Patent | Date |
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Compensated location specific processing apparatus and method Grant 10,861,674 - Gwinn , et al. December 8, 2 | 2020-12-08 |
Compensated Location Specific Processing Apparatus And Method App 20200066485 - Gwinn; Matthew C. ;   et al. | 2020-02-27 |
Compensated location specific processing apparatus and method Grant 10,497,540 - Gwinn , et al. De | 2019-12-03 |
Compensated Location Specific Processing Apparatus And Method App 20180197715 - Gwinn; Matthew C. ;   et al. | 2018-07-12 |
Process gas enhancement for beam treatment of a substrate Grant 9,735,019 - Graf , et al. August 15, 2 | 2017-08-15 |
GCIB nozzle assembly Grant 9,343,259 - Gwinn , et al. May 17, 2 | 2016-05-17 |
Process Gas Enhancement For Beam Treatment Of A Substrate App 20160071734 - Graf; Michael ;   et al. | 2016-03-10 |
Gcib Nozzle Assembly App 20160042909 - Gwinn; Matthew C. ;   et al. | 2016-02-11 |
Molecular beam enhanced GCIB treatment Grant 9,236,221 - Gwinn January 12, 2 | 2016-01-12 |
Molecular Beam Enhanced Gcib Treatment App 20150144786 - Gwinn; Matthew C. | 2015-05-28 |
Low contamination scanner for GCIB system Grant 9,029,808 - Gwinn , et al. May 12, 2 | 2015-05-12 |
Multiple nozzle gas cluster ion beam system Grant 8,981,322 - Tabat , et al. March 17, 2 | 2015-03-17 |
Low Contamination Scanner For Gcib System App 20140332696 - GWINN; Matthew C. ;   et al. | 2014-11-13 |
Scanner for GCIB system Grant 8,791,430 - Gwinn , et al. July 29, 2 | 2014-07-29 |
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles Grant 8,304,033 - Tabat , et al. November 6, 2 | 2012-11-06 |
Scanner For Gcib System App 20120223249 - GWINN; Matthew C. ;   et al. | 2012-09-06 |
Multiple nozzle gas cluster ion beam processing system and method of operating Grant 8,097,860 - Tabat , et al. January 17, 2 | 2012-01-17 |
High-voltage Gas Cluster Ion Beam (gcib) Processing System App 20110240602 - Becker; Robert K. ;   et al. | 2011-10-06 |
Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture Grant 7,825,389 - Hautala , et al. November 2, 2 | 2010-11-02 |
Multiple Nozzle Gas Cluster Ion Beam System App 20100193701 - Tabat; Martin D. ;   et al. | 2010-08-05 |
Method Of Forming Trench Isolation Using A Multiple Nozzle Gas Cluster Ion Beam Process App 20100193708 - Tabat; Martin D. ;   et al. | 2010-08-05 |
Multiple Nozzle Gas Cluster Ion Beam Processing System And Method Of Operating App 20100193472 - Tabat; Martin D. ;   et al. | 2010-08-05 |
Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment Grant 7,642,531 - Gwinn , et al. January 5, 2 | 2010-01-05 |
Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture App 20090140165 - Hautala; John J. ;   et al. | 2009-06-04 |
Apparatus And Method For Reducing Particulate Contamination In Gas Cluster Ion Beam Processing Equipment App 20080048132 - Gwinn; Matthew C. ;   et al. | 2008-02-28 |
Method And Apparatus For Scanning A Workpiece Through An Ion Beam App 20070262267 - Freytsis; Avrum ;   et al. | 2007-11-15 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system Grant 7,060,988 - Mack , et al. June 13, 2 | 2006-06-13 |
Method and apparatus for improved processing with a gas-cluster ion beam Grant 7,060,989 - Swenson , et al. June 13, 2 | 2006-06-13 |
Method and apparatus for improved processing with a gas-cluster ion beam App 20050205802 - Swenson, David R. ;   et al. | 2005-09-22 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system App 20050205801 - Mack, Michael E. ;   et al. | 2005-09-22 |
Detector and method for cluster ion beam diagnostics Grant 6,737,643 - Torti , et al. May 18, 2 | 2004-05-18 |
Gas cluster ion beam smoother apparatus Grant 6,486,478 - Libby , et al. November 26, 2 | 2002-11-26 |
Detector and method for cluster ion beam diagnostics App 20010054686 - Torti, Richard P. ;   et al. | 2001-12-27 |
Method of implanting low doses of ions into a substrate Grant 5,962,858 - Gwinn October 5, 1 | 1999-10-05 |