Hainz; Joachim

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hainz; Joachim.The latest application filed is for "illumination system particularly for microlithography".

Company Profile

0.11.16

Hainz; Joachim - Aalen DE
Hainz; Joachim - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination system for microlithography Grant 7,911,584 - Singer , et al. March 22, 2	2011-03-22
Illumination System Particularly For Microlithography App 20090015812 - Schultz; Joerg ; et al.	2009-01-15
Collector configured of mirror shells Grant 7,460,212 - Singer , et al. December 2, 2	2008-12-02
Illumination system particularly for microlithography Grant 7,443,948 - Schultz , et al. October 28, 2	2008-10-28
COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR EQUAL TO 193 nm App 20080225387 - Hainz; Joachim ; et al.	2008-09-18
Illumination system particularly for microlithography Grant 7,405,809 - Hainz , et al. July 29, 2	2008-07-29
Double-facetted Illumination System With Attenuator Elements On The Pupil Facet Mirror App 20080165925 - Singer; Wolfgang ; et al.	2008-07-10
Optical system having an optical element that can be brought into at least two positions Grant 7,362,414 - Singer , et al. April 22, 2	2008-04-22
Collector with fastening devices for fastening mirror shells App 20080042079 - Singer; Wolfgang ; et al.	2008-02-21
Collector with fastening devices for fastening mirror shells Grant 7,321,126 - Singer , et al. January 22, 2	2008-01-22
Collector configured of mirror shells App 20080013680 - Singer; Wolfgang ; et al.	2008-01-17
EUV-lithography apparatus having a chamber for cleaning an optical element App 20070283591 - Singer; Wolfgang ; et al.	2007-12-13
Collector having unused region for illumination systems using a wavelength .ltoreq.193 nm Grant 7,244,954 - Singer , et al. July 17, 2	2007-07-17
Illumination system for microlithography App 20070058274 - Singer; Wolfgang ; et al.	2007-03-15
Illumination system with field mirrors for producing uniform scanning energy App 20070030948 - Singer; Wolfgang ; et al.	2007-02-08
Collector with fastening devices for fastening mirror shells App 20060291062 - Singer; Wolfgang ; et al.	2006-12-28
Illumination system particularly for microlithography App 20060245540 - Schultz; Jorg ; et al.	2006-11-02
Illumination system with field mirrors for producing uniform scanning energy Grant 7,126,137 - Singer , et al. October 24, 2	2006-10-24
Illumination system particularly for microlithography App 20060208206 - Hainz; Joachim ; et al.	2006-09-21
Collector with fastening devices for fastening mirror shells Grant 7,091,505 - Singer , et al. August 15, 2	2006-08-15
Collector having unused region for illumination systems using a wavelength <193 nm App 20060097202 - Singer; Wolfgang ; et al.	2006-05-11
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm Grant 7,015,489 - Singer , et al. March 21, 2	2006-03-21
Illumination system particularly for microlithography Grant 7,006,595 - Singer , et al. February 28, 2	2006-02-28
Optical system having an optical element that can be brought into at least two positions App 20060001854 - Singer; Wolfgang ; et al.	2006-01-05
Collector with fastening devices for fastening mirror shells App 20040227103 - Singer, Wolfgang ; et al.	2004-11-18
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm App 20040065817 - Singer, Wolfgang ; et al.	2004-04-08
Illumination system particularly for microlithography App 20030086524 - Schultz, Jorg ; et al.	2003-05-08

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