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Patent applications and USPTO patent grants for Haginiwa; Kuniyasu.The latest application filed is for "lithography apparatus, and article manufacturing method".
Patent | Date |
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Lithography Apparatus, And Article Manufacturing Method App 20170025292 - Kotoku; Masashi ;   et al. | 2017-01-26 |
Lithography Apparatus, And Method Of Manufacturing Article App 20150364298 - Kotoku; Masashi ;   et al. | 2015-12-17 |
Drawing apparatus, and method of manufacturing article Grant 8,779,396 - Kotoku , et al. July 15, 2 | 2014-07-15 |
Drawing Apparatus, And Method Of Manufacturing Article App 20130164692 - KOTOKU; Masashi ;   et al. | 2013-06-27 |
Alignment method and parameter selection method Grant 7,312,873 - Haginiwa December 25, 2 | 2007-12-25 |
Alignment method and parameter selection method Grant 6,973,397 - Haginiwa December 6, 2 | 2005-12-06 |
Alignment method and parameter selection method App 20050264814 - Haginiwa, Kuniyasu | 2005-12-01 |
Alignment method and parameter selection method App 20030130812 - Haginiwa, Kuniyasu | 2003-07-10 |
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