Habermehl; Scott D.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Habermehl; Scott D..The latest application filed is for "hybrid cmos-mems devices adapted for high-temperature operation and method for their manufacture".
- Habermehl; Scott D. - Corrales NM
| Patent | Date |
|---|---|
| Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture Grant 10,214,415 - Griffin , et al. Feb | 2019-02-26 |
| Methods of depositing an alpha-silicon-carbide-containing film at low temperature Grant 9,546,420 - Habermehl January 17, 2 | 2017-01-17 |
| Antifuse with a single silicon-rich silicon nitride insulating layer Grant 8,357,994 - Habermehl , et al. January 22, 2 | 2013-01-22 |
| Process for fabricating a microelectromechanical structure Grant 6,808,952 - Sniegowski , et al. October 26, 2 | 2004-10-26 |
| Poole-frenkel piezoconductive element and sensor Grant 6,771,083 - Habermehl August 3, 2 | 2004-08-03 |
| Use of silicon oxynitride as a sacrificial material for microelectromechanical devices Grant 6,174,820 - Habermehl , et al. January 16, 2 | 2001-01-16 |
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