Patent | Date |
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Yield and line width performance for liquid polymers and other materials Grant 7,625,692 - Gurer , et al. December 1, 2 | 2009-12-01 |
Yield and line width performance for liquid polymers and other materials Grant 7,255,975 - Gurer , et al. August 14, 2 | 2007-08-14 |
Techniques for analyzing data generated by instruments Grant 7,231,324 - Orrock , et al. June 12, 2 | 2007-06-12 |
Yield and line width performance for liquid polymers and other materials App 20070089671 - Gurer; Emir ;   et al. | 2007-04-26 |
Yield and line width performance for liquid polymers and other materials Grant 7,208,262 - Gurer , et al. April 24, 2 | 2007-04-24 |
Yield and line width performance for liquid polymers and other materials App 20070059651 - Gurer; Emir ;   et al. | 2007-03-15 |
Techniques for analyzing data generated by instruments App 20060247899 - Orrock; James ;   et al. | 2006-11-02 |
Method of uniformly coating a substrate Grant 7,030,039 - Gurer , et al. April 18, 2 | 2006-04-18 |
Method of uniformly coating a substrate Grant 6,977,098 - Gurer , et al. December 20, 2 | 2005-12-20 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers Grant 6,955,720 - Gurer , et al. October 18, 2 | 2005-10-18 |
Environment exchange control for material on a wafer surface Grant 6,911,091 - Gurer , et al. June 28, 2 | 2005-06-28 |
Yield and line width performance for liquid polymers and other materials App 20050095368 - Gurer, Emir ;   et al. | 2005-05-05 |
Environment exchange control for material on a wafer surface Grant 6,844,027 - Gurer , et al. January 18, 2 | 2005-01-18 |
Environment exchange control for material on a wafer surface Grant 6,780,461 - Gurer , et al. August 24, 2 | 2004-08-24 |
Yield and line width performance for liquid polymers and other materials App 20040062876 - Gurer, Emir ;   et al. | 2004-04-01 |
Yield and line width performance for liquid polymers and other materials Grant 6,669,779 - Gurer , et al. December 30, 2 | 2003-12-30 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process Grant 6,662,466 - Gurer , et al. December 16, 2 | 2003-12-16 |
Environment exchange control for material on a wafer surface App 20030190427 - Gurer, Emir ;   et al. | 2003-10-09 |
Environment exchange control for material on a wafer surface App 20030010289 - Gurer, Emir ;   et al. | 2003-01-16 |
Yield and line width performance for liquid polymers and other materials App 20020187442 - Gurer, Emir ;   et al. | 2002-12-12 |
Method of uniformly coating a substrate App 20020127334 - Gurer, Emir ;   et al. | 2002-09-12 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process App 20020112370 - Gurer, Emir ;   et al. | 2002-08-22 |
Method of uniformly coating a substrate App 20020098283 - Gurer, Emir ;   et al. | 2002-07-25 |
Method of uniformly coating a substrate App 20020004100 - Gurer, Emir ;   et al. | 2002-01-10 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process Grant 6,327,793 - Gurer , et al. December 11, 2 | 2001-12-11 |
Plasma deposition of spin chucks to reduce contamination of silicon wafers App 20010044217 - Gurer, Emir ;   et al. | 2001-11-22 |
Environment exchange control for material on a wafer surface Grant 6,254,936 - Gurer , et al. July 3, 2 | 2001-07-03 |
Plasma deposition of spin chucks to reduce contamination of silicon wafers Grant 6,242,364 - Gurer , et al. June 5, 2 | 2001-06-05 |
Method of uniformly coating a substrate Grant 6,238,735 - Mandal , et al. May 29, 2 | 2001-05-29 |
Photoresist coating process control with solvent vapor sensor Grant 6,027,760 - Gurer , et al. February 22, 2 | 2000-02-22 |
Method of uniformly coating a substrate Grant 5,670,210 - Mandal , et al. September 23, 1 | 1997-09-23 |