loadpatents
Patent applications and USPTO patent grants for Hagelin; Paul Merritt.The latest application filed is for "temperature stable mems resonator".
Patent | Date |
---|---|
Method of manufacturing a microelectromechanical system (MEMS) resonator Grant 8,667,665 - Hagelin , et al. March 11, 2 | 2014-03-11 |
Temperature Stable MEMS Resonator App 20120295384 - Hagelin; Paul Merritt ;   et al. | 2012-11-22 |
Method for fabricating a microelectromechanical system (MEMS) resonator Grant 8,234,774 - Hagelin , et al. August 7, 2 | 2012-08-07 |
Temperature Stable MEMS Resonator App 20090158566 - Hagelin; Paul Merritt ;   et al. | 2009-06-25 |
Temperature Stable MEMS Resonator App 20090160581 - Hagelin; Paul Merritt ;   et al. | 2009-06-25 |
Serrated MEMS resonators Grant 7,545,237 - Hagelin , et al. June 9, 2 | 2009-06-09 |
Serrated MEMS resonators Grant 7,545,238 - Hagelin , et al. June 9, 2 | 2009-06-09 |
Serrated MEMS resonators Grant 7,545,239 - Hagelin , et al. June 9, 2 | 2009-06-09 |
Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same App 20080290494 - Lutz; Markus ;   et al. | 2008-11-27 |
Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same Grant 7,443,258 - Hagelin October 28, 2 | 2008-10-28 |
Serrated Mems Resonators App 20080150654 - Hagelin; Paul Merritt ;   et al. | 2008-06-26 |
Serrated MEMS Resonators App 20080150390 - Hagelin; Paul Merritt ;   et al. | 2008-06-26 |
Serrated Mems Resonators App 20080150656 - Hagelin; Paul Merritt ;   et al. | 2008-06-26 |
Serrated Mems Resonators App 20080150655 - Hagelin; Paul Merritt ;   et al. | 2008-06-26 |
Substrate contact for a MEMS device App 20080119002 - Grosjean; Charles ;   et al. | 2008-05-22 |
Substrate contact for a MEMS device App 20080116534 - Grosjean; Charles ;   et al. | 2008-05-22 |
Substrate contact for a MEMS device App 20080119003 - Grosjean; Charles ;   et al. | 2008-05-22 |
Substrate Contact For A Mems Device App 20080119001 - Grosjean; Charles ;   et al. | 2008-05-22 |
Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same Grant 7,369,003 - Hagelin May 6, 2 | 2008-05-06 |
Microelectromechanical oscillator and method of operating same Grant 7,369,004 - Partridge , et al. May 6, 2 | 2008-05-06 |
Microelectromechanical Oscillator and method of operating same App 20070290764 - Partridge; Aaron ;   et al. | 2007-12-20 |
Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same App 20070247245 - Hagelin; Paul Merritt | 2007-10-25 |
Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same App 20070247246 - Hagelin; Paul Merritt | 2007-10-25 |
Micromirror with rib reinforcement App 20050162765 - Hagelin, Paul Merritt ;   et al. | 2005-07-28 |
Optical mirror system with multi-axis rotational control Grant 6,598,985 - Hagelin , et al. July 29, 2 | 2003-07-29 |
Fiber optic cross connect with folding of light beams Grant 6,556,740 - Hagelin , et al. April 29, 2 | 2003-04-29 |
Optical mirror system with multi-axis rotational control App 20020186483 - Hagelin, Paul Merritt ;   et al. | 2002-12-12 |
Optical mirror system with multi-axis rotational control App 20010030817 - Hagelin, Paul Merritt ;   et al. | 2001-10-18 |
Optical mirror system with multi-axis rotational control Grant 6,283,601 - Hagelin , et al. September 4, 2 | 2001-09-04 |
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