Hagen; Robert B.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hagen; Robert B..The latest application filed is for "merie plasma reactor with overhead rf electrode tuned to the plasma with arcing suppression".

Company Profile

0.8.8

Hagen; Robert B. - Newark CA
Hagen; Robert B. - late of Newark CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Grant 7,186,943 - Hoffman , et al. March 6, 2	2007-03-06
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Grant 7,132,618 - Hoffman , et al. November 7, 2	2006-11-07
Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Grant 7,030,335 - Hoffman , et al. April 18, 2	2006-04-18
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression App 20050236377 - Hoffman, Daniel J. ; et al.	2005-10-27
Capacitively coupled plasma reactor with uniform radial distribution of plasma Grant 6,900,596 - Yang , et al. May 31, 2	2005-05-31
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Grant 6,894,245 - Hoffman , et al. May 17, 2	2005-05-17
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression App 20040211759 - Hoffman, Daniel J. ; et al.	2004-10-28
Capacitively coupled plasma reactor with uniform radial distribution of plasma App 20040056602 - Yang, Jang Gyoo ; et al.	2004-03-25
Gas distribution plate electrode for a plasma receptor Grant 6,677,712 - Katz , et al. January 13, 2	2004-01-13
Plasma reactor with spoke antenna having a VHF mode with the spokes in phase Grant 6,667,577 - Shannon , et al. December 23, 2	2003-12-23
Gas Distribution Plate Electrode For A Plasma Reactor App 20030201723 - Katz, Dan ; et al.	2003-10-30
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression App 20030136766 - Hoffman, Daniel J. ; et al.	2003-07-24
Gas distribution plate electrode for a plasma reactor Grant 6,586,886 - Katz , et al. July 1, 2	2003-07-01
Plasma reactor with spoke antenna having a VHF mode with the spokes in phase App 20030111962 - Shannon, Steven ; et al.	2003-06-19
Gas Distribution Plate Electrode For A Plasma Reactor App 20030111961 - Katz, Dan ; et al.	2003-06-19
Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression App 20020108933 - Hoffman, Daniel J. ; et al.	2002-08-15

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