Haga; Hirofumi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Haga; Hirofumi.The latest application filed is for "plasma processing apparatus and plasma processing method".
- Haga; Hirofumi - Miyagi JP
| Patent | Date |
|---|---|
| Plasma processing apparatus and plasma processing method Grant 10,861,675 - Funakubo , et al. December 8, 2 | 2020-12-08 |
| Plasma Processing Apparatus And Plasma Processing Method App 20190139744 - FUNAKUBO; Takao ; et al. | 2019-05-09 |
| Plasma processing apparatus Grant 10,276,405 - Miyata , et al. | 2019-04-30 |
| Plasma processing apparatus and plasma processing method Grant 10,204,763 - Funakubo , et al. Feb | 2019-02-12 |
| Evacuation method and vacuum processing apparatus Grant 9,984,907 - Haga , et al. May 29, 2 | 2018-05-29 |
| Evacuation Method And Vacuum Processing Apparatus App 20160189988 - HAGA; Hirofumi ; et al. | 2016-06-30 |
| Plasma Processing Apparatus App 20160172217 - MIYATA; Akinori ; et al. | 2016-06-16 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150380282 - FUNAKUBO; Takao ; et al. | 2015-12-31 |
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