Patent | Date |
---|
Control Device For Ac Rotary Machine And Control Method For Ac Rotary Machine App 20220173678 - HACHIYA; Yosuke ;   et al. | 2022-06-02 |
Synchronous rotating machine control device and machine learning device Grant 11,081,985 - Hachiya August 3, 2 | 2021-08-03 |
Synchronous Rotating Machine Control Device And Machine Learning Device App 20210058017 - HACHIYA; Yosuke | 2021-02-25 |
Substrate Processing Apparatus And Substrate Processing Method App 20200203189 - Hachiya; Yosuke ;   et al. | 2020-06-25 |
Control device for AC rotating machine Grant 10,411,633 - Hachiya , et al. Sept | 2019-09-10 |
Control device for AC rotary machine and magnetic-pole-position correction amount calculation method Grant 10,348,230 - Hachiya , et al. July 9, 2 | 2019-07-09 |
Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof Grant 9,922,849 - Ido , et al. March 20, 2 | 2018-03-20 |
Liquid treatment apparatus Grant 9,768,010 - Ito , et al. September 19, 2 | 2017-09-19 |
Control Device For Ac Rotary Machine And Magnetic-pole-position Correction Amount Calculation Method App 20170201200 - HACHIYA; Yosuke ;   et al. | 2017-07-13 |
Liquid process apparatus and liquid process method Grant 9,691,602 - Ito , et al. June 27, 2 | 2017-06-27 |
Control Device For Ac Rotating Machine App 20170104431 - HACHIYA; Yosuke ;   et al. | 2017-04-13 |
Control device for alternating current rotary machine Grant 9,553,532 - Ito , et al. January 24, 2 | 2017-01-24 |
Substrate processing apparatus and substrate processing method Grant 9,378,940 - Kawano , et al. June 28, 2 | 2016-06-28 |
Control device for rotary machine and inductance measurement method for rotary machine Grant 9,231,510 - Hachiya , et al. January 5, 2 | 2016-01-05 |
Control device of AC rotating machine Grant 9,231,511 - Hachiya , et al. January 5, 2 | 2016-01-05 |
Liquid processing method Grant 9,224,624 - Inada , et al. December 29, 2 | 2015-12-29 |
Liquid arm cleaning unit for substrate processing apparatus Grant 9,190,311 - Higashijima , et al. November 17, 2 | 2015-11-17 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20150318183 - Ido; Yasuyuki ;   et al. | 2015-11-05 |
Liquid process apparatus and liquid process method Grant 9,177,838 - Ito , et al. November 3, 2 | 2015-11-03 |
Liquid Processing Method App 20150107631 - Inada; Takao ;   et al. | 2015-04-23 |
Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program Grant 8,951,359 - Inada , et al. February 10, 2 | 2015-02-10 |
Liquid Processing Method, Liquid Processing Apparatus And Storage Medium App 20140377463 - Hachiya; Yosuke ;   et al. | 2014-12-25 |
Control Device For Alternating Current Rotary Machine App 20140368135 - Ito; Masato ;   et al. | 2014-12-18 |
Control Device Of Ac Rotating Machine App 20140340018 - Hachiya; Yosuke ;   et al. | 2014-11-20 |
Control Device For Rotary Machine And Inductance Measurement Method For Rotary Machine App 20140232314 - Hachiya; Yosuke ;   et al. | 2014-08-21 |
Substrate Processing Apparatus And Substrate Processing Method App 20130340796 - Kawano; Hisashi ;   et al. | 2013-12-26 |
Substrate Processing Apparatus And Substrate Processing Method App 20130284213 - Hachiya; Yosuke ;   et al. | 2013-10-31 |
Liquid Treatment Apparatus App 20130180659 - Itoh; Norihiro ;   et al. | 2013-07-18 |
Liquid Process Apparatus And Liquid Process Method App 20130014786 - Ito; Norihiro ;   et al. | 2013-01-17 |
Liquid Process Apparatus And Liquid Process Method App 20130014784 - ITO; Norihiro ;   et al. | 2013-01-17 |
Liquid Processing Apparatus and Liquid Processing Method App 20120180828 - HIGASHIJIMA; Jiro ;   et al. | 2012-07-19 |
Liquid Processing Apparatus, Liquid Processing Method And Computer-readable Storage Medium Storing Liquid Processing Program App 20110277793 - Inada; Takao ;   et al. | 2011-11-17 |