes Grant 7,668,004 - Furukawa , et al. February 23, 2	2010-02-23
Hybrid substrates and methods for forming such hybrid substrates Grant 7,651,902 - Cannon , et al. January 26, 2	2010-01-26
Passive electrically testable acceleration and voltage measurement devices Grant 7,629,192 - Furukawa , et al. December 8, 2	2009-12-08
Micro-electro-mechanical valves and pumps and methods of fabricating same Grant 7,607,455 - Furukawa , et al. October 27, 2	2009-10-27
Methods of forming low-k dielectric layers containing carbon nanostructures Grant 7,579,272 - Furukawa , et al. August 25, 2	2009-08-25
Method of forming a dual gated FinFET gain cell Grant 7,566,613 - Furukawa , et al. July 28, 2	2009-07-28
Methods for forming a wrap-around gate field effect transistor Grant 7,560,347 - Furukawa , et al. July 14, 2	2009-07-14
Shallow trench isolation fill by liquid phase deposition of SiO.sub.2 Grant 7,525,156 - Hakey , et al. April 28, 2	2009-04-28
Micro-electro-mechanical valves and pumps Grant 7,505,110 - Furukawa , et al. March 17, 2	2009-03-17
Electric fuses using CNTs (carbon nanotubes) Grant 7,492,046 - Furukawa , et al. February 17, 2	2009-02-17
Layer Patterning Using Double Exposure Processes In A Single Photoresist Layer App 20090035708 - Furukawa; Toshiharu ; et al.	2009-02-05
Memory devices using carbon nanotube (CNT) technologies Grant 7,483,285 - Furukawa , et al. January 27, 2	2009-01-27
Method for making integrated circuit chip having carbon nanotube composite interconnection vias Grant 7,473,633 - Furukawa , et al. January 6, 2	2009-01-06
Phase Change Memory Cell with Vertical Transistor App 20090001337 - Furukawa; Toshiharu ; et al.	2009-01-01
Passive Electrically Testable Acceleration And Voltage Measurement Devices App 20080258246 - Furukawa; Toshiharu ; et al.	2008-10-23
Dual Gated Finfet Gain Cell App 20080261363 - Furukawa; Toshiharu ; et al.	2008-10-23
Hybrid Substrates and Methods for Forming Such Hybrid Substrates App 20080258181 - Cannon; Ethan Harrison ; et al.	2008-10-23
Design Structure Incorporating a Hybrid Substrate App 20080258222 - Cannon; Ethan Harrison ; et al.	2008-10-23
Method for making integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,439,081 - Furukawa , et al. October 21, 2	2008-10-21
Methods for forming a wrap-around gate field effect transistor Grant 7,435,653 - Furukawa , et al. October 14, 2	2008-10-14
Micro-electro-mechanical Valves And Pumps And Methods Of Fabricating Same App 20080245984 - Furukawa; Toshiharu ; et al.	2008-10-09
Methods For Fabricating Semiconductor Device Structures With Reduced Susceptibility To Latch-up And Semiconductor Device Structures Formed By The Methods App 20080242016 - Cannon; Ethan Harrison ; et al.	2008-10-02
Vertical Nanotube Semiconductor Device Structures And Methods Of Forming The Same App 20080227264 - Furukawa; Toshiharu ; et al.	2008-09-18
Sidewall Image Transfer Processes For Forming Multiple Line-widths App 20080206996 - Furukawa; Toshiharu ; et al.	2008-08-28
Wrap-around Gate Field Effect Transistor App 20080206937 - Furukawa; Toshiharu ; et al.	2008-08-28
Methods For Fabricating Semiconductor Device Structures With Reduced Susceptibility To Latch-up And Semiconductor Device Structures Formed By The Methods App 20080203492 - Cannon; Ethan Harrison ; et al.	2008-08-28
SHALLOW TRENCH ISOLATION FILL BY LIQUID PHASE DEPOSITION OF SiO2 App 20080197448 - Hakey; Mark Charles ; et al.	2008-08-21
Semiconductor Transistors With Contact Holes Close To Gates App 20080166863 - Furukawa; Toshiharu ; et al.	2008-07-10
Methods And Structures For Promoting Stable Synthesis Of Carbon Nanotubes App 20080160312 - Furukawa; Toshiharu ; et al.	2008-07-03
Layout And Process To Contact Sub-lithographic Structures App 20080142995 - Furukawa; Toshiharu ; et al.	2008-06-19
Non-volatile Switching And Memory Devices Using Vertical Nanotubes App 20080137397 - Furukawa; Toshiharu ; et al.	2008-06-12
Memory devices using carbon nanotube (CNT) technologies Grant 7,385,839 - Furukawa , et al. June 10, 2	2008-06-10
Memory Devices Using Carbon Nanotube (cnt) Technologies App 20080117671 - Furukawa; Toshiharu ; et al.	2008-05-22
Methods and structures for promoting stable synthesis of carbon nanotubes Grant 7,374,793 - Furukawa , et al. May 20, 2	2008-05-20
Methods for forming uniform lithographic features Grant 7,351,648 - Furukawa , et al. April 1, 2	2008-04-01
Layout and process to contact sub-lithographic structures Grant 7,351,666 - Furukawa , et al. April 1, 2	2008-04-01
Methods Of Fabricating Vertical Carbon Nanotube Field Effect Transistors For Arrangement In Arrays And Field Effect Transistors And Arrays Formed Thereby App 20080044954 - Furukawa; Toshiharu ; et al.	2008-02-21
Integrated Circuit Chip Utilizing Oriented Carbon Nanotube Conductive Layers App 20080042287 - Furukawa; Toshiharu ; et al.	2008-02-21
Design Structures Incorporating Shallow Trench Isolation Filled by Liquid Phase Deposition of SiO2 App 20080040696 - Hakey; Mark Charles ; et al.	2008-02-14
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage Grant 7,329,567 - Furukawa , et al. February 12, 2	2008-02-12
ELECTRIC FUSES USING CNTs (CARBON NANOTUBES) App 20070262450 - Furukawa; Toshiharu ; et al.	2007-11-15
Well Isolation Trenches (wit) For Cmos Devices App 20070241408 - Furukawa; Toshiharu ; et al.	2007-10-18
Method of forming fet with T-shaped gate Grant 7,282,423 - Furukawa , et al. October 16, 2	2007-10-16
SHALLOW TRENCH ISOLATION FILL BY LIQUID PHASE DEPOSITION OF SiO2 App 20070228510 - Hakey; Mark Charles ; et al.	2007-10-04
Shallow trench isolation fill by liquid phase deposition of SiO2 Grant 7,273,794 - Hakey , et al. September 25, 2	2007-09-25
Micro-electro-mechanical Valves And Pumps And Methods Of Fabricating Same App 20070215224 - Furukawa; Toshiharu ; et al.	2007-09-20
Layout and process to contact sub-lithographic structures App 20070215874 - Furukawa; Toshiharu ; et al.	2007-09-20
Wafer cell for immersion lithography Grant 7,271,878 - Furukawa , et al. September 18, 2	2007-09-18
Wrap-around gate field effect transistor Grant 7,271,444 - Furukawa , et al. September 18, 2	2007-09-18
Well isolation trenches (WIT) for CMOS devices Grant 7,268,028 - Furukawa , et al. September 11, 2	2007-09-11
Methods of forming alternating phase shift masks having improved phase-shift tolerance Grant 7,264,415 - Furukawa , et al. September 4, 2	2007-09-04
Methods for fabricating semiconductor device structures with reduced susceptibility to latch-up and semiconductor device structures formed by the methods App 20070194403 - Cannon; Ethan Harrison ; et al.	2007-08-23
Integrated Circuit Chip Utilizing Dielectric Layer Having Oriented Cylindrical Voids Formed from Carbon Nanotubes App 20070184647 - Furukawa; Toshiharu ; et al.	2007-08-09
Wrap-around Gate Field Effect Transistor App 20070184588 - Furukawa; Toshiharu ; et al.	2007-08-09
Methods for forming uniform lithographic features App 20070166981 - Furukawa; Toshiharu ; et al.	2007-07-19
Memory Devices Using Carbon Nanotube (cnt) Technologies App 20070133266 - Furukawa; Toshiharu ; et al.	2007-06-14
Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes Grant 7,229,909 - Furukawa , et al. June 12, 2	2007-06-12
Methods Of Forming Low-k Dielectric Layers Containing Carbon Nanostructures App 20070123028 - Furukawa; Toshiharu ; et al.	2007-05-31
Semiconductor Transistors With Contact Holes Close To Gates App 20070102766 - Furukawa; Toshiharu ; et al.	2007-05-10
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage Grant 7,211,844 - Furukawa , et al. May 1, 2	2007-05-01
Passive Electrically Testable Acceleration And Voltage Measurement Devices App 20070085156 - Furukawa; Toshiharu ; et al.	2007-04-19
Sidewall Image Transfer (sit) Technologies App 20070066009 - Furukawa; Toshiharu ; et al.	2007-03-22
Integrated Circuit Chip Utilizing Oriented Carbon Nanotube Conductive Layers App 20070048879 - Furukawa; Toshiharu ; et al.	2007-03-01
Non-volatile Switching And Memory Devices Using Vertical Nanotubes App 20070025138 - Furukawa; Toshiharu ; et al.	2007-02-01
Method For Making Integrated Circuit Chip Having Carbon Nanotube Composite Interconnection Vias App 20060292861 - Furukawa; Toshiharu ; et al.	2006-12-28
Integrated circuit chip utilizing carbon nanotube composite interconnection vias Grant 7,135,773 - Furukawa , et al. November 14, 2	2006-11-14
Integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,129,097 - Furukawa , et al. October 31, 2	2006-10-31
Method For Fabricating Oxygen-implanted Silicon On Insulation Type Semiconductor And Semiconductor Formed Therefrom App 20060226480 - Furukawa; Toshiharu ; et al.	2006-10-12
Horizontal memory gain cells Grant 7,109,546 - Furukawa , et al. September 19, 2	2006-09-19
Strained semiconductor device structures Grant 7,102,201 - Furukawa , et al. September 5, 2	2006-09-05
Moving lens for immersion optical lithography Grant 7,088,422 - Hakey , et al. August 8, 2	2006-08-08
Process For Oxide Cap Formation In Semiconductor Manufacturing App 20060166432 - Holmes; Steven John ; et al.	2006-07-27
Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes App 20060128137 - Furukawa; Toshiharu ; et al.	2006-06-15
Selective synthesis of semiconducting carbon nanotubes Grant 7,038,299 - Furukawa , et al. May 2, 2	2006-05-02
System and apparatus for photolithography Grant 7,027,125 - Hakey , et al. April 11, 2	2006-04-11
Low-k Dielectric Material Based Upon Carbon Nanotubes And Methods Of Forming Such Low-k Dielectric Materials App 20060073682 - Furukawa; Toshiharu ; et al.	2006-04-06
Integrated circuit chip utilizing oriented carbon nanotube conductive layers App 20060022221 - Furukawa; Toshiharu ; et al.	2006-02-02
Method of forming FinFET gates without long etches Grant 6,989,308 - Furukawa , et al. January 24, 2	2006-01-24
Method for fabricating strained semiconductor structures and strained semiconductor structures formed thereby App 20060011990 - Furukawa; Toshiharu ; et al.	2006-01-19
Dual gated finfet gain cell App 20060008927 - Furukawa; Toshiharu ; et al.	2006-01-12
Horizontal memory gain cells App 20050286293 - Furukawa, Toshiharu ; et al.	2005-12-29
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage App 20050266627 - Furukawa, Toshiharu ; et al.	2005-12-01
Dual gated finfet gain cell Grant 6,970,372 - Furukawa , et al. November 29, 2	2005-11-29
Methods for fabricating a metal-oxide-semiconductor device structure and metal-oxide-semiconductor device structures formed thereby App 20050242378 - Furukawa, Toshiharu ; et al.	2005-11-03
Wafer cell for immersion lithography App 20050237501 - Furukawa, Toshiharu ; et al.	2005-10-27
System and apparatus for photolithography App 20050213061 - Hakey, Mark Charles ; et al.	2005-09-29
Methods of forming alternating phase shift masks having improved phase-shift tolerance App 20050202322 - Furukawa, Toshiharu ; et al.	2005-09-15
Method of forming FinFET gates without long etches App 20050202607 - Furukawa, Toshiharu ; et al.	2005-09-15
Integrated circuit chip utilizing carbon nanotube composite interconnection vias App 20050189655 - Furukawa, Toshiharu ; et al.	2005-09-01
Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby App 20050179029 - Furukawa, Toshiharu ; et al.	2005-08-18
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage App 20050167740 - Furukawa, Toshiharu ; et al.	2005-08-04
Vertical nanotube semiconductor device structures and methods of forming the same App 20050167655 - Furukawa, Toshiharu ; et al.	2005-08-04
Moving lens for immersion optical lithography App 20050145803 - Hakey, Mark Charles ; et al.	2005-07-07
Shallow trench isolation fill by liquid phase deposition of SiO2 App 20050130387 - Hakey, Mark Charles ; et al.	2005-06-16
Wrap-around gate field effect transistor App 20050127466 - Furukawa, Toshiharu ; et al.	2005-06-16
Methods and structures for promoting stable synthesis of carbon nanotubes App 20050129948 - Furukawa, Toshiharu ; et al.	2005-06-16
Selective synthesis of semiconducting carbon nanotubes App 20050130341 - Furukawa, Toshiharu ; et al.	2005-06-16
Method of forming fet with T-shaped gate App 20050104139 - Furukawa, Toshiharu ; et al.	2005-05-19
Methods for fabricating a metal-oxide-semiconductor device structure and metal-oxide-semiconductor device structures formed thereby App 20050098804 - Furukawa, Toshiharu ; et al.	2005-05-12
FET with T-shaped gate Grant 6,891,235 - Furukawa , et al. May 10, 2	2005-05-10
Method for forming quadruple density sidewall image transfer (SIT) structures Grant 6,875,703 - Furukawa , et al. April 5, 2	2005-04-05
Gate oxide stabilization by means of germanium components in gate conductor Grant 6,797,641 - Holmes , et al. September 28, 2	2004-09-28
Pre-loaded plasma reactor apparatus and application thereof App 20040129385 - Wise, Richard ; et al.	2004-07-08
Gate oxide stabilization by means of germanium components in gate conductor App 20020125503 - Holmes, Steven J. ; et al.	2002-09-12
Method of fabricating trench for soi merged logic dram App 20010001719 - Hakey, Mark Charles ; et al.	2001-05-24
Trench storage dram cell including a step transfer device Grant 5,831,301 - Horak , et al. November 3, 1	1998-11-03

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