Patent | Date |
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Polishing liquid for metal and polishing method Grant 10,037,894 - Ichige , et al. July 31, 2 | 2018-07-31 |
Polishing Liquid For Metal And Polishing Method App 20140370707 - Ichige; Yasuhiro ;   et al. | 2014-12-18 |
CMP polishing slurry and method of polishing substrate Grant 8,900,335 - Fukasawa , et al. December 2, 2 | 2014-12-02 |
Polishing solution for metal films and polishing method using the same Grant 8,734,204 - Haga , et al. May 27, 2 | 2014-05-27 |
Polishing Liquid For Metal Film And Polishing Method App 20130217229 - Haga; Kouji ;   et al. | 2013-08-22 |
Polishing liquid for metal film and polishing method Grant 8,501,625 - Haga , et al. August 6, 2 | 2013-08-06 |
Polishing slurry for chemical mechanical polishing and method for polishing substrate Grant 8,231,735 - Haga , et al. July 31, 2 | 2012-07-31 |
CMP polishing slurry and polishing method Grant 8,168,541 - Fukasawa , et al. May 1, 2 | 2012-05-01 |
CMP abrasive, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive Grant 8,002,860 - Koyama , et al. August 23, 2 | 2011-08-23 |
Polishing Solution For Metal Films And Polishing Method Using The Same App 20110104992 - Haga; Kouji ;   et al. | 2011-05-05 |
Cmp Polishing Slurry And Polishing Method App 20110028073 - Fukasawa; Masato ;   et al. | 2011-02-03 |
Polishing Liquid For Metal Film And Polishing Method App 20100323584 - Haga; Kouji ;   et al. | 2010-12-23 |
CMP polishing slurry and polishing method Grant 7,837,800 - Fukasawa , et al. November 23, 2 | 2010-11-23 |
CMP polishing compound and polishing method Grant 7,838,482 - Fukasawa , et al. November 23, 2 | 2010-11-23 |
Cmp Polishing Slurry And Method Of Polishing Substrate App 20100210109 - Fukasawa; Masato ;   et al. | 2010-08-19 |
Cmp Abrasive, Method For Polishing Substrate And Method For Manufacturing Semiconductor Device Using The Same, And Additive For Cmp Abrasive App 20090253355 - Koyama; Naoyuki ;   et al. | 2009-10-08 |
Cmp Polishing Slurry and Method of Polishing Substrate App 20080254717 - Fukasawa; Masato ;   et al. | 2008-10-16 |
CMP polishing slurry and polishing method App 20080214093 - Fukasawa; Masato ;   et al. | 2008-09-04 |
Abrasive compound for CMP, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive compound Grant 7,410,409 - Koyama , et al. August 12, 2 | 2008-08-12 |
Polishing slurry for chemical mechanical polishing and method for polishing substrate App 20080176982 - Haga; Kouji ;   et al. | 2008-07-24 |
Cmp Polishing Slurry and Method of Polishing Substrate App 20080003925 - Fukasawa; Masato ;   et al. | 2008-01-03 |
Polishing slurry for chemical mechanical polishing and method for polishing substrate Grant 7,311,855 - Haga , et al. December 25, 2 | 2007-12-25 |
CMP abrasive, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive App 20070169421 - Koyama; Naoyuki ;   et al. | 2007-07-26 |
Cmp polishing compound and polishing method App 20060148667 - Fukasawa; Masato ;   et al. | 2006-07-06 |
Polishing slurry for chemical mechanical polishing and method for polishing substrate App 20060124591 - Haga; Kouji ;   et al. | 2006-06-15 |